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Class Information
Number: 204/298.26
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target > Plural diverse treatment stations, zones, or coating material source within single chamber
Description: Apparatus including plural diverse treatment stations or zones (e.g., plural sputter coating stations, sputter coating and etching stations, or sputter coating and other pre-treatment or post-treatment stations, etc.) within a single chamber and means for moving at least one workpiece through the plurality of stations or zones.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7588669 |
Single-process-chamber deposition system |
Sep. 15, 2009 |
| 7578909 |
Method of forming CNT containing wiring material and sputtering target material used for the method |
Aug. 25, 2009 |
| 7575662 |
Method for operating a sputter cathode with a target |
Aug. 18, 2009 |
| 7537676 |
Cathode apparatus to selectively bias pallet during sputtering |
May. 26, 2009 |
| 7491301 |
Methods and apparatuses for depositing film on both sides of a pane |
Feb. 17, 2009 |
| 7479210 |
Temperature control of pallet in sputtering system |
Jan. 20, 2009 |
| 7347919 |
Sputter source, sputtering device, and sputtering method |
Mar. 25, 2008 |
| 7285196 |
Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals |
Oct. 23, 2007 |
| 7279201 |
Methods and apparatus for forming precursors |
Oct. 9, 2007 |
| 7264741 |
Coater having substrate cleaning device and coating deposition methods employing such coater |
Sep. 4, 2007 |
| 7198699 |
Sputter coating apparatus including ion beam source(s), and corresponding method |
Apr. 3, 2007 |
| 7156961 |
Sputtering apparatus and film forming method |
Jan. 2, 2007 |
| 7153399 |
Method and apparatus for producing uniform isotropic stresses in a sputtered film |
Dec. 26, 2006 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7141145 |
Gas injection for uniform composition reactively sputter-deposited thin films |
Nov. 28, 2006 |
| 7090754 |
Sputtering device |
Aug. 15, 2006 |
| 7063984 |
Low temperature deposition of complex metal oxides (CMO) memory materials for non-volatile memory integrated circuits |
Jun. 20, 2006 |
| 7039501 |
Method for determining a position of a robot |
May. 2, 2006 |
| 7011733 |
Method and apparatus for depositing films |
Mar. 14, 2006 |
| 7008520 |
Sputtering device |
Mar. 7, 2006 |
| 6972055 |
Continuous flow deposition system |
Dec. 6, 2005 |
| 6964731 |
Soil-resistant coating for glass surfaces |
Nov. 15, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6858085 |
Two-compartment chamber for sequential processing |
Feb. 22, 2005 |
| 6858115 |
Process for reforming surface of substrate, reformed substrate and apparatus for the same |
Feb. 22, 2005 |
| 6835290 |
System and method for controlling thin film defects |
Dec. 28, 2004 |
| 6827824 |
Enhanced collimated deposition |
Dec. 7, 2004 |
| 6800183 |
Sputtering device |
Oct. 5, 2004 |
| 6793735 |
Integrated cobalt silicide process for semiconductor devices |
Sep. 21, 2004 |
| 6770175 |
Apparatus for and method of forming electrode for lithium secondary cell |
Aug. 3, 2004 |
| 6752912 |
Laser selection of ions for sputter deposition of titanium containing films |
Jun. 22, 2004 |
| 6749730 |
Sputter device |
Jun. 15, 2004 |
| 6740209 |
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media |
May. 25, 2004 |
| 6733642 |
System for unbalanced magnetron sputtering with AC power |
May. 11, 2004 |
| 6660140 |
Sputtering apparatus |
Dec. 9, 2003 |
| 6656330 |
Coating installation for disk-form workpieces |
Dec. 2, 2003 |
| 6641702 |
Sputtering device |
Nov. 4, 2003 |
| 6641703 |
Magnetic multi-layer film manufacturing apparatus |
Nov. 4, 2003 |
| 6620299 |
Process and device for the coating of substrates by means of bipolar pulsed magnetron sputtering and the use thereof |
Sep. 16, 2003 |
| 6613204 |
Pretreatment process for a surface texturing process |
Sep. 2, 2003 |
| 6596133 |
Method and system for physically-assisted chemical-vapor deposition |
Jul. 22, 2003 |
| 6579422 |
Method and apparatus for manufacturing flexible organic EL display |
Jun. 17, 2003 |
| 6579423 |
Light transmitting electromagnetic wave filter and process for producing the same |
Jun. 17, 2003 |
| 6554980 |
Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates |
Apr. 29, 2003 |
| 6533904 |
Oxide film, laminate and methods for their production |
Mar. 18, 2003 |
| 6530732 |
Single substrate load lock with offset cool module and buffer chamber |
Mar. 11, 2003 |
| 6506290 |
Sputtering apparatus with magnetron device |
Jan. 14, 2003 |
| 6497799 |
Method and apparatus for sputter deposition of multilayer films |
Dec. 24, 2002 |
| 6494997 |
Radio frequency magnetron sputtering for lighting applications |
Dec. 17, 2002 |
| 6488824 |
Sputtering apparatus and process for high rate coatings |
Dec. 3, 2002 |
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