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Class Information
Number: 204/298.11
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Specified mask, shield or shutter
Description: Apparatus including significant specified means for masking, shielding or shuttering of electrodes or workpieces.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7591935 |
Enhanced reliability deposition baffle for iPVD |
Sep. 22, 2009 |
| 7569125 |
Shields usable with an inductively coupled plasma reactor |
Aug. 4, 2009 |
| 7548304 |
Chuck plate assembly with cooling means |
Jun. 16, 2009 |
| 7537676 |
Cathode apparatus to selectively bias pallet during sputtering |
May. 26, 2009 |
| 7531232 |
Component for vacuum apparatus, production method thereof and apparatus using the same |
May. 12, 2009 |
| 7520969 |
Notched deposition ring |
Apr. 21, 2009 |
| 7517438 |
Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system |
Apr. 14, 2009 |
| 7517437 |
RF powered target for increasing deposition uniformity in sputtering systems |
Apr. 14, 2009 |
| 7498587 |
Bi-directional filtered arc plasma source |
Mar. 3, 2009 |
| 7489494 |
Guard wafer for semiconductor structure fabrication |
Feb. 10, 2009 |
| 7462854 |
Collimator fabrication |
Dec. 9, 2008 |
| 7445697 |
Method and apparatus for fluid processing a workpiece |
Nov. 4, 2008 |
| 7407565 |
Method and apparatus for ionized plasma deposition |
Aug. 5, 2008 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7374648 |
Single piece coil support assemblies, coil constructions and methods of assembling coil constructions |
May. 20, 2008 |
| 7372689 |
Guard wafer for semiconductor structure fabrication |
May. 13, 2008 |
| 7338581 |
Sputtering apparatus |
Mar. 4, 2008 |
| 7309842 |
Shielded monolithic microplasma source for prevention of continuous thin film formation |
Dec. 18, 2007 |
| 7306707 |
Adaptable processing element for a processing system and a method of making the same |
Dec. 11, 2007 |
| 7294242 |
Collimated and long throw magnetron sputtering of nickel/iron films for magnetic recording head applications |
Nov. 13, 2007 |
| 7294245 |
Cover ring and shield supporting a wafer ring in a plasma reactor |
Nov. 13, 2007 |
| 7285196 |
Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals |
Oct. 23, 2007 |
| 7244344 |
Physical vapor deposition plasma reactor with VHF source power applied through the workpiece |
Jul. 17, 2007 |
| 7241397 |
Honeycomb optical window deposition shield and method for a plasma processing system |
Jul. 10, 2007 |
| 7229532 |
Sputtering apparatus |
Jun. 12, 2007 |
| 7223448 |
Methods for providing uniformity in plasma-assisted material processes |
May. 29, 2007 |
| 7182816 |
Particulate reduction using temperature-controlled chamber shield |
Feb. 27, 2007 |
| 7179335 |
In situ adaptive masks |
Feb. 20, 2007 |
| 7163607 |
Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system |
Jan. 16, 2007 |
| 7150859 |
Microarray fabricating device |
Dec. 19, 2006 |
| 7115193 |
Sputtering target producing very few particles, backing plate or apparatus within sputtering device and roughening method by electric discharge machining |
Oct. 3, 2006 |
| 7097744 |
Method and apparatus for controlling darkspace gap in a chamber |
Aug. 29, 2006 |
| 7097750 |
Device for fixing substrate for thin film sputter and method of fixing substrate using the same |
Aug. 29, 2006 |
| 7062348 |
Dynamic mask for producing uniform or graded-thickness thin films |
Jun. 13, 2006 |
| 7048837 |
End point detection for sputtering and resputtering |
May. 23, 2006 |
| 7041200 |
Reducing particle generation during sputter deposition |
May. 9, 2006 |
| 7041201 |
Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith |
May. 9, 2006 |
| 7033461 |
Thin film forming apparatus and method |
Apr. 25, 2006 |
| 7011733 |
Method and apparatus for depositing films |
Mar. 14, 2006 |
| 7008517 |
Shutter disk and blade for physical vapor deposition chamber |
Mar. 7, 2006 |
| 7008520 |
Sputtering device |
Mar. 7, 2006 |
| 7001491 |
Vacuum-processing chamber-shield and multi-chamber pumping method |
Feb. 21, 2006 |
| 6998033 |
Sputtering cathode adapter assembly and method |
Feb. 14, 2006 |
| 6955726 |
Mask and mask frame assembly for evaporation |
Oct. 18, 2005 |
| 6929725 |
Sputter ions source |
Aug. 16, 2005 |
| 6929724 |
Shutter |
Aug. 16, 2005 |
| 6929720 |
Sputtering source for ionized physical vapor deposition of metals |
Aug. 16, 2005 |
| 6911129 |
Combinatorial synthesis of material chips |
Jun. 28, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6902623 |
Reactor having a movable shutter |
Jun. 7, 2005 |
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