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Class Information
Number: 204/298.25
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target > Multi-chamber (e.g., including air lock, load/unload chamber, etc.)
Description: Apparatus including a plurality of distinct chambers or subchambers (e.g., air lock, loading or unloading chamber, plural diverse treatment chambers, etc.) and means for moving at least one workpiece through the plurality of chambers or subchambers.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7575406 |
Substrate processing apparatus |
Aug. 18, 2009 |
| 7537676 |
Cathode apparatus to selectively bias pallet during sputtering |
May. 26, 2009 |
| 7521089 |
Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers |
Apr. 21, 2009 |
| 7517438 |
Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system |
Apr. 14, 2009 |
| 7513981 |
Manufacturing apparatus of semiconductor device |
Apr. 7, 2009 |
| 7491301 |
Methods and apparatuses for depositing film on both sides of a pane |
Feb. 17, 2009 |
| 7413639 |
Energy and media connection for a coating installation comprising several chambers |
Aug. 19, 2008 |
| 7402228 |
Manufacturing method and apparatus of phase shift mask blank |
Jul. 22, 2008 |
| 7381969 |
Load lock control |
Jun. 3, 2008 |
| 7351292 |
Assembly for processing substrates |
Apr. 1, 2008 |
| 7312958 |
Method for manufacturing magnetic disk apparatus |
Dec. 25, 2007 |
| 7300557 |
Device for targeted application of deposition material to a substrate |
Nov. 27, 2007 |
| 7299104 |
Substrate processing apparatus and substrate transferring method |
Nov. 20, 2007 |
| 7279201 |
Methods and apparatus for forming precursors |
Oct. 9, 2007 |
| 7273534 |
Optical device substrate film-formation apparatus, optical disk substrate film-formation method, substrate holder manufacture method, substrate holder, optical disk and a phase-change recordin |
Sep. 25, 2007 |
| 7267725 |
Thin-film deposition apparatus |
Sep. 11, 2007 |
| 7264741 |
Coater having substrate cleaning device and coating deposition methods employing such coater |
Sep. 4, 2007 |
| 7258768 |
Method of fabricating an EL display device, and apparatus for forming a thin film |
Aug. 21, 2007 |
| 7198699 |
Sputter coating apparatus including ion beam source(s), and corresponding method |
Apr. 3, 2007 |
| 7163608 |
Apparatus for synthesis of layers, coatings or films |
Jan. 16, 2007 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7090741 |
Semiconductor processing system |
Aug. 15, 2006 |
| 7039501 |
Method for determining a position of a robot |
May. 2, 2006 |
| 7033471 |
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
Apr. 25, 2006 |
| 7032614 |
Facilities connection box for pre-facilitation of wafer fabrication equipment |
Apr. 25, 2006 |
| 7030401 |
Modular substrate measurement system |
Apr. 18, 2006 |
| 7018517 |
Transfer chamber for vacuum processing system |
Mar. 28, 2006 |
| 6964731 |
Soil-resistant coating for glass surfaces |
Nov. 15, 2005 |
| 6949173 |
Continuous coating system |
Sep. 27, 2005 |
| 6942768 |
Vacuum coating apparatus |
Sep. 13, 2005 |
| 6919001 |
Disk coating system |
Jul. 19, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6905582 |
Configurable vacuum system and method |
Jun. 14, 2005 |
| 6899799 |
Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
May. 31, 2005 |
| 6893544 |
Apparatus and method for depositing thin films on a glass substrate |
May. 17, 2005 |
| 6884299 |
Deposition apparatus for organic light-emitting devices |
Apr. 26, 2005 |
| 6860965 |
High throughput architecture for semiconductor processing |
Mar. 1, 2005 |
| 6858085 |
Two-compartment chamber for sequential processing |
Feb. 22, 2005 |
| 6858119 |
Mobile plating system and method |
Feb. 22, 2005 |
| 6852194 |
Processing apparatus, transferring apparatus and transferring method |
Feb. 8, 2005 |
| 6846380 |
Substrate processing apparatus and related systems and methods |
Jan. 25, 2005 |
| 6843883 |
Vacuum processing apparatus and method for producing an object to be processed |
Jan. 18, 2005 |
| 6843892 |
Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet |
Jan. 18, 2005 |
| 6841049 |
OPTICAL DEVICE SUBSTRATE FILM-FORMATION APPARATUS, OPTICAL DISK SUBSTRATE FILM-FORMATION METHOD, SUBSTRATE HOLDER MANUFACTURE METHOD, SUBSTRATE HOLDER, OPTICAL DISK AND A PHASE-CHANGE RECORDIN |
Jan. 11, 2005 |
| 6841006 |
Atmospheric substrate processing apparatus for depositing multiple layers on a substrate |
Jan. 11, 2005 |
| 6841048 |
Coating apparatus for disk-shaped workpieces |
Jan. 11, 2005 |
| 6833031 |
Method and device for coating a substrate |
Dec. 21, 2004 |
| 6830664 |
Cluster tool with a hollow cathode array |
Dec. 14, 2004 |
| 6827789 |
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry |
Dec. 7, 2004 |
| 6827788 |
Substrate processing device and through-chamber |
Dec. 7, 2004 |
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