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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
4126712 Method of transferring a surface relief pattern from a wet poly(olefin sulfone) layer to a metal layer Nov. 21, 1978
4119881 Ion beam generator having concentrically arranged frustoconical accelerating grids Oct. 10, 1978
4117301 Method of making a submicrometer aperture in a substrate Sep. 26, 1978
4101772 Ion-beam etching method and an apparatus therefor Jul. 18, 1978
4098917 Method of providing a patterned metal layer on a substrate employing metal mask and ion milling Jul. 4, 1978
4097618 Method of transferring a surface relief pattern from a poly(1-methyl-1-cyclopropene sulfone) layer to a non-metallic inorganic layer Jun. 27, 1978
4092210 Process for the production of etched structures in a surface of a solid body by ionic etching May. 30, 1978
4085022 Method and apparatus for controlling the removal, by means of ion etching, of a thin layer from a substrate Apr. 18, 1978
4077851 Patterned chromate film process Mar. 7, 1978
4075452 Electroresistor and method of making same Feb. 21, 1978
4064030 Process for surface treating molded articles of fluorine resins Dec. 20, 1977
4045318 Method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer Aug. 30, 1977
4030997 Method of aligning liquid crystals Jun. 21, 1977
4022928 Vacuum deposition methods and masking structure May. 10, 1977
4016062 Method of forming a serrated surface topography Apr. 5, 1977
4000426 Apparatus for feeding parts in ion-beam machining Dec. 28, 1976
3998718 Ion milling apparatus Dec. 21, 1976
3988564 Ion beam micromachining method Oct. 26, 1976
3983264 Metal-semiconductor ohmic contacts and methods of fabrication Sep. 28, 1976
3975252 High-resolution sputter etching Aug. 17, 1976
3957609 Method of forming fine pattern of thin, transparent, conductive film May. 18, 1976
3943047 Selective removal of material by sputter etching Mar. 9, 1976

1 2 3 4 5 6 7 8 9 10

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