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Class Information
Number: 204/192.34
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching > Ion beam etching (e.g., ion milling, etc.)
Description: Processes wherein a beam of ions generated by an ion source remote from the substrate is employed to sputter material from the substrate.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8679357 Nanoimprinting method and method for producing substrates utilizing the nanoimprinting method Mar. 25, 2014
8663486 Method of manufacturing a magnetic recording medium Mar. 4, 2014
8658004 Vapor-barrier vacuum isolation system Feb. 25, 2014
8634146 Method of making a nanostructure Jan. 21, 2014
8623230 Methods and systems for removing a material from a sample Jan. 7, 2014
8540852 Method and apparatus for manufacturing magnetoresistive devices Sep. 24, 2013
8512586 Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials Aug. 20, 2013
8458892 Method for providing a perpendicular magnetic recording transducer using a low energy mill Jun. 11, 2013
8461051 Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component Jun. 11, 2013
8419905 Method for forming a diamond-like carbon layer on air bearing surface of a slider Apr. 16, 2013
8394244 System and method for laser patterning an integrated circuit etching mask Mar. 12, 2013
8377460 Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological ma Feb. 19, 2013
8365393 Manufacturing methods for write heads with floating side shields Feb. 5, 2013
8349197 Method for manufacturing a perpendicular magnetic write head having a tapered write pole and non-magnetic bump structure Jan. 8, 2013
8343319 Method and system for providing an improved hard bias structure Jan. 1, 2013
8343364 Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording Jan. 1, 2013
8303780 Method of forming mask for dry etching and manufacturing method of magnetic head using the same method Nov. 6, 2012
8298430 Method of etching magnetoresistive film by using a plurality of metal hard masks Oct. 30, 2012
8273257 Nanotube processing employing solid-condensed-gas-layers Sep. 25, 2012
8233248 Method and system for providing a magnetic recording transducer using a line hard mask Jul. 31, 2012
8221595 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers Jul. 17, 2012
8221637 Method and apparatus for manufacturing magnetic recording media Jul. 17, 2012
8191234 Method of manufacturing a magnetic head with reinforcing islands Jun. 5, 2012
8173248 PVD coated substrate May. 8, 2012
8163145 Method and apparatus for controlling topographical variation on a milled cross-section of a structure Apr. 24, 2012
8137571 Method for manufacturing perpendicular magnetic recording head Mar. 20, 2012
8137574 Processing method of glass substrate, and highly flat and highly smooth glass substrate Mar. 20, 2012
8137569 Method of fabricating a membrane having a tapered pore Mar. 20, 2012
8097177 Piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic device, radio--controlled clock, and method for manufacturing piezoelectric vibrating reed Jan. 17, 2012
8087157 Process to manufacture magnetic tunnel junction read head Jan. 3, 2012
8070920 Nanometer-scale sharpening of conductor tips Dec. 6, 2011
8066853 Method of forming inorganic alignment film, inorganic alignment film, substrate for electronic device, liquid crystal panel and electronic apparatus Nov. 29, 2011
8029681 Master recording medium for magnetically transferring servo pattern to the magnetic recording medium and method of manufacturing the same Oct. 4, 2011
7993538 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers Aug. 9, 2011
7993504 Backside unlayering of MOSFET devices for electrical and physical characterization Aug. 9, 2011
7927467 Method of manufacturing discrete track recording medium and discrete track recording medium Apr. 19, 2011
7883607 Methods of ion milling for magnetic heads and systems formed thereby Feb. 8, 2011
7879201 Method and apparatus for surface processing of a substrate Feb. 1, 2011
7875156 Probe storage container, prober apparatus, probe arranging method and manufacturing method of probe storage container Jan. 25, 2011
7867406 Patterned magnetic media having an exchange bridge structure connecting islands Jan. 11, 2011
7846305 Method and apparatus for increasing uniformity in ion mill process Dec. 7, 2010
7833388 End point detection for direct ion milling to induce magnetic anisotropy in a magnetic layer Nov. 16, 2010
7818875 Method of manufacturing a magnetic head with integration of a small flash field, zero bias, and non-reactive ion milling for pole tip uniformity Oct. 26, 2010
7810227 Process to manufacture CPP GMR read head Oct. 12, 2010
7803280 Method for finishing surface of preliminary polished glass substrate Sep. 28, 2010
7785513 Method of manufacturing molded product and method of manufacturing storage medium Aug. 31, 2010
7770284 Manufacturing method of magnetoresistive effect element Aug. 10, 2010
7771603 Process for polishing glass substrate Aug. 10, 2010
7716813 Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask May. 18, 2010
7676904 Method of manufacturing high sensitivity spin valve designs with ion beam treatment Mar. 16, 2010

1 2 3 4 5 6 7 8 9 10

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