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Class Information
Number: 204/298.02
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating
Description: Apparatus including means for the deposition of a coating material on a workpiece (i.e., substrate).
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7513981 |
Manufacturing apparatus of semiconductor device |
Apr. 7, 2009 |
| 7498587 |
Bi-directional filtered arc plasma source |
Mar. 3, 2009 |
| 7497932 |
Electro-chemical deposition system |
Mar. 3, 2009 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7338581 |
Sputtering apparatus |
Mar. 4, 2008 |
| 7314525 |
Plasma CVD apparatus |
Jan. 1, 2008 |
| 7285196 |
Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals |
Oct. 23, 2007 |
| 7223448 |
Methods for providing uniformity in plasma-assisted material processes |
May. 29, 2007 |
| 7153399 |
Method and apparatus for producing uniform isotropic stresses in a sputtered film |
Dec. 26, 2006 |
| 6972071 |
High-speed symmetrical plasma treatment system |
Dec. 6, 2005 |
| 6955741 |
Semiconductor-processing reaction chamber |
Oct. 18, 2005 |
| 6899798 |
Reusable ceramic-comprising component which includes a scrificial surface layer |
May. 31, 2005 |
| 6855236 |
Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus |
Feb. 15, 2005 |
| 6736943 |
Apparatus and method for vacuum coating deposition |
May. 18, 2004 |
| 6726816 |
Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation |
Apr. 27, 2004 |
| 6596138 |
Sputtering apparatus |
Jul. 22, 2003 |
| 6585871 |
Method of film deposition on substrate surface and substrate produced by the method |
Jul. 1, 2003 |
| 6571729 |
Apparatus for depositing a thin film on a data recording disk |
Jun. 3, 2003 |
| 6569783 |
Graded composition diffusion barriers for chip wiring applications |
May. 27, 2003 |
| 6554969 |
Acoustically enhanced deposition processes, and systems for performing same |
Apr. 29, 2003 |
| 6500314 |
Plasma etch reactor and method |
Dec. 31, 2002 |
| 6454919 |
Physical vapor deposition apparatus with deposition and DC target power control |
Sep. 24, 2002 |
| 6436509 |
Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus |
Aug. 20, 2002 |
| 6372103 |
Ultrashort pulse laser deposition of thin films |
Apr. 16, 2002 |
| 6352620 |
Staged aluminum deposition process for filling vias |
Mar. 5, 2002 |
| 6344116 |
Monocrystalline three-dimensional integrated-circuit technology |
Feb. 5, 2002 |
| 6277253 |
External coating of tungsten or tantalum or other refractory metal on IMP coils |
Aug. 21, 2001 |
| 6268045 |
Hard material coating of a cemented carbide or carbide containing cermet substrate |
Jul. 31, 2001 |
| 6228186 |
Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies |
May. 8, 2001 |
| 6221221 |
Apparatus for providing RF return current path control in a semiconductor wafer processing system |
Apr. 24, 2001 |
| 6215087 |
Plasma film forming method and plasma film forming apparatus |
Apr. 10, 2001 |
| 6190517 |
Magnet array |
Feb. 20, 2001 |
| 6187159 |
Mechanism for setting optical lens base material on holder |
Feb. 13, 2001 |
| 6182604 |
Hollow cathode for plasma doping system |
Feb. 6, 2001 |
| 6177129 |
Process for handling workpieces and apparatus therefor |
Jan. 23, 2001 |
| 6171458 |
Method for manufacturing an absorbent layer for solar collectors, a device for performing the method and an absorbent layer for solar collectors |
Jan. 9, 2001 |
| 6171454 |
Method for coating surfaces using a facility having sputter electrodes |
Jan. 9, 2001 |
| 6168696 |
Non-knurled induction coil for ionized metal deposition, sputtering apparatus including same, and method of constructing the apparatus |
Jan. 2, 2001 |
| 6165567 |
Process of forming a semiconductor device |
Dec. 26, 2000 |
| 6162336 |
Clamping ring design to reduce wafer sticking problem in metal deposition |
Dec. 19, 2000 |
| 6156164 |
Virtual shutter method and apparatus for preventing damage to gallium arsenide substrates during processing |
Dec. 5, 2000 |
| 6153060 |
Sputtering process |
Nov. 28, 2000 |
| 6143148 |
Device for feeding substrates to vacuum systems for deposit of surface coating on the substrates |
Nov. 7, 2000 |
| 6132562 |
Method and device for transporting cylindrical substrates to be coated |
Oct. 17, 2000 |
| 6126790 |
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet |
Oct. 3, 2000 |
| 6126792 |
Method for the application of a scratch protection layer and an antireflection coating system and apparatus for its execution |
Oct. 3, 2000 |
| 6120661 |
Apparatus for processing glass substrate |
Sep. 19, 2000 |
| 6120660 |
Removable liner design for plasma immersion ion implantation |
Sep. 19, 2000 |
| 6113760 |
Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus |
Sep. 5, 2000 |
| 6110330 |
Process for bonding lubricant to magnetic disk |
Aug. 29, 2000 |
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