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Class Information
Number: 204/192.35
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Etching specified material
Description: Processes wherein the material being etched comprises a designated chemical composition (DCC).

Sub-classes under this class:

Class Number Class Name Patents
204/192.36 Organic 80
204/192.37 Silicon containing 226

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8540852 Method and apparatus for manufacturing magnetoresistive devices Sep. 24, 2013
8449818 Molybdenum containing targets May. 28, 2013
8361284 Reducing the height of a defect associated with an air bearing surface Jan. 29, 2013
8287744 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal Oct. 16, 2012
8273257 Nanotube processing employing solid-condensed-gas-layers Sep. 25, 2012
8266785 Method for manufacturing a magnetoresistive sensor having a novel junction structure for improved track width definition and pinned layer stability Sep. 18, 2012
8257560 Patterned media and method of manufacturing the same, and magnetic recording apparatus Sep. 4, 2012
8221595 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers Jul. 17, 2012
8043484 Methods and apparatus for resputtering process that improves barrier coverage Oct. 25, 2011
8039400 Reducing contamination of semiconductor substrates during BEOL processing by performing a deposition/etch cycle during barrier deposition Oct. 18, 2011
7993538 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers Aug. 9, 2011
7989093 Method of making a coated cutting tool and the resulting tool Aug. 2, 2011
7927467 Method of manufacturing discrete track recording medium and discrete track recording medium Apr. 19, 2011
7883607 Methods of ion milling for magnetic heads and systems formed thereby Feb. 8, 2011
7875199 Radical generating method, etching method and apparatus for use in these methods Jan. 25, 2011
7788798 Method for manufacturing a perpendicular magnetic write head with wrap around magnetic trailing and side shields Sep. 7, 2010
7641998 Conductive mono atomic layer coatings for fuel cell bipolar plates Jan. 5, 2010
7611610 Method and apparatus for controlling topographical variation on a milled cross-section of a structure Nov. 3, 2009
7550174 Low contact resistance bonding method for bipolar plates in a PEM fuel cell Jun. 23, 2009
7524431 Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers Apr. 28, 2009
7509729 Method for making a perpendicular magnetic recording write head Mar. 31, 2009
7435353 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers Oct. 14, 2008
7351986 Method and apparatus for reducing cross contamination of species during ion implantation Apr. 1, 2008
7313854 Method of manufacturing a tactile sensor Jan. 1, 2008
7270729 System for, and method of, etching a surface on a wafer Sep. 18, 2007
7251878 Method and apparatus for defining leading edge taper of a write pole tip Aug. 7, 2007
7213322 Method for manufacturing surface acoustic wave device May. 8, 2007
7152305 Method for fabricating a magnetoresistive (MR) read head Dec. 26, 2006
7150811 Ion beam for target recovery Dec. 19, 2006
RE39143 Method for making a wafer-pair having sealed chambers Jun. 27, 2006
7007374 Method of making a magnetic head Mar. 7, 2006
6908562 Method of forming electrode for saw device Jun. 21, 2005
6868856 Enhanced remote plasma cleaning Mar. 22, 2005
6863787 Dummy copper deprocessing Mar. 8, 2005
6854175 Method of manufacturing a thin film magnetic head Feb. 15, 2005
6846391 Process for depositing F-doped silica glass in high aspect ratio structures Jan. 25, 2005
6824655 Process for charged particle beam micro-machining of copper Nov. 30, 2004
6810566 Method of manufacturing a surface acoustic wave element Nov. 2, 2004
6809066 Ion texturing methods and articles Oct. 26, 2004
6800180 Resputtering to achieve better step coverage Oct. 5, 2004
6789297 Method of manufacturing a surface acoustic wave element Sep. 14, 2004
6773558 Fluorine generator Aug. 10, 2004
6746960 Electronic techniques for analyte detection Jun. 8, 2004
6743729 Etching method and etching apparatus of carbon thin film Jun. 1, 2004
6730605 Redistribution of copper deposited films May. 4, 2004
6709553 Multiple-step sputter deposition Mar. 23, 2004
6709554 Method and apparatus for repairing lithography masks using a charged particle beam system Mar. 23, 2004
6695954 Plasma vapor deposition with coil sputtering Feb. 24, 2004
6668443 Process for manufacturing a spin valve recording head Dec. 30, 2003
6607613 Solder ball with chemically and mechanically enhanced surface properties Aug. 19, 2003

1 2 3 4 5 6

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