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Browse by Category: Main > Chemistry
Class Information
Number: 204/298.07
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Specified gas feed or withdrawal
Description: Apparatus including significant specified means for feeding or withdrawing reactive or inert gases from the coating chamber.










Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8691063 Methods and apparatus for forming diamond-like coatings Apr. 8, 2014
8663432 Magnetron sputtering apparatus and magnetron sputtering method Mar. 4, 2014
8597473 Reactive physical vapor deposition with sequential reactive gas injection Dec. 3, 2013
8591709 Sputter deposition shield assembly to reduce cathode shorting Nov. 26, 2013
8574411 Reactive sputtering chamber with gas distribution tubes Nov. 5, 2013
8486241 Sputtering apparatus having gas supply system Jul. 16, 2013
8435388 Reactive sputter deposition processes and equipment May. 7, 2013
8398826 Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases Mar. 19, 2013
8388753 Coating apparatus Mar. 5, 2013
8372250 Gas-timing method for depositing oxynitride films by reactive R.F. magnetron sputtering Feb. 12, 2013
8357267 Film producing method using atmospheric pressure hydrogen plasma, and method and apparatus for producing refined film Jan. 22, 2013
8303786 Sputtering apparatus Nov. 6, 2012
8298386 Gas-inputting device for vacuum sputtering apparatus Oct. 30, 2012
8273136 Electrochemical element, and method and apparatus for manufacturing electrode thereof Sep. 25, 2012
8182660 Power supply apparatus and deposition method using the power supply apparatus May. 22, 2012
8168049 Sputtering apparatus and method of manufacturing solar battery and image display device by using the same May. 1, 2012
8163144 Magnetron sputtering device Apr. 24, 2012
8118981 Sputtering apparatus and method for controlling the same Feb. 21, 2012
8105466 Biased pulse DC reactive sputtering of oxide films Jan. 31, 2012
8097133 Evacuable magnetron chamber Jan. 17, 2012
8057600 Method and apparatus for an improved baffle plate in a plasma processing system Nov. 15, 2011
8029651 Method for forming magnetic layer, magnetic recording medium, and magnetic recording and reproducing apparatus Oct. 4, 2011
7959776 Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates Jun. 14, 2011
7913752 Cooling device for vacuum treatment device Mar. 29, 2011
7914603 Particle trap for a plasma source Mar. 29, 2011
7914654 Method and apparatus for depositing a magnetoresistive multilayer film Mar. 29, 2011
7887677 Silicon object forming method and apparatus Feb. 15, 2011
7850828 Enhanced virtual anode Dec. 14, 2010
7776192 Elongate vacuum system for coating one or both sides of a flat substrate Aug. 17, 2010
7708866 Sputtering apparatus May. 4, 2010
7670469 Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals Mar. 2, 2010
7651594 Barrier film and laminated material, container for wrapping and image display medium using the same, and manufacturing method for barrier film Jan. 26, 2010
7651552 Gas port assembly Jan. 26, 2010
7601246 Methods of sputtering a protective coating on a semiconductor substrate Oct. 13, 2009
7588668 Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers Sep. 15, 2009
7582194 Method and apparatus for forming fluoride thin film Sep. 1, 2009
7575661 Reactive sputtering method Aug. 18, 2009
7513981 Manufacturing apparatus of semiconductor device Apr. 7, 2009
7444955 Apparatus for directing plasma flow to coat internal passageways Nov. 4, 2008
7413639 Energy and media connection for a coating installation comprising several chambers Aug. 19, 2008
7407565 Method and apparatus for ionized plasma deposition Aug. 5, 2008
7338581 Sputtering apparatus Mar. 4, 2008
7314525 Plasma CVD apparatus Jan. 1, 2008
7306707 Adaptable processing element for a processing system and a method of making the same Dec. 11, 2007
7300558 Rapid cycle time gas burster Nov. 27, 2007
7285196 Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals Oct. 23, 2007
7282112 Method and apparatus for an improved baffle plate in a plasma processing system Oct. 16, 2007
7279201 Methods and apparatus for forming precursors Oct. 9, 2007
7235160 Hollow cathode sputtering apparatus and related method Jun. 26, 2007
7232506 System and method for feedforward control in thin film coating processes Jun. 19, 2007

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