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Browse by Category: Main > Chemistry
Class Information
Number: 204/298.15
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Specified work holder
Description: Apparatus including significant specified means for holding a workpiece.










Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8702918 Apparatus for enabling concentricity of plasma dark space Apr. 22, 2014
8647486 Magnet bar support system Feb. 11, 2014
8591711 Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface Nov. 26, 2013
8557093 Deposition system with electrically isolated pallet and anode assemblies Oct. 15, 2013
8535495 Coating device Sep. 17, 2013
8535496 Sputter-coating apparatus Sep. 17, 2013
8524054 Loading device and sputtering device using same Sep. 3, 2013
8517364 Disk holder with replaceable inserts to retain springs Aug. 27, 2013
8512530 Sputtering apparatus Aug. 20, 2013
8506772 Sputtering apparatus Aug. 13, 2013
8499715 Coating appratus having two coating devices for successively coating same surface of substrate Aug. 6, 2013
8500974 Carrier and sputtering device using the same Aug. 6, 2013
8430998 Sputtering apparatus Apr. 30, 2013
8414968 In-line film forming apparatus and manufacturing method of magnetic recording medium Apr. 9, 2013
8388753 Coating apparatus Mar. 5, 2013
8382965 Tools and methods for mounting transport rails in a substrate processing system Feb. 26, 2013
8371565 Clamping device and coating apparatus having same Feb. 12, 2013
8252118 Substrate support device and plasma processing apparatus Aug. 28, 2012
8241473 Sputter-coating apparatus Aug. 14, 2012
8236151 Substrate carrier for wet chemical processing Aug. 7, 2012
8221602 Non-contact process kit Jul. 17, 2012
8182660 Power supply apparatus and deposition method using the power supply apparatus May. 22, 2012
8168050 Electrode pattern for resistance heating element and wafer processing apparatus May. 1, 2012
8147664 Sputtering apparatus Apr. 3, 2012
8133362 Physical vapor deposition with multi-point clamp Mar. 13, 2012
8128793 Vertical substrate transfer apparatus and film-forming apparatus Mar. 6, 2012
8110078 Substrate supporting device and sputtering apparatus including the same Feb. 7, 2012
8101054 Magnetic particle trapper for a disk sputtering system Jan. 24, 2012
8101055 Sputtering apparatus and method for forming coating film by sputtering Jan. 24, 2012
8101049 Method for producing low cost media Jan. 24, 2012
8083912 Substrate carrier Dec. 27, 2011
8082977 Ceramic mounting for wafer apparatus with thermal expansion feature Dec. 27, 2011
8062487 Wafer supporting device of a sputtering apparatus Nov. 22, 2011
8052853 Sputtering apparatus and method of preventing damage thereof Nov. 8, 2011
8047636 Film depositing apparatus, a film depositing method, a piezoelectric film, and a liquid ejecting apparatus Nov. 1, 2011
8038797 Apparatus and method for manufacturing magnetic recording medium Oct. 18, 2011
8038850 Sputter deposition method for forming integrated circuit Oct. 18, 2011
8007644 Inclined carrier transferring apparatus Aug. 30, 2011
7985296 Sample fixing device of evaporation machine Jul. 26, 2011
7967961 Film forming apparatus Jun. 28, 2011
7964069 Device for galvanic coating of a piston Jun. 21, 2011
7951272 Thin film producing method May. 31, 2011
7927473 Substrate holder, deposition method using substrate holder, hard disk manufacturing method, deposition apparatus, and program Apr. 19, 2011
7922882 Substrate holding device, substrate processing system and liquid crystal display device Apr. 12, 2011
7837843 Fixture for use in a coating operation Nov. 23, 2010
7790004 Substrate holder for a vapour deposition system Sep. 7, 2010
7785456 Magnetic latch for a vapour deposition system Aug. 31, 2010
7678198 Vertical-offset coater Mar. 16, 2010
7638022 Magnetron source for deposition on large substrates Dec. 29, 2009
7571698 Low-frequency bias power in HDP-CVD processes Aug. 11, 2009

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