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Browse by Category: Main > Chemistry
Class Information
Number: 204/298.11
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Specified mask, shield or shutter
Description: Apparatus including significant specified means for masking, shielding or shuttering of electrodes or workpieces.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8702918 Apparatus for enabling concentricity of plasma dark space Apr. 22, 2014
8668815 Process kit for RF physical vapor deposition Mar. 11, 2014
8663437 Deposition apparatus and electronic device manufacturing method Mar. 4, 2014
8652309 Sputtering apparatus and electronic device manufacturing method Feb. 18, 2014
8648315 Accelerator having a multi-channel micro-collimator Feb. 11, 2014
8647485 Process kit shield for plasma enhanced processing chamber Feb. 11, 2014
8623184 Device for supporting a rotatable target and sputtering apparatus Jan. 7, 2014
8591709 Sputter deposition shield assembly to reduce cathode shorting Nov. 26, 2013
8580092 Adjustable process spacing, centering, and improved gas conductance Nov. 12, 2013
8545631 Mask device, method of fabricating the same, and method of fabricating organic light emitting display device using the same Oct. 1, 2013
8535494 Rotary magnet sputtering apparatus Sep. 17, 2013
8512530 Sputtering apparatus Aug. 20, 2013
8496792 Rotary magnet sputtering apparatus Jul. 30, 2013
8486242 Deposition apparatus and methods to reduce deposition asymmetry Jul. 16, 2013
8480865 Ring cathode for use in a magnetron sputtering device Jul. 9, 2013
8470142 Sputtering apparatus and driving method thereof Jun. 25, 2013
8435388 Reactive sputter deposition processes and equipment May. 7, 2013
8398832 Coils for generating a plasma and for sputtering Mar. 19, 2013
8388753 Coating apparatus Mar. 5, 2013
8375889 System and method for providing an improved shutter for use with a shadow tab mask Feb. 19, 2013
8377269 Sputtering apparatus Feb. 19, 2013
8356575 Ion source and plasma processing apparatus Jan. 22, 2013
8330128 Implant mask with moveable hinged mask segments Dec. 11, 2012
8308921 Mask for increased uniformity in ion beam deposition Nov. 13, 2012
8303785 Plasma processing apparatus and electronic device manufacturing method Nov. 6, 2012
8303786 Sputtering apparatus Nov. 6, 2012
8298379 Method and apparatus for extending chamber component life in a substrate processing system Oct. 30, 2012
8268142 RF sputtering arrangement Sep. 18, 2012
8221594 Magnetron sputtering apparatus and magnetron sputtering method Jul. 17, 2012
8221602 Non-contact process kit Jul. 17, 2012
8192546 Deposition apparatus Jun. 5, 2012
8192597 Coating apparatus Jun. 5, 2012
8168049 Sputtering apparatus and method of manufacturing solar battery and image display device by using the same May. 1, 2012
8147664 Sputtering apparatus Apr. 3, 2012
8101054 Magnetic particle trapper for a disk sputtering system Jan. 24, 2012
8066857 Shaped anode and anode-shield connection for vacuum physical vapor deposition Nov. 29, 2011
8062487 Wafer supporting device of a sputtering apparatus Nov. 22, 2011
8057649 Microwave rotatable sputtering deposition Nov. 15, 2011
8043483 Film forming method by sputtering and sputtering apparatus thereof Oct. 25, 2011
8043487 Chamber shield for vacuum physical vapor deposition Oct. 25, 2011
8038850 Sputter deposition method for forming integrated circuit Oct. 18, 2011
8034218 Low temperature growth of oriented carbon nanotubes Oct. 11, 2011
7981262 Process kit for substrate processing chamber Jul. 19, 2011
7967961 Film forming apparatus Jun. 28, 2011
7959775 Thermal stress-failure-resistant dielectric windows in vacuum processing systems Jun. 14, 2011
7955480 Sputtering apparatus and film deposition method Jun. 7, 2011
7927472 Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using t Apr. 19, 2011
7905991 Vacuum treatment system Mar. 15, 2011
7879201 Method and apparatus for surface processing of a substrate Feb. 1, 2011
7850827 Double-layer shutter control method of multi-sputtering system Dec. 14, 2010

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