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Class Information
Number: 204/298.02
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating
Description: Apparatus including means for the deposition of a coating material on a workpiece (i.e., substrate).










Sub-classes under this class:

Class Number Class Name Patents
204/298.04 Ion beam sputter deposition 182
204/298.05 Ion plating 154
204/298.16 Magnetically enhanced 384
204/298.03 Measuring, analyzing or testing 365
204/298.23 Moving workpiece or target 305
204/298.14 Specified anode particulars 166
204/298.09 Specified cooling or heating 388
204/298.07 Specified gas feed or withdrawal 379
204/298.11 Specified mask, shield or shutter 614
204/298.08 Specified power supply or matching network 405
204/298.12 Specified target particulars 660
204/298.15 Specified work holder 423
204/298.06 Triode, tetrode, auxiliary electrode or biased workpiece 427


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685213 Method and apparatus for plasma generation Apr. 1, 2014
8663437 Deposition apparatus and electronic device manufacturing method Mar. 4, 2014
8574411 Reactive sputtering chamber with gas distribution tubes Nov. 5, 2013
8500973 Anode for sputter coating Aug. 6, 2013
8449818 Molybdenum containing targets May. 28, 2013
8440301 Coating apparatus and method May. 14, 2013
8357272 Quantum dot manipulating method and quantum dot production/manipulation apparatus Jan. 22, 2013
8236152 Deposition system Aug. 7, 2012
8202407 Apparatus and method for manufacturing polycarbonate solar cells Jun. 19, 2012
8192596 Ultrahigh-purity copper and process for producing the same Jun. 5, 2012
8133361 Thin film coating system and method Mar. 13, 2012
8052898 Hydrogen gas detecting material and the coating method Nov. 8, 2011
8022011 Photocatalyst element, method and device for preparing the same Sep. 20, 2011
7959775 Thermal stress-failure-resistant dielectric windows in vacuum processing systems Jun. 14, 2011
7935187 Film forming apparatus May. 3, 2011
7927466 Pulsed magnetron sputtering deposition with preionization Apr. 19, 2011
7811429 Target support assembly Oct. 12, 2010
7731825 Manufacturing apparatus of magnetoresistance elements Jun. 8, 2010
7699965 Zinc oxide-based transparent conductor and sputtering target for forming the transparent conductor Apr. 20, 2010
7670469 Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals Mar. 2, 2010
7651552 Gas port assembly Jan. 26, 2010
7641773 Process for producing layers and layer systems, and coated substrate Jan. 5, 2010
7625450 Film forming apparatus Dec. 1, 2009
7513981 Manufacturing apparatus of semiconductor device Apr. 7, 2009
7497932 Electro-chemical deposition system Mar. 3, 2009
7498587 Bi-directional filtered arc plasma source Mar. 3, 2009
7404879 Ionized physical vapor deposition apparatus using helical self-resonant coil Jul. 29, 2008
7338581 Sputtering apparatus Mar. 4, 2008
7314525 Plasma CVD apparatus Jan. 1, 2008
7285196 Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals Oct. 23, 2007
7223448 Methods for providing uniformity in plasma-assisted material processes May. 29, 2007
7153399 Method and apparatus for producing uniform isotropic stresses in a sputtered film Dec. 26, 2006
6972071 High-speed symmetrical plasma treatment system Dec. 6, 2005
6955741 Semiconductor-processing reaction chamber Oct. 18, 2005
6899798 Reusable ceramic-comprising component which includes a scrificial surface layer May. 31, 2005
6855236 Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus Feb. 15, 2005
6736943 Apparatus and method for vacuum coating deposition May. 18, 2004
6726816 Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation Apr. 27, 2004
6596138 Sputtering apparatus Jul. 22, 2003
6585871 Method of film deposition on substrate surface and substrate produced by the method Jul. 1, 2003
6571729 Apparatus for depositing a thin film on a data recording disk Jun. 3, 2003
6569783 Graded composition diffusion barriers for chip wiring applications May. 27, 2003
6554969 Acoustically enhanced deposition processes, and systems for performing same Apr. 29, 2003
6500314 Plasma etch reactor and method Dec. 31, 2002
6454919 Physical vapor deposition apparatus with deposition and DC target power control Sep. 24, 2002
6436509 Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus Aug. 20, 2002
6372103 Ultrashort pulse laser deposition of thin films Apr. 16, 2002
6352620 Staged aluminum deposition process for filling vias Mar. 5, 2002
6344116 Monocrystalline three-dimensional integrated-circuit technology Feb. 5, 2002
6277253 External coating of tungsten or tantalum or other refractory metal on IMP coils Aug. 21, 2001

1 2 3










 
 
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