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Class Information
Number: 204/298.13
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Specified target particulars > Target composition
Description: Apparatus wherein the composition of the target is specified.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618520 |
Physical vapor deposition target constructions |
Nov. 17, 2009 |
| 7618521 |
Split magnet ring on a magnetron sputter chamber |
Nov. 17, 2009 |
| 7604717 |
Electrochemical device |
Oct. 20, 2009 |
| 7598004 |
Film-depositing target and preparation of phase shift mask blank |
Oct. 6, 2009 |
| 7588668 |
Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
Sep. 15, 2009 |
| 7578909 |
Method of forming CNT containing wiring material and sputtering target material used for the method |
Aug. 25, 2009 |
| 7566472 |
Easy-to-clean cooking surface and electric household appliance comprising same |
Jul. 28, 2009 |
| 7566438 |
Method for manufacturing nanostructured manganese oxide having dendritic structure, and oxygen reduction electrode comprising nanostructured transition metal oxide having dendritic structure |
Jul. 28, 2009 |
| 7563488 |
Process for the manufacturing of a sputter target |
Jul. 21, 2009 |
| 7550066 |
Staggered target tiles |
Jun. 23, 2009 |
| 7540976 |
Sputtering target for forming thin phosphor film |
Jun. 2, 2009 |
| 7521132 |
Coated tool |
Apr. 21, 2009 |
| 7513981 |
Manufacturing apparatus of semiconductor device |
Apr. 7, 2009 |
| 7510990 |
Sputtering target, optical thin film and manufacturing method thereof using the sputtering target, and optical recording medium |
Mar. 31, 2009 |
| 7510635 |
High purity zinc oxide powder and method for production thereof, and high purity zinc oxide target and thin film of high purity zinc oxide |
Mar. 31, 2009 |
| 7494617 |
Enhanced formulation of cobalt alloy matrix compositions |
Feb. 24, 2009 |
| 7467741 |
Method of forming a sputtering target assembly and assembly made therefrom |
Dec. 23, 2008 |
| 7468110 |
Hollow cathode target and methods of making same |
Dec. 23, 2008 |
| 7431808 |
Sputter target based on titanium dioxide |
Oct. 7, 2008 |
| 7393600 |
Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein |
Jul. 1, 2008 |
| 7347353 |
Method for connecting magnetic substance target to backing plate, and magnetic substance target |
Mar. 25, 2008 |
| 7338582 |
Method for manufacturing manganese oxide nanostructure and oxygen reduction electrode using said manganese oxide nanostructure |
Mar. 4, 2008 |
| RE40100 |
Fabrication of B/C/N/O/Si doped sputtering targets |
Feb. 26, 2008 |
| 7316763 |
Multiple target tiles with complementary beveled edges forming a slanted gap therebetween |
Jan. 8, 2008 |
| 7282123 |
Composite sputter target and phosphor deposition method |
Oct. 16, 2007 |
| 7279211 |
Sputtering target containing zinc sulfide as major component, optical recording medium on which phase change optical disk protective film containing zinc sulfide as major component is formed b |
Oct. 9, 2007 |
| 7241368 |
Hafnium silicide target for gate oxide film formation and its production method |
Jul. 10, 2007 |
| 7229588 |
Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidified alloy powders and elemental Pt metal |
Jun. 12, 2007 |
| 7186324 |
Hard film cutting tools, cutting tool coated with hard film, process for forming hard film and target used to form hard film |
Mar. 6, 2007 |
| 7175802 |
Refurbishing spent sputtering targets |
Feb. 13, 2007 |
| 7166921 |
Aluminum alloy film for wiring and sputter target material for forming the film |
Jan. 23, 2007 |
| 7156963 |
Tantalum sputtering target and method for preparation thereof |
Jan. 2, 2007 |
| 7156964 |
Sputtering target for phase-change memory, film for phase change memory formed by using the target, and method for producing the target |
Jan. 2, 2007 |
| 7150810 |
Sputtering target and method for fabricating the same |
Dec. 19, 2006 |
| 7146703 |
Low temperature sputter target/backing plate method and assembly |
Dec. 12, 2006 |
| 7087142 |
Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target |
Aug. 8, 2006 |
| 7081148 |
Textured-grain-powder metallurgy tantalum sputter target |
Jul. 25, 2006 |
| 7074506 |
Method of forming a ceramic coating on a substrate by electron-beam physical vapor deposition |
Jul. 11, 2006 |
| 7063773 |
High purity sputter targets with target end-of-life indication and method of manufacture |
Jun. 20, 2006 |
| 7041205 |
Sputtering target and method for making composite soft magnetic films with a sintered target |
May. 9, 2006 |
| 7041204 |
Physical vapor deposition components and methods of formation |
May. 9, 2006 |
| 7041200 |
Reducing particle generation during sputter deposition |
May. 9, 2006 |
| 7037413 |
Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information |
May. 2, 2006 |
| 7008519 |
Sputtering target for forming high-resistance transparent conductive film, and method for producing the film |
Mar. 7, 2006 |
| 7001675 |
Method of forming a nanocomposite coating |
Feb. 21, 2006 |
| 6994775 |
Multilayer composites and manufacture of same |
Feb. 7, 2006 |
| 6986834 |
Hafnium silicide target and manufacturing method for preparation thereof |
Jan. 17, 2006 |
| 6946039 |
Physical vapor deposition targets, and methods of fabricating metallic materials |
Sep. 20, 2005 |
| 6929726 |
Sputtering target, Al interconnection film, and electronic component |
Aug. 16, 2005 |
| 6921470 |
Method of forming metal blanks for sputtering targets |
Jul. 26, 2005 |
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