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Class Information
Number: 204/298.23
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target
Description: Apparatus including means for moving the target or workpiece relative to each other.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7588669 |
Single-process-chamber deposition system |
Sep. 15, 2009 |
| 7578908 |
Sputter coating system |
Aug. 25, 2009 |
| 7575661 |
Reactive sputtering method |
Aug. 18, 2009 |
| 7563349 |
Sputtering device |
Jul. 21, 2009 |
| 7517438 |
Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system |
Apr. 14, 2009 |
| 7510634 |
Apparatus and methods for deposition and/or etch selectivity |
Mar. 31, 2009 |
| 7479210 |
Temperature control of pallet in sputtering system |
Jan. 20, 2009 |
| 7455755 |
Vacuum plasma generator |
Nov. 25, 2008 |
| 7410542 |
Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates |
Aug. 12, 2008 |
| 7402228 |
Manufacturing method and apparatus of phase shift mask blank |
Jul. 22, 2008 |
| 7361256 |
Electrolytic reactor |
Apr. 22, 2008 |
| 7347919 |
Sputter source, sputtering device, and sputtering method |
Mar. 25, 2008 |
| 7300557 |
Device for targeted application of deposition material to a substrate |
Nov. 27, 2007 |
| 7294283 |
Penning discharge plasma source |
Nov. 13, 2007 |
| 7267725 |
Thin-film deposition apparatus |
Sep. 11, 2007 |
| 7229532 |
Sputtering apparatus |
Jun. 12, 2007 |
| 7214274 |
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
May. 8, 2007 |
| 7198699 |
Sputter coating apparatus including ion beam source(s), and corresponding method |
Apr. 3, 2007 |
| 7179352 |
Vacuum treatment system and process for manufacturing workpieces |
Feb. 20, 2007 |
| 7163608 |
Apparatus for synthesis of layers, coatings or films |
Jan. 16, 2007 |
| 7156961 |
Sputtering apparatus and film forming method |
Jan. 2, 2007 |
| 7153399 |
Method and apparatus for producing uniform isotropic stresses in a sputtered film |
Dec. 26, 2006 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7090754 |
Sputtering device |
Aug. 15, 2006 |
| 7041202 |
Timing apparatus and method to selectively bias during sputtering |
May. 9, 2006 |
| 7033471 |
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
Apr. 25, 2006 |
| 7008518 |
Method and apparatus for monitoring optical characteristics of thin films in a deposition process |
Mar. 7, 2006 |
| 7001482 |
Method and apparatus for improved focus ring |
Feb. 21, 2006 |
| 6962648 |
Back-biased face target sputtering |
Nov. 8, 2005 |
| 6949170 |
Deposition methods and apparatus |
Sep. 27, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6905582 |
Configurable vacuum system and method |
Jun. 14, 2005 |
| 6899795 |
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
May. 31, 2005 |
| 6893544 |
Apparatus and method for depositing thin films on a glass substrate |
May. 17, 2005 |
| 6875280 |
Substrate processing apparatus and substrate processing method |
Apr. 5, 2005 |
| 6858119 |
Mobile plating system and method |
Feb. 22, 2005 |
| 6835289 |
Particle implantation apparatus and particle implantation method |
Dec. 28, 2004 |
| 6822158 |
Thin-film solar cell and manufacture method therefor |
Nov. 23, 2004 |
| 6818108 |
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece |
Nov. 16, 2004 |
| 6808592 |
High throughput plasma treatment system |
Oct. 26, 2004 |
| 6787012 |
Apparatus for the synthesis of layers, coatings or films |
Sep. 7, 2004 |
| 6783641 |
Vacuum treatment system and process for manufacturing workpieces |
Aug. 31, 2004 |
| 6780290 |
Method and device for forming film |
Aug. 24, 2004 |
| 6767439 |
High throughput thin film deposition and substrate handling method and apparatus for optical disk processing |
Jul. 27, 2004 |
| 6749729 |
Method and apparatus for workpiece biassing utilizing non-arcing bias rail |
Jun. 15, 2004 |
| 6740210 |
Sputtering method for forming film and apparatus therefor |
May. 25, 2004 |
| 6740209 |
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media |
May. 25, 2004 |
| 6736946 |
Physical vapor deposition apparatus with modified shutter disk and cover ring |
May. 18, 2004 |
| 6736943 |
Apparatus and method for vacuum coating deposition |
May. 18, 2004 |
| 6723209 |
System and method for performing thin film deposition or chemical treatment using an energetic flux of neutral reactive molecular fragments, atoms or radicals |
Apr. 20, 2004 |
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