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Class Information
Number: 204/298.27
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target > Plural modes of movement (e.g., planetary, epicyclic, etc.)
Description: Apparatus including means for moving the target or workpiece in plural modes (e.g., directions), such as planetary or epicyclic motion.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8545630 Coating apparatus Oct. 1, 2013
8535495 Coating device Sep. 17, 2013
8535496 Sputter-coating apparatus Sep. 17, 2013
8524054 Loading device and sputtering device using same Sep. 3, 2013
8500974 Carrier and sputtering device using the same Aug. 6, 2013
8480865 Ring cathode for use in a magnetron sputtering device Jul. 9, 2013
8430964 Coating apparatus Apr. 30, 2013
8241473 Sputter-coating apparatus Aug. 14, 2012
8137519 Sputtering cathode, sputtering apparatus provided with sputtering cathode, film-forming method, and method for manufacturing electronic device Mar. 20, 2012
8133358 Method and apparatus for producing a metal wire coated with a layer of metal alloy Mar. 13, 2012
8101055 Sputtering apparatus and method for forming coating film by sputtering Jan. 24, 2012
8070146 Support device for sputtering machine Dec. 6, 2011
8043483 Film forming method by sputtering and sputtering apparatus thereof Oct. 25, 2011
7879201 Method and apparatus for surface processing of a substrate Feb. 1, 2011
7828900 Vacuum film-forming apparatus Nov. 9, 2010
7790004 Substrate holder for a vapour deposition system Sep. 7, 2010
7785456 Magnetic latch for a vapour deposition system Aug. 31, 2010
7625472 Plasma-assisted sputter deposition system Dec. 1, 2009
7575662 Method for operating a sputter cathode with a target Aug. 18, 2009
7563349 Sputtering device Jul. 21, 2009
7229532 Sputtering apparatus Jun. 12, 2007
7182814 Sample holder for physical vapor deposition equipment Feb. 27, 2007
7153367 Drive mechanism for a vacuum treatment apparatus Dec. 26, 2006
7153399 Method and apparatus for producing uniform isotropic stresses in a sputtered film Dec. 26, 2006
6905582 Configurable vacuum system and method Jun. 14, 2005
6905578 Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure Jun. 14, 2005
6858085 Two-compartment chamber for sequential processing Feb. 22, 2005
6858119 Mobile plating system and method Feb. 22, 2005
6843883 Vacuum processing apparatus and method for producing an object to be processed Jan. 18, 2005
6841048 Coating apparatus for disk-shaped workpieces Jan. 11, 2005
6837940 Film-forming device with a substrate rotating mechanism Jan. 4, 2005
6827789 Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry Dec. 7, 2004
6818108 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece Nov. 16, 2004
6797069 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers Sep. 28, 2004
6761772 Workpiece support Jul. 13, 2004
6676989 Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology Jan. 13, 2004
6669824 Dual-scan thin film processing system Dec. 30, 2003
6656330 Coating installation for disk-form workpieces Dec. 2, 2003
6649208 Apparatus and method for thin film deposition onto substrates Nov. 18, 2003
6632282 Planetary multi-substrate holder system for material deposition Oct. 14, 2003
6616818 Apparatus and method for coating substrates Sep. 9, 2003
6592675 Rotating susceptor Jul. 15, 2003
6579420 Apparatus and method for uniformly depositing thin films over substrates Jun. 17, 2003
6517692 Apparatus for flow-line treatment of articles in an artificial medium Feb. 11, 2003
6503379 Mobile plating system and method Jan. 7, 2003
6494997 Radio frequency magnetron sputtering for lighting applications Dec. 17, 2002
6495010 Differentially-pumped material processing system Dec. 17, 2002
6485616 System and method for coating substrates with improved capacity and uniformity Nov. 26, 2002
6461484 Sputtering device Oct. 8, 2002
6454908 Vacuum treatment system Sep. 24, 2002

1 2 3

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