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Class Information
Number: 204/192.36
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Etching specified material > Organic
Description: Processes wherein the material being etched is organic material.

Patents under this class:
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Patent Number Title Of Patent Date Issued
7875199 Radical generating method, etching method and apparatus for use in these methods Jan. 25, 2011
7005239 Method of forming metal line Feb. 28, 2006
6868856 Enhanced remote plasma cleaning Mar. 22, 2005
6746960 Electronic techniques for analyte detection Jun. 8, 2004
6451373 Method of forming a therapeutic coating onto a surface of an implantable prosthesis Sep. 17, 2002
6409891 Low energy plasma cleaning method for cryofilms Jun. 25, 2002
6338776 Dielectric processing with included stabilization periods Jan. 15, 2002
6137660 Method for reducing ESD and imaging damage during focused ion beam definition of magnetoresistive head write track width Oct. 24, 2000
6030901 Photoresist stripping without degrading low dielectric constant materials Feb. 29, 2000
5998104 Method of stripping a resist mask Dec. 7, 1999
5965629 Process for modifying surfaces of materials, and materials having surfaces modified thereby Oct. 12, 1999
5895271 Metal film forming method Apr. 20, 1999
5811358 Low temperature dry process for stripping photoresist after high dose ion implantation Sep. 22, 1998
5773201 Method of stripping a resist mask Jun. 30, 1998
5688383 Method for improving the performance of high temperature superconducting thin film wafers Nov. 18, 1997
5658440 Surface image transfer etching Aug. 19, 1997
5652040 Magnetic recording medium Jul. 29, 1997
5643423 Method for producing an abrasion resistant coated substrate product Jul. 1, 1997
5487810 Process for pretreating surfaces of plastic items Jan. 30, 1996
5462781 Surface modified porous expanded polytetrafluoroethylene and process for making Oct. 31, 1995
5437900 Surface modified porous expanded polytetrafluoroethylene and process for making Aug. 1, 1995
5368710 Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window Nov. 29, 1994
5357005 Reactive surface functionalization Oct. 18, 1994
5328557 Plasma treatment of O-rings Jul. 12, 1994
5300189 Plasma surface treatment method and apparatus Apr. 5, 1994
5296091 Method of etching substrates having a low thermal conductivity Mar. 22, 1994
5258264 Process of forming a dual overhang collimated lift-off stencil with subsequent metal deposition Nov. 2, 1993
5196103 Method of making an electrical interconnection device Mar. 23, 1993
5153303 Polyimides prepared from disubstituted aromatic tetracarboxylic acid dianhydrides Oct. 6, 1992
5114529 Plasma processing method and apparatus May. 19, 1992
5057187 Ashing method for removing an organic film on a substance of a semiconductor device under fabrication Oct. 15, 1991
5030322 Method of forming orientation film of liquid-crystal display device Jul. 9, 1991
5019210 Method for enhancing the adhesion of polymer surfaces by water vapor plasma treatment May. 28, 1991
4983254 Processing for stripping organic material Jan. 8, 1991
4980022 Method of removing a layer of organic matter Dec. 25, 1990
4968552 Versatile reactive ion etch barriers from polyamic acid salts Nov. 6, 1990
4966648 Process for producing thin film magnetic head Oct. 30, 1990
4957588 Method for high temperature reaction process Sep. 18, 1990
4946549 Method for fabricating or modifying an article comprising the removal of a polymer coating Aug. 7, 1990
4944831 Process for obtaining a pattern, in ferromagnetic material having differently sloping sides Jul. 31, 1990
4933060 Surface modification of fluoropolymers by reactive gas plasmas Jun. 12, 1990
4902377 Sloped contact etch process Feb. 20, 1990
4897153 Method of processing siloxane-polyimides for electronic packaging applications Jan. 30, 1990
4894115 Laser beam scanning method for forming via holes in polymer materials Jan. 16, 1990
4869777 Method for selectively etching the materials of a composite of two materials Sep. 26, 1989
4869714 Luminal surface fabrication for cardiovascular prostheses Sep. 26, 1989
4859303 Method and apparatus for removing coating from substrate Aug. 22, 1989
4838991 Process for defining organic sidewall structures Jun. 13, 1989
4836902 Method and apparatus for removing coating from substrate Jun. 6, 1989
4834835 Producing viaholes in plastic sheets and application of the method May. 30, 1989

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