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Browse by Category: Main > Chemistry
Class Information
Number: 204/298.28
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target > Rotational movement
Description: Apparatus including means for rotating the target or workpiece.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8591711 Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface Nov. 26, 2013
8535495 Coating device Sep. 17, 2013
8535496 Sputter-coating apparatus Sep. 17, 2013
8524054 Loading device and sputtering device using same Sep. 3, 2013
8500974 Carrier and sputtering device using the same Aug. 6, 2013
8500977 Coating apparatus Aug. 6, 2013
8500978 Composite coating apparatus Aug. 6, 2013
8480865 Ring cathode for use in a magnetron sputtering device Jul. 9, 2013
8460519 Protective offset sputtering Jun. 11, 2013
8454804 Protective offset sputtering Jun. 4, 2013
8425741 Ion deposition apparatus having rotatable carousel for supporting a plurality of targets Apr. 23, 2013
8293081 Physical vapor deposition device Oct. 23, 2012
8246798 Substrate processing apparatus and apparatus and method of manufacturing magnetic device Aug. 21, 2012
8241473 Sputter-coating apparatus Aug. 14, 2012
8137511 Film forming apparatus and film forming method Mar. 20, 2012
8101055 Sputtering apparatus and method for forming coating film by sputtering Jan. 24, 2012
8043483 Film forming method by sputtering and sputtering apparatus thereof Oct. 25, 2011
8043488 Rotatable sputter target Oct. 25, 2011
8012314 Manufacturing method and apparatus of phase shift mask blank Sep. 6, 2011
7981263 Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same Jul. 19, 2011
7967961 Film forming apparatus Jun. 28, 2011
7955480 Sputtering apparatus and film deposition method Jun. 7, 2011
7914654 Method and apparatus for depositing a magnetoresistive multilayer film Mar. 29, 2011
7897025 Method and apparatus for forming thin film Mar. 1, 2011
7857946 Sputtering film forming method, electronic device manufacturing method, and sputtering system Dec. 28, 2010
7811384 Method and apparatus for treating substrates in a rotary installation Oct. 12, 2010
7699933 Method and device for the plasma treatment of workpieces Apr. 20, 2010
7641773 Process for producing layers and layer systems, and coated substrate Jan. 5, 2010
7625472 Plasma-assisted sputter deposition system Dec. 1, 2009
7563349 Sputtering device Jul. 21, 2009
7479210 Temperature control of pallet in sputtering system Jan. 20, 2009
7402228 Manufacturing method and apparatus of phase shift mask blank Jul. 22, 2008
7229532 Sputtering apparatus Jun. 12, 2007
7182814 Sample holder for physical vapor deposition equipment Feb. 27, 2007
7156961 Sputtering apparatus and film forming method Jan. 2, 2007
7153410 Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces Dec. 26, 2006
7153367 Drive mechanism for a vacuum treatment apparatus Dec. 26, 2006
7150792 Film deposition system and film deposition method using the same Dec. 19, 2006
7090754 Sputtering device Aug. 15, 2006
7008520 Sputtering device Mar. 7, 2006
7001675 Method of forming a nanocomposite coating Feb. 21, 2006
7001482 Method and apparatus for improved focus ring Feb. 21, 2006
6949170 Deposition methods and apparatus Sep. 27, 2005
6913675 Film forming apparatus, substrate for forming oxide thin film, and production method thereof Jul. 5, 2005
6905578 Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure Jun. 14, 2005
6905579 Cylindrical magnetron target and spindle apparatus Jun. 14, 2005
6905582 Configurable vacuum system and method Jun. 14, 2005
6878242 Segmented sputtering target and method/apparatus for using same Apr. 12, 2005
6863785 Sputtering apparatus and sputter film deposition method Mar. 8, 2005
6858118 Apparatus for enhancing the lifetime of stencil masks Feb. 22, 2005

1 2 3 4 5










 
 
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