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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
6613240 Method and apparatus for smoothing thin conductive films by gas cluster ion beam Sep. 2, 2003
6569295 Method for grading surface topography for improved step coverage and planarization May. 27, 2003
6565720 Substrate removal as a function of sputtered ions May. 20, 2003
6554974 Method of manufacturing information recording medium Apr. 29, 2003
6537606 System and method for improving thin films by gas cluster ion beam processing Mar. 25, 2003
6521897 Ion beam collimating grid to reduce added defects Feb. 18, 2003
6517734 Grating fabrication process using combined crystalline-dependent and crystalline-independent etching Feb. 11, 2003
6491800 Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technology Dec. 10, 2002
6488861 Coupling system to a microsphere cavity Dec. 3, 2002
6485565 Process and apparatus for making oriented crystal layers Nov. 26, 2002
6464891 Method for repetitive ion beam processing with a carbon containing ion beam Oct. 15, 2002
6464842 Control of solid state dimensional features Oct. 15, 2002
6458285 Method and apparatus for frequency control of piezoelectric components Oct. 1, 2002
6456173 Method and system for wafer-level tuning of bulk acoustic wave resonators and filters Sep. 24, 2002
6440277 Techniques of printing micro-structure patterns such as holograms directly onto final documents or other substrates in discrete areas thereof Aug. 27, 2002
6423240 Process to tune the slider trailing edge profile Jul. 23, 2002
6417939 Polarizing filter and its manufacturing method Jul. 9, 2002
6409891 Low energy plasma cleaning method for cryofilms Jun. 25, 2002
6402971 Ink jet recording head and manufacturing method therefor Jun. 11, 2002
6402882 Device and method for ion beam etching using space-time detection Jun. 11, 2002
6379510 Method of making a low voltage micro-mirror array light beam switch Apr. 30, 2002
6358857 Methods of etching insulative materials, of forming electrical devices, and of forming capacitors Mar. 19, 2002
6344115 Pattern forming method using charged particle beam process and charged particle beam processing system Feb. 5, 2002
6332962 Thin-film magnetic recording head manufacture using selective imaging Dec. 25, 2001
6329106 Repair method for phase shift mask in semiconductor device Dec. 11, 2001
6328859 Method of making second pole tip of a write head with a narrow track width Dec. 11, 2001
6322672 Method and apparatus for milling copper interconnects in a charged particle beam system Nov. 27, 2001
6319367 Plasma treatment for producing electron emitters Nov. 20, 2001
6315875 Method of manufacturing thin-film magnetic head and method of manufacturing magnetoresistive device Nov. 13, 2001
6288357 Ion milling planarization of semiconductor workpieces Sep. 11, 2001
6267903 Prevention of damage due to static electricity during manufacturing of magnetic head Jul. 31, 2001
6261468 Combination read/write thin film magnetic head and its manufacturing method Jul. 17, 2001
6245249 Micro-structure and manufacturing method and apparatus Jun. 12, 2001
6228276 Method of manufacturing magnetoresistive (MR) sensor element with sunken lead structure May. 8, 2001
6221219 Magneto-optical medium and process for production thereof Apr. 24, 2001
6214178 Focused ion beam formation of angled optoelectronic devices Apr. 10, 2001
6210547 Enhanced solder surface and process for chemically and mechanically enhancing solder surface properties Apr. 3, 2001
6210546 Fixture with at least one trough and method of using the fixture in a plasma or ion beam Apr. 3, 2001
6210543 Combination magnetoresistive/inductive thin film magnetic head and its manufacturing method Apr. 3, 2001
6199267 Method for the production of a magnetic head Mar. 13, 2001
6156461 Method for repair of photomasks Dec. 5, 2000
6153060 Sputtering process Nov. 28, 2000
6139993 Photomask defect repair method Oct. 31, 2000
6140655 Method for water vapor enhanced charged-particle-beam machining Oct. 31, 2000
6137660 Method for reducing ESD and imaging damage during focused ion beam definition of magnetoresistive head write track width Oct. 24, 2000
6132805 Shutter for thin-film processing equipment Oct. 17, 2000
6114073 Method for repairing phase shifting masks Sep. 5, 2000
6105589 Oxidative cleaning method and apparatus for electron microscopes using an air plasma as an oxygen radical source Aug. 22, 2000
6106677 Method of creating low resistance contacts in high aspect ratio openings by resputtering Aug. 22, 2000
6099698 Magnetic disc and method of manufacturing same Aug. 8, 2000

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