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Browse by Category: Main > Chemistry
Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
4499119 Method of manufacturing super-conductive tunnel junction devices with precise junction area control Feb. 12, 1985
4478678 Method of reactive ion etching molybdenum and molybdenum silicide Oct. 23, 1984
4464459 Method of forming a pattern of metal elements Aug. 7, 1984
4464223 Plasma reactor apparatus and method Aug. 7, 1984
4462882 Selective etching of aluminum Jul. 31, 1984
4460434 Method for planarizing patterned surfaces Jul. 17, 1984
4458346 Pickup stylus Jul. 3, 1984
4457803 Processing method using a focused ion beam Jul. 3, 1984
4456515 Method for making polarizers comprising a multiplicity of parallel electrically conductive strips on a glass carrier Jun. 26, 1984
4455207 Method for metallizing carbon fiber reinforced plastic members Jun. 19, 1984
4454001 Interferometric method and apparatus for measuring etch rate and fabricating devices Jun. 12, 1984
4442354 Sputter initiated resonance ionization spectrometry Apr. 10, 1984
4439912 Infrared detector and method of making same Apr. 3, 1984
4436593 Self-aligned pole tips Mar. 13, 1984
4434038 Sputtering method and apparatus utilizing improved ion source Feb. 28, 1984
4432853 Method of making an ion beam sputter-etched ventricular catheter for hydrocephalus shunt Feb. 21, 1984
4431499 Method of sputter etching a surface Feb. 14, 1984
4430152 Process for fabricating a semiconductor device Feb. 7, 1984
4427516 Apparatus and method for plasma-assisted etching of wafers Jan. 24, 1984
4426247 Method for forming micropattern Jan. 17, 1984
4425210 Plasma desmearing apparatus and method Jan. 10, 1984
4419202 Metal coatings Dec. 6, 1983
4419203 Apparatus and method for neutralizing ion beams Dec. 6, 1983
4419201 Apparatus and method for plasma-assisted etching of wafers Dec. 6, 1983
4417946 Method of making mask for structuring surface areas Nov. 29, 1983
4417947 Edge profile control during patterning of silicon by dry etching with CCl.sub.4 -O.sub.2 mixtures Nov. 29, 1983
4414069 Negative ion beam selective etching process Nov. 8, 1983
4411733 SPER Device for material working Oct. 25, 1983
4411929 Method for manufacturing semiconductor device Oct. 25, 1983
4411757 Formation of electrodes for magnetoresistive sensor Oct. 25, 1983
4411732 Method of manufacturing a detector device Oct. 25, 1983
4410622 Forming interconnections for multilevel interconnection metallurgy systems Oct. 18, 1983
4407695 Natural lithographic fabrication of microstructures over large areas Oct. 4, 1983
4407712 Hollow cathode discharge source of metal vapor Oct. 4, 1983
4407933 Alignment marks for electron beam lithography Oct. 4, 1983
4406733 Dry etching method Sep. 27, 1983
4402993 Process for coating optical fibers Sep. 6, 1983
4400257 Method of forming metal lines Aug. 23, 1983
4400235 Etching apparatus and method Aug. 23, 1983
4397079 Process for improving the yield of integrated devices including Schottky barrier diodes Aug. 9, 1983
4396479 Ion etching process with minimized redeposition Aug. 2, 1983
4393092 Method for controlling the conductivity of polyimide films and improved devices utilizing the method Jul. 12, 1983
4392932 Method for obtaining uniform etch by modulating bias on extension member around radio frequency etch table Jul. 12, 1983
4392938 Radio frequency etch table with biased extension member Jul. 12, 1983
4390394 Method of structuring with metal oxide masks by reactive ion-beam etching Jun. 28, 1983
4390404 Process for manufacture of thin-film magnetic bubble domain detection device Jun. 28, 1983
4389275 Quartz resonator angle correction Jun. 21, 1983
4377437 Device lithography by selective ion implantation Mar. 22, 1983
4377169 Ion beam sputter-etched ventricular catheter for hydrocephalus shunt Mar. 22, 1983
4364793 Method of etching silicon and polysilicon substrates Dec. 21, 1982

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