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Class Information
Number: 204/298.28
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target > Rotational movement
Description: Apparatus including means for rotating the target or workpiece.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7563349 |
Sputtering device |
Jul. 21, 2009 |
| 7479210 |
Temperature control of pallet in sputtering system |
Jan. 20, 2009 |
| 7402228 |
Manufacturing method and apparatus of phase shift mask blank |
Jul. 22, 2008 |
| 7229532 |
Sputtering apparatus |
Jun. 12, 2007 |
| 7182814 |
Sample holder for physical vapor deposition equipment |
Feb. 27, 2007 |
| 7156961 |
Sputtering apparatus and film forming method |
Jan. 2, 2007 |
| 7153410 |
Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces |
Dec. 26, 2006 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7150792 |
Film deposition system and film deposition method using the same |
Dec. 19, 2006 |
| 7090754 |
Sputtering device |
Aug. 15, 2006 |
| 7008520 |
Sputtering device |
Mar. 7, 2006 |
| 7001482 |
Method and apparatus for improved focus ring |
Feb. 21, 2006 |
| 7001675 |
Method of forming a nanocomposite coating |
Feb. 21, 2006 |
| 6949170 |
Deposition methods and apparatus |
Sep. 27, 2005 |
| 6913675 |
Film forming apparatus, substrate for forming oxide thin film, and production method thereof |
Jul. 5, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6905582 |
Configurable vacuum system and method |
Jun. 14, 2005 |
| 6905579 |
Cylindrical magnetron target and spindle apparatus |
Jun. 14, 2005 |
| 6878242 |
Segmented sputtering target and method/apparatus for using same |
Apr. 12, 2005 |
| 6863785 |
Sputtering apparatus and sputter film deposition method |
Mar. 8, 2005 |
| 6858118 |
Apparatus for enhancing the lifetime of stencil masks |
Feb. 22, 2005 |
| 6858119 |
Mobile plating system and method |
Feb. 22, 2005 |
| 6858085 |
Two-compartment chamber for sequential processing |
Feb. 22, 2005 |
| 6841048 |
Coating apparatus for disk-shaped workpieces |
Jan. 11, 2005 |
| 6837974 |
Single piece pod shield for vertical plenum wafer processing machine |
Jan. 4, 2005 |
| 6827789 |
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry |
Dec. 7, 2004 |
| 6818108 |
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece |
Nov. 16, 2004 |
| 6818068 |
Conveyor for treating hollow bodies comprising an advanced pressure distribution circuit |
Nov. 16, 2004 |
| 6802949 |
Method for manufacturing half-metallic magnetic oxide and plasma sputtering apparatus used in the same |
Oct. 12, 2004 |
| 6800183 |
Sputtering device |
Oct. 5, 2004 |
| 6780290 |
Method and device for forming film |
Aug. 24, 2004 |
| 6761772 |
Workpiece support |
Jul. 13, 2004 |
| 6755945 |
Ionized PVD with sequential deposition and etching |
Jun. 29, 2004 |
| 6740209 |
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media |
May. 25, 2004 |
| 6736943 |
Apparatus and method for vacuum coating deposition |
May. 18, 2004 |
| 6736948 |
Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation |
May. 18, 2004 |
| 6733640 |
Shutter assembly having optimized shutter opening shape for thin film uniformity |
May. 11, 2004 |
| 6726816 |
Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation |
Apr. 27, 2004 |
| 6723209 |
System and method for performing thin film deposition or chemical treatment using an energetic flux of neutral reactive molecular fragments, atoms or radicals |
Apr. 20, 2004 |
| 6692618 |
Magnetron sputter source with multipart target |
Feb. 17, 2004 |
| 6689255 |
System and method for making thin-film structures using a stepped profile mask |
Feb. 10, 2004 |
| 6676989 |
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology |
Jan. 13, 2004 |
| 6669824 |
Dual-scan thin film processing system |
Dec. 30, 2003 |
| 6656330 |
Coating installation for disk-form workpieces |
Dec. 2, 2003 |
| 6641703 |
Magnetic multi-layer film manufacturing apparatus |
Nov. 4, 2003 |
| 6641702 |
Sputtering device |
Nov. 4, 2003 |
| 6616818 |
Apparatus and method for coating substrates |
Sep. 9, 2003 |
| 6616816 |
Substrate processing device and method |
Sep. 9, 2003 |
| 6605195 |
Multi-layer deposition process using four ring sputter sources |
Aug. 12, 2003 |
| 6582572 |
Target fabrication method for cylindrical cathodes |
Jun. 24, 2003 |
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