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Class Information
Number: 204/298.12
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Specified target particulars
Description: Apparatus wherein a significant target feature or particular target construction is specified.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625471 |
Sacrificial cathode target for sputtering cathode assembly |
Dec. 1, 2009 |
| 7618520 |
Physical vapor deposition target constructions |
Nov. 17, 2009 |
| 7601246 |
Methods of sputtering a protective coating on a semiconductor substrate |
Oct. 13, 2009 |
| 7588668 |
Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
Sep. 15, 2009 |
| 7588669 |
Single-process-chamber deposition system |
Sep. 15, 2009 |
| 7585399 |
Rotating magnet arrays for magnetron sputtering apparatus |
Sep. 8, 2009 |
| 7578909 |
Method of forming CNT containing wiring material and sputtering target material used for the method |
Aug. 25, 2009 |
| 7575661 |
Reactive sputtering method |
Aug. 18, 2009 |
| 7575662 |
Method for operating a sputter cathode with a target |
Aug. 18, 2009 |
| 7566438 |
Method for manufacturing nanostructured manganese oxide having dendritic structure, and oxygen reduction electrode comprising nanostructured transition metal oxide having dendritic structure |
Jul. 28, 2009 |
| 7563488 |
Process for the manufacturing of a sputter target |
Jul. 21, 2009 |
| 7550066 |
Staggered target tiles |
Jun. 23, 2009 |
| 7550055 |
Elastomer bonding of large area sputtering target |
Jun. 23, 2009 |
| 7540976 |
Sputtering target for forming thin phosphor film |
Jun. 2, 2009 |
| 7531232 |
Component for vacuum apparatus, production method thereof and apparatus using the same |
May. 12, 2009 |
| 7521132 |
Coated tool |
Apr. 21, 2009 |
| 7504008 |
Refurbishment of sputtering targets |
Mar. 17, 2009 |
| 7476289 |
Vacuum elastomer bonding apparatus and method |
Jan. 13, 2009 |
| 7468110 |
Hollow cathode target and methods of making same |
Dec. 23, 2008 |
| 7467741 |
Method of forming a sputtering target assembly and assembly made therefrom |
Dec. 23, 2008 |
| 7431808 |
Sputter target based on titanium dioxide |
Oct. 7, 2008 |
| 7399387 |
Target for sputtering and a method for manufacturing a magnetic recording medium using the target |
Jul. 15, 2008 |
| 7381282 |
Co alloy target and its production method, soft magnetic film for perpendicular magnetic recording and perpendicular magnetic recording medium |
Jun. 3, 2008 |
| 7371285 |
Motorized chamber lid |
May. 13, 2008 |
| 7347353 |
Method for connecting magnetic substance target to backing plate, and magnetic substance target |
Mar. 25, 2008 |
| 7338582 |
Method for manufacturing manganese oxide nanostructure and oxygen reduction electrode using said manganese oxide nanostructure |
Mar. 4, 2008 |
| 7316763 |
Multiple target tiles with complementary beveled edges forming a slanted gap therebetween |
Jan. 8, 2008 |
| 7282122 |
Method and system for target lifetime |
Oct. 16, 2007 |
| 7282123 |
Composite sputter target and phosphor deposition method |
Oct. 16, 2007 |
| 7241368 |
Hafnium silicide target for gate oxide film formation and its production method |
Jul. 10, 2007 |
| 7235160 |
Hollow cathode sputtering apparatus and related method |
Jun. 26, 2007 |
| 7235162 |
Cathode for vacuum sputtering treatment machine |
Jun. 26, 2007 |
| 7229588 |
Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidified alloy powders and elemental Pt metal |
Jun. 12, 2007 |
| 7186324 |
Hard film cutting tools, cutting tool coated with hard film, process for forming hard film and target used to form hard film |
Mar. 6, 2007 |
| 7175802 |
Refurbishing spent sputtering targets |
Feb. 13, 2007 |
| 7159537 |
Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems |
Jan. 9, 2007 |
| 7156963 |
Tantalum sputtering target and method for preparation thereof |
Jan. 2, 2007 |
| 7156960 |
Method and device for continuous cold plasma deposition of metal coatings |
Jan. 2, 2007 |
| 7153399 |
Method and apparatus for producing uniform isotropic stresses in a sputtered film |
Dec. 26, 2006 |
| 7150810 |
Sputtering target and method for fabricating the same |
Dec. 19, 2006 |
| 7146703 |
Low temperature sputter target/backing plate method and assembly |
Dec. 12, 2006 |
| 7135097 |
Box-shaped facing-targets sputtering apparatus and method for producing compound thin film |
Nov. 14, 2006 |
| 7115193 |
Sputtering target producing very few particles, backing plate or apparatus within sputtering device and roughening method by electric discharge machining |
Oct. 3, 2006 |
| 7090754 |
Sputtering device |
Aug. 15, 2006 |
| 7087142 |
Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target |
Aug. 8, 2006 |
| 7087145 |
Sputtering cathode assembly |
Aug. 8, 2006 |
| 7074506 |
Method of forming a ceramic coating on a substrate by electron-beam physical vapor deposition |
Jul. 11, 2006 |
| 7063773 |
High purity sputter targets with target end-of-life indication and method of manufacture |
Jun. 20, 2006 |
| 7063984 |
Low temperature deposition of complex metal oxides (CMO) memory materials for non-volatile memory integrated circuits |
Jun. 20, 2006 |
| 7041204 |
Physical vapor deposition components and methods of formation |
May. 9, 2006 |
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