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Class Information
Number: 204/192.32
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Sputter etching
Description: Processes for removing materials from a substrate wherein the substrate is subjected to bombardment by atomic particles (e.g., ions) and the activation energy is supplied at least in part by momentum transfer.

Sub-classes under this class:

Class Number Class Name Patents
204/192.35 Etching specified material 278
204/192.34 Ion beam etching (e.g., ion milling, etc.) 472
204/192.33 Measuring or testing (e.g., of operating parameters, end point determination, etc.) 201

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

Patent Number Title Of Patent Date Issued
8663486 Method of manufacturing a magnetic recording medium Mar. 4, 2014
8512586 Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials Aug. 20, 2013
8501533 Method of etching a programmable memory microelectronic device Aug. 6, 2013
8449731 Method and apparatus for increasing local plasma density in magnetically confined plasma May. 28, 2013
8449818 Molybdenum containing targets May. 28, 2013
8419905 Method for forming a diamond-like carbon layer on air bearing surface of a slider Apr. 16, 2013
8361284 Reducing the height of a defect associated with an air bearing surface Jan. 29, 2013
8361283 Method and apparatus for cleaning a target of a sputtering apparatus Jan. 29, 2013
8327520 Method for producing a coupling line Dec. 11, 2012
8298381 Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering Oct. 30, 2012
8287744 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal Oct. 16, 2012
8277617 Conformal magnetron sputter deposition Oct. 2, 2012
8273222 Apparatus and method for RF plasma enhanced magnetron sputter deposition Sep. 25, 2012
8266785 Method for manufacturing a magnetoresistive sensor having a novel junction structure for improved track width definition and pinned layer stability Sep. 18, 2012
8257560 Patterned media and method of manufacturing the same, and magnetic recording apparatus Sep. 4, 2012
8173248 PVD coated substrate May. 8, 2012
8092560 Lapping tool and method for manufacturing the same Jan. 10, 2012
8092659 Multi-station sputtering and cleaning system Jan. 10, 2012
8070920 Nanometer-scale sharpening of conductor tips Dec. 6, 2011
8043484 Methods and apparatus for resputtering process that improves barrier coverage Oct. 25, 2011
7989093 Method of making a coated cutting tool and the resulting tool Aug. 2, 2011
7927467 Method of manufacturing discrete track recording medium and discrete track recording medium Apr. 19, 2011
7901545 Ionized physical vapor deposition (iPVD) process Mar. 8, 2011
7892406 Ionized physical vapor deposition (iPVD) process Feb. 22, 2011
7883607 Methods of ion milling for magnetic heads and systems formed thereby Feb. 8, 2011
7879201 Method and apparatus for surface processing of a substrate Feb. 1, 2011
7875199 Radical generating method, etching method and apparatus for use in these methods Jan. 25, 2011
7846305 Method and apparatus for increasing uniformity in ion mill process Dec. 7, 2010
7788798 Method for manufacturing a perpendicular magnetic write head with wrap around magnetic trailing and side shields Sep. 7, 2010
7770281 Method for redefining the trailing shield throat height in a perpendicular magnetic recording write head Aug. 10, 2010
7662264 Method for producing magnetic recording medium Feb. 16, 2010
7641998 Conductive mono atomic layer coatings for fuel cell bipolar plates Jan. 5, 2010
7628897 Reactive ion etching for semiconductor device feature topography modification Dec. 8, 2009
7611610 Method and apparatus for controlling topographical variation on a milled cross-section of a structure Nov. 3, 2009
7601246 Methods of sputtering a protective coating on a semiconductor substrate Oct. 13, 2009
7582490 Controlled fabrication of gaps in electrically conducting structures Sep. 1, 2009
7560658 Method for forming nanoscale features Jul. 14, 2009
7550174 Low contact resistance bonding method for bipolar plates in a PEM fuel cell Jun. 23, 2009
7509729 Method for making a perpendicular magnetic recording write head Mar. 31, 2009
7494575 Method for manufacturing a split probe Feb. 24, 2009
7423957 Optical information recording medium and method of manufacturing thereof, manufacturing apparatus, recording/reproducing method, and recording/reproducing apparatus Sep. 9, 2008
7403095 Thin film resistor structure and method of fabricating a thin film resistor structure Jul. 22, 2008
7386934 Double layer patterning and technique for milling patterns for a servo recording head Jun. 17, 2008
7378003 Thin-film magnetic recording head manufacture using selective imaging May. 27, 2008
7367999 Ultrafine particles and method and apparatus for producing the same May. 6, 2008
RE40264 Multi-temperature processing Apr. 29, 2008
H2209 Large area metallization pretreatment and surface activation system Feb. 5, 2008
7316764 System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal Jan. 8, 2008
7313854 Method of manufacturing a tactile sensor Jan. 1, 2008
7300684 Method and system for coating internal surfaces of prefabricated process piping in the field Nov. 27, 2007

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