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Browse by Category: Main > Chemistry
Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
7132673 Device and method for milling of material using ions Nov. 7, 2006
7120988 Method for forming a write head having air bearing surface (ABS) Oct. 17, 2006
7118657 Pulsed ion beam control of solid state features Oct. 10, 2006
7118680 Self-alignment scheme for enhancement of CPP-GMR Oct. 10, 2006
7097745 Method of forming a tunneling magnetoresistive head Aug. 29, 2006
7077533 Reflecting device for electromagnetic waves Jul. 18, 2006
7060196 FIB milling of copper over organic dielectrics Jun. 13, 2006
7024756 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer Apr. 11, 2006
6996894 Methods of making magnetic heads with improved contiguous junctions Feb. 14, 2006
6987067 Semiconductor copper line cutting method Jan. 17, 2006
6982042 Ion bombardment of electrical lapping guides to decrease noise during lapping process Jan. 3, 2006
6979389 Micro-actuation apparatus for head ABS planarity (PTR) control during slider machining Dec. 27, 2005
6971116 Stamper for producing optical recording medium, optical recording medium, and methods of producing the same Nov. 29, 2005
6960281 Method to make a wider trailing pole structure by self-aligned pole trim process Nov. 1, 2005
6958248 Method and apparatus for the improvement of material/voltage contrast Oct. 25, 2005
6953519 Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus Oct. 11, 2005
6952014 End-point detection for FIB circuit modification Oct. 4, 2005
6936180 Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head Aug. 30, 2005
6933081 Method for quartz bump defect repair with less substrate damage Aug. 23, 2005
6929721 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes Aug. 16, 2005
6922118 Micro electrical mechanical system (MEMS) tuning using focused ion beams Jul. 26, 2005
6896973 Method for manufacturing a recording medium May. 24, 2005
6887355 Self-aligned pole trim process May. 3, 2005
6863787 Dummy copper deprocessing Mar. 8, 2005
6863786 Method and system for improving the effectiveness of artificial joints by the application of gas cluster ion beam technology Mar. 8, 2005
6854175 Method of manufacturing a thin film magnetic head Feb. 15, 2005
6844144 Single slider air bearing process using polymer brush formation Jan. 18, 2005
6824655 Process for charged particle beam micro-machining of copper Nov. 30, 2004
6821624 Amorphous carbon covered member Nov. 23, 2004
6809066 Ion texturing methods and articles Oct. 26, 2004
6808606 Method of manufacturing window using ion beam milling of glass substrate(s) Oct. 26, 2004
6804878 Method of improving the reliability of magnetic head sensors by ion milling smoothing Oct. 19, 2004
6783643 Control of solid state dimensional features Aug. 31, 2004
6783874 Magnetic sensor having second antiferromagnetic layers and two types of electrode layers on free magnetic layer and manufacturing method thereof Aug. 31, 2004
6776883 Process of manufacturing a magnetic read head Aug. 17, 2004
6773557 System for frequency adjustment of piezoelectric resonators by dual-track ion etching Aug. 10, 2004
6761803 Large area silicon cone arrays fabrication and cone based nanostructure modification Jul. 13, 2004
6746540 Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same Jun. 8, 2004
6743369 Method for manufacturing electrode for secondary battery Jun. 1, 2004
6740211 Method of manufacturing windshield using ion beam milling of glass substrate(s) May. 25, 2004
6729015 Method of manufacturing a magnetic head device May. 4, 2004
6709554 Method and apparatus for repairing lithography masks using a charged particle beam system Mar. 23, 2004
6676989 Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology Jan. 13, 2004
6673254 Methods for fabricating a micro heat barrier Jan. 6, 2004
6656371 Methods of forming magnetoresisitive devices Dec. 2, 2003
6656372 Methods of making magnetoresistive memory devices Dec. 2, 2003
6656614 Method for manufacturing magnetic media with textured CSS landing zone formed by ion implantation, and media obtained thereby Dec. 2, 2003
6655007 Method of making a read sensor for a merged magnetic head with self-aligned low resistance leads Dec. 2, 2003
6646277 Charging control and dosimetry system for gas cluster ion beam Nov. 11, 2003
6641705 Apparatus and method for reducing differential sputter rates Nov. 4, 2003

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