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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.










Patents under this class:
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Patent Number Title Of Patent Date Issued
4877479 Method and apparatus for ion deposition and etching Oct. 31, 1989
4874493 Method of deposition of metal into cavities on a substrate Oct. 17, 1989
4874460 Method and apparatus for modifying patterned film Oct. 17, 1989
4869780 Ion milling method Sep. 26, 1989
4869714 Luminal surface fabrication for cardiovascular prostheses Sep. 26, 1989
4865684 Process for producing a semiconductor laser mirror by ionic machining Sep. 12, 1989
4857137 Process for surface treatment Aug. 15, 1989
4851097 Apparatus for repairing a pattern film Jul. 25, 1989
4851257 Process for the fabrication of a vertical contact Jul. 25, 1989
4844767 Method of and apparatus for etching Jul. 4, 1989
4838994 Method for structuring a copper and/or permalloy layer by means of dry etching Jun. 13, 1989
4835088 Method and apparatus for generating high-resolution images May. 30, 1989
4814244 Method of forming resist pattern on substrate Mar. 21, 1989
4804816 Method of making a thin-film magnetic head having a multi-layered coil structure Feb. 14, 1989
4780239 Ion exchange resin for immobilizing radioactive waste Oct. 25, 1988
4766084 Process for the production of an electric contact on a HgCdTe substrate with a P conductivity and application to the production of an N/P diode Aug. 23, 1988
4761199 Shutter device for ion beam etching apparatus and such etching apparatus using same Aug. 2, 1988
4758304 Method and apparatus for ion etching and deposition Jul. 19, 1988
4750979 Process for etching lithium niobate based devices without damaging optical waveguides Jun. 14, 1988
4747922 Confined ion beam sputtering device and method May. 31, 1988
4716491 High frequency plasma generation apparatus Dec. 29, 1987
4708904 Semiconductor device and a method of manufacturing the same Nov. 24, 1987
4705595 Method for microwave plasma processing Nov. 10, 1987
4701995 Method of making a nonplanar buried-heterostructure distributed-feedback laser Oct. 27, 1987
4698129 Focused ion beam micromachining of optical surfaces in materials Oct. 6, 1987
4686761 Method of fabrication of low crosstalk photodiode array Aug. 18, 1987
4685999 Apparatus for plasma assisted etching Aug. 11, 1987
4684436 Method of simultaneously etching personality and select Aug. 4, 1987
4680084 Interferometric methods and apparatus for device fabrication Jul. 14, 1987
4677036 Method of production of thin film magnetic head and magnetic head Jun. 30, 1987
4671849 Method for control of etch profile Jun. 9, 1987
4664769 Photoelectric enhanced plasma glow discharge system and method including radiation means May. 12, 1987
4647339 Production of semiconductor devices Mar. 3, 1987
4639301 Focused ion beam processing Jan. 27, 1987
4620898 Ion beam sputter etching Nov. 4, 1986
4609809 Method and apparatus for correcting delicate wiring of IC device Sep. 2, 1986
4604176 Method of improving magnetoresistive effect in thin magnetic film Aug. 5, 1986
4592801 Method of patterning thin film Jun. 3, 1986
4574179 Ion beam machining device Mar. 4, 1986
4559695 Method of manufacturing an infrared radiation imaging device Dec. 24, 1985
4559096 Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith Dec. 17, 1985
4541168 Method for making metal contact studs between first level metal and regions of a semiconductor device compatible with polyimide-filled deep trench isolation schemes Sep. 17, 1985
4541890 Hall ion generator for working surfaces with a low energy high intensity ion beam Sep. 17, 1985
4529475 Dry etching apparatus and method using reactive gases Jul. 16, 1985
4528211 Silicon nitride formation and use in self-aligned semiconductor device manufacturing method Jul. 9, 1985
4523971 Programmable ion beam patterning system Jun. 18, 1985
4517066 Ion beam deposition or etching re rubber-metal adhesion May. 14, 1985
4512848 Procedure for fabrication of microstructures over large areas using physical replication Apr. 23, 1985
4502931 Process for the production of ion exchange membranes with coating for electrolysis Mar. 5, 1985
4502916 Process for forming fine patterns Mar. 5, 1985

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