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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
6093445 Microscopic element manufacturing method and equipment for carrying out the same Jul. 25, 2000
6051115 Adhesive strength increasing method for metal thin film Apr. 18, 2000
6051299 Magnetic recording medium, magnetic recording/reproducing apparatus and method for manufacturing metallic mold for molding disc Apr. 18, 2000
6045667 Process and system for the treatment of substrates using ions from a low-voltage arc discharge Apr. 4, 2000
6030514 Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor Feb. 29, 2000
6024845 Method for manufacturing a thin film recording head Feb. 15, 2000
6024884 Method for creating microstructures Feb. 15, 2000
6013191 Method of polishing CVD diamond films by oxygen plasma Jan. 11, 2000
6010753 Thin film magnetic head with special shaped pole and manufacture method thereof Jan. 4, 2000
6004437 Thin-film magnetic recording head manufacturing method Dec. 21, 1999
5990478 Method for preparing thin specimens consisting of domains of different materials Nov. 23, 1999
5976328 Pattern forming method using charged particle beam process and charged particle beam processing system Nov. 2, 1999
5972420 Magnetoresistive sensor manufacturing method Oct. 26, 1999
5965629 Process for modifying surfaces of materials, and materials having surfaces modified thereby Oct. 12, 1999
5961794 Method of manufacturing semiconductor devices Oct. 5, 1999
5958542 Thin film magnetic disc and method of manufacturing the disc Sep. 28, 1999
5956565 Analysis apparatus and analysis methods for semiconductor devices Sep. 21, 1999
5948217 Method and apparatus for endpointing while milling an integrated circuit Sep. 7, 1999
5935644 Method of making thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle Aug. 10, 1999
5922179 Apparatus for etching and coating sample specimens for microscopic analysis Jul. 13, 1999
5897969 Method of fabricating a magnetoresistive thin-film magnetic head Apr. 27, 1999
5882823 Fib repair method Mar. 16, 1999
5873985 Process of making squid device having tilt-boundary junction Feb. 23, 1999
5855966 Method for precision polishing non-planar, aspherical surfaces Jan. 5, 1999
5851367 Differential copper deposition on integrated circuit surfaces and method for same Dec. 22, 1998
5852345 Ion source generator auxiliary device for phosphorus and arsenic beams Dec. 22, 1998
5849638 Deep trench with enhanced sidewall surface area Dec. 15, 1998
5830527 Flat panel display anode structure and method of making Nov. 3, 1998
5804085 Process for producing a pole-trimmed writer in a magnetoresistive read/write head and a data transducer made thereby Sep. 8, 1998
5744400 Apparatus and method for dry milling of non-planar features on a semiconductor surface Apr. 28, 1998
5744012 Method for fabricating semiconductor device Apr. 28, 1998
5721008 Method for controlling sensor-to-sensor alignment and material properties in a dual magnetoresistive sensor Feb. 24, 1998
5711860 Method and apparatus for producing a substrate with low secondary electron emissions Jan. 27, 1998
5688383 Method for improving the performance of high temperature superconducting thin film wafers Nov. 18, 1997
5683595 Fine pattern forming method and fine pattern device Nov. 4, 1997
5679234 Process of forming miniature pattern well controlled in thickness on semiconductor wafer through selective electroplating Oct. 21, 1997
5662782 Method and apparatus for adjusting a resonance frequency of piezoelectric elements Sep. 2, 1997
5652040 Magnetic recording medium Jul. 29, 1997
5639509 Process for forming a flux enhanced magnetic data transducer Jun. 17, 1997
5635037 Method of texture by in-situ masking and etching for thin film magnetic recording medium Jun. 3, 1997
5628659 Method of making a field emission electron source with random micro-tip structures May. 13, 1997
5593562 Method for improving flat panel display anode plate phosphor efficiency Jan. 14, 1997
5589042 System and method for fabrication of precision optical ramp filters Dec. 31, 1996
5580615 Method of forming a conductive film on an insulating region of a substrate Dec. 3, 1996
5578342 Alignment of magnetic poles of thin film transducer Nov. 26, 1996
5529671 Apparatus and method for ion beam polishing and for in-situ ellipsometric deposition of ion beam films Jun. 25, 1996
5521030 Process for making holographic embossing tools May. 28, 1996
5518595 Focused ion beam etching apparatus May. 21, 1996
5500296 Magnetic recording medium, process for producing magnetic recording medium, apparatus for producing magnetic recording medium, and magnetic recording apparatus Mar. 19, 1996
5492607 Method of fabricating a surface emitting laser with large area deflecting mirror Feb. 20, 1996

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