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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
5482602 Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces Jan. 9, 1996
5472566 Specimen holder and apparatus for two-sided ion milling system Dec. 5, 1995
5462635 Surface processing method and an apparatus for carrying out the same Oct. 31, 1995
5447614 Method of processing a sample using a charged beam and reactive gases and system employing the same Sep. 5, 1995
5438747 Method of making a thin film merged MR head with aligned pole tips Aug. 8, 1995
5440123 Method for preparation of transmission electron microscope sample material utilizing sheet mesh Aug. 8, 1995
5429730 Method of repairing defect of structure Jul. 4, 1995
5414504 Interference removal May. 9, 1995
5382342 Fabrication process for a gradient index x-ray lens Jan. 17, 1995
5376225 Method of forming fine structure on compound semiconductor with inclined ion beam etching Dec. 27, 1994
5370779 ECR plasma process Dec. 6, 1994
5350499 Method of producing microscopic structure Sep. 27, 1994
5316640 Fabricating method of micro lens May. 31, 1994
5273634 Method and apparatus for hot-dipping steel strip Dec. 28, 1993
5272116 Method for pattern defect correction of a photomask Dec. 21, 1993
5266529 Focused ion beam for thin film resistor trim on aluminum nitride substrates Nov. 30, 1993
5246741 Method for surface modification and apparatus therefor Sep. 21, 1993
5238913 Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials Aug. 24, 1993
5223109 Ion beam processing method and apparatus Jun. 29, 1993
5219834 Process for producing a superconducting transistor Jun. 15, 1993
5208644 Interference removal May. 4, 1993
5202149 Method for making a magnetic recording medium Apr. 13, 1993
5200056 Method for aligning pole tips in a thin film head Apr. 6, 1993
5196103 Method of making an electrical interconnection device Mar. 23, 1993
5188705 Method of semiconductor device manufacture Feb. 23, 1993
5149974 Gas delivery for ion beam deposition and etching Sep. 22, 1992
5145554 Method of anisotropic dry etching of thin film semiconductors Sep. 8, 1992
5141623 Method for aligning pole tips in a thin film head Aug. 25, 1992
5116461 Method for fabricating an angled diffraction grating May. 26, 1992
5104684 Ion beam induced deposition of metals Apr. 14, 1992
5091048 Ion milling to obtain planarization Feb. 25, 1992
5086015 Method of etching a semiconductor device by an ion beam Feb. 4, 1992
5054421 Substrate cleaning device Oct. 8, 1991
5035770 Methods of making surface relief gratings Jul. 30, 1991
5032243 Method and apparatus for forming or modifying cutting edges Jul. 16, 1991
5009743 Chemically-assisted ion beam milling system for the preparation of transmission electron microscope specimens Apr. 23, 1991
4999318 Method for forming metal layer interconnects using stepped via walls Mar. 12, 1991
4994140 Method capable of forming a fine pattern without crystal defects Feb. 19, 1991
4986876 Method of smoothing patterned transparent electrode stripes in thin film electroluminescent display panel manufacture Jan. 22, 1991
4983540 Method of manufacturing devices having superlattice structures Jan. 8, 1991
4976843 Particle beam shielding Dec. 11, 1990
4941915 Thin film forming apparatus and ion source utilizing plasma sputtering Jul. 17, 1990
4938992 Methods for thermal transfer with a semiconductor Jul. 3, 1990
4936968 Ion-beam machining method and apparatus Jun. 26, 1990
4931307 Method of correcting defect of patterned article Jun. 5, 1990
4919780 Method of making self-aligned apertures Apr. 24, 1990
4916015 Heat dissipation means for X-ray generating tubes Apr. 10, 1990
4906594 Surface smoothing method and method of forming SOI substrate using the surface smoothing method Mar. 6, 1990
4902647 Surface modification using low energy ground state ion beams Feb. 20, 1990
4886681 Metal-polymer adhesion by low energy bombardment Dec. 12, 1989

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