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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
4361472 Sputtering method and apparatus utilizing improved ion source Nov. 30, 1982
4359373 Method of formation of a blazed grating Nov. 16, 1982
4358339 Method of fabrication of bubble domain device structures Nov. 9, 1982
4356056 Process for insulating the interconnections of integrated circuits Oct. 26, 1982
4355382 Apparatus for sharpening a cutting stylus Oct. 19, 1982
4351712 Low energy ion beam oxidation process Sep. 28, 1982
4350729 Patterned layer article and manufacturing method therefor Sep. 21, 1982
4349424 Ion sputter textured graphite Sep. 14, 1982
4344996 Surface texturing of fluoropolymers Aug. 17, 1982
4337132 Ion etching process with minimized redeposition Jun. 29, 1982
4334951 Fabrication technique for the production of devices which depend on magnetic bubbles Jun. 15, 1982
4331758 Process for the preparation of large area TFT arrays May. 25, 1982
4326936 Repeatable method for sloping walls of thin film material Apr. 27, 1982
4321282 Surface gratings and a method of increasing their spatial frequency Mar. 23, 1982
4316791 Device for chemical dry etching of integrated circuits Feb. 23, 1982
4312732 Method for the optical monitoring of plasma discharge processing operations Jan. 26, 1982
4310583 Manufacture of a group of infra-red detector elements, and a group so manufactured Jan. 12, 1982
4299680 Method of fabricating magnetic bubble memory device having planar overlay pattern of magnetically soft material Nov. 10, 1981
4297190 Method for removing heat from a workpiece during processing in a vacuum chamber Oct. 27, 1981
4292156 Method of manufacturing semiconductor devices Sep. 29, 1981
4290844 Focal plane photo-detector mosaic array fabrication Sep. 22, 1981
4288283 Method of forming a microscopic pattern Sep. 8, 1981
4278493 Method for cleaning surfaces by ion milling Jul. 14, 1981
4277321 Treating multilayer printed wiring boards Jul. 7, 1981
4277304 Ion source and ion etching process Jul. 7, 1981
4275286 Process and mask for ion beam etching of fine patterns Jun. 23, 1981
4272348 Bubble device fabrication Jun. 9, 1981
4269137 Pretreatment of substrates prior to thin film deposition May. 26, 1981
4264813 High intensity ion source using ionic conductors Apr. 28, 1981
4248688 Ion milling of thin metal films Feb. 3, 1981
4245768 Method of cold welding using ion beam technology Jan. 20, 1981
4244799 Fabrication of integrated circuits utilizing thick high-resolution patterns Jan. 13, 1981
4243476 Modification of etch rates by solid masking materials Jan. 6, 1981
4233109 Dry etching method Nov. 11, 1980
4226666 Etching method employing radiation and noble gas halide Oct. 7, 1980
4226018 Method for manufacturing a floating type thin film magnetic head Oct. 7, 1980
4226691 Bubble memory process using an aluminum plus water chemical reaction Oct. 7, 1980
4214966 Process useful in the fabrication of articles with metallized surfaces Jul. 29, 1980
4211601 Device fabrication by plasma etching Jul. 8, 1980
4202914 Method of depositing thin films of small dimensions utilizing silicon nitride lift-off mask May. 13, 1980
4199650 Modification of the electrical and optical properties of polymers Apr. 22, 1980
4172758 Magnetic bubble domain device fabrication technique Oct. 30, 1979
4170512 Method of manufacture of a soft-X-ray mask Oct. 9, 1979
4169009 Large area microstructure processing Sep. 25, 1979
4153741 Method for forming a surface relief pattern in a poly(olefin sulfone) layer May. 8, 1979
4153529 Means and method for inducing uniform parallel alignment of liquid crystal material in a liquid crystal cell May. 8, 1979
4147573 Method of depositing III-V compounds on group IV element wafers by the cluster ion technique Apr. 3, 1979
4131506 Method of producing echelette gratings Dec. 26, 1978
4128765 Ion beam machining techniques and apparatus Dec. 5, 1978
4128467 Method of ion etching Cd-Hg-Te semiconductors Dec. 5, 1978

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