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Class Information
Number: 204/192.25
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Glow discharge sputter deposition (e.g., cathode sputtering, etc.) > Specified deposition material or use > Semiconductor
Description: Processes wherein the material is a semiconductor.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8603304 Method for manufacturing nickel silicide nano-wires Dec. 10, 2013
8551810 Method for manufacturing semiconductor device Oct. 8, 2013
8500963 Sputtering of thermally resistive materials including metal chalcogenides Aug. 6, 2013
8435388 Reactive sputter deposition processes and equipment May. 7, 2013
8398826 Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases Mar. 19, 2013
8349144 Methods of sputtering using a non-bonded semiconducting target Jan. 8, 2013
8242348 Methods of manufacturing quantum well materials Aug. 14, 2012
8198179 Method for producing group III nitride semiconductor light-emitting device Jun. 12, 2012
8133364 Formation of photoconductive and photovoltaic films Mar. 13, 2012
8062777 Semiconductor thin film and process for producing the same Nov. 22, 2011
8039400 Reducing contamination of semiconductor substrates during BEOL processing by performing a deposition/etch cycle during barrier deposition Oct. 18, 2011
8029853 Fabrication process for magnetoresistive devices of the CPP type Oct. 4, 2011
8012315 Lanthanoid aluminate film fabrication method Sep. 6, 2011
8012316 FCC-like trilayer AP2 structure for CPP GMR EM improvement Sep. 6, 2011
7998319 Process for the formation of miniaturized getter deposits and getter deposits so obtained Aug. 16, 2011
7887677 Silicon object forming method and apparatus Feb. 15, 2011
7851691 Thermoelectric devices and applications for the same Dec. 14, 2010
7847187 Photovoltaic cell comprising a photovoltaically active semiconductor material comprising a particular portion of tellurium ions replaced with halogen and nitrogen ions Dec. 7, 2010
7838763 Manufacturing apparatus and method for large-scale production of thin-film solar cells Nov. 23, 2010
7608544 Etching method and storage medium Oct. 27, 2009
7146722 Method of forming a bond pad structure Dec. 12, 2006
7037595 Thin hafnium oxide film and method for depositing same May. 2, 2006
6887353 Tailored barrier layer which provides improved copper interconnect electromigration resistance May. 3, 2005
6758947 Damage-free sculptured coating deposition Jul. 6, 2004
6756161 Ion-beam deposition process for manufacture of binary photomask blanks Jun. 29, 2004
6756160 Ion-beam deposition process for manufacturing attenuated phase shift photomask blanks Jun. 29, 2004
6746960 Electronic techniques for analyte detection Jun. 8, 2004
6726812 Ion beam sputtering apparatus, method for forming a transparent and electrically conductive film, and process for the production of a semiconductor device Apr. 27, 2004
6722942 Chemical mechanical polishing with electrochemical control Apr. 20, 2004
6652717 Use of variable impedance to control coil sputter distribution Nov. 25, 2003
6632583 Optical recording medium and production method of the same Oct. 14, 2003
6599399 Sputtering method to generate ionized metal plasma using electron beams and magnetic field Jul. 29, 2003
6579426 Use of variable impedance to control coil sputter distribution Jun. 17, 2003
6555221 Method for forming an ultra microparticle-structure Apr. 29, 2003
6537429 Diamond coatings on reactor wall and method of manufacturing thereof Mar. 25, 2003
6533907 Method of producing amorphous silicon for hard mask and waveguide applications Mar. 18, 2003
6500314 Plasma etch reactor and method Dec. 31, 2002
6451179 Method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma Sep. 17, 2002
6440276 Process for producing thin film gas sensors with dual ion beam sputtering Aug. 27, 2002
6398925 Methods and apparatus for producing silver based low emissivity coatings without the use of metal primer layers and articles produced thereby Jun. 4, 2002
6358378 Method for fabricating ZnO thin film for ultraviolet detection and emission source operated at room temperature, and apparatus therefor Mar. 19, 2002
6333111 Method of producing layered aluminum fine particles and use thereof Dec. 25, 2001
6323417 Method of making I-III-VI semiconductor materials for use in photovoltaic cells Nov. 27, 2001
6309515 Sputtering apparatus for sputtering high melting point metal and method for manufacturing semiconductor device having high melting point metal Oct. 30, 2001
6306267 Method of producing a photovoltaic device using a sputtering method Oct. 23, 2001
6254740 Sputtering method of producing and electroluminescent device with improved blue color purity Jul. 3, 2001
6238808 Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device May. 29, 2001
6238527 Thin film forming apparatus and method of forming thin film of compound by using the same May. 29, 2001
6228228 Method of making a light-emitting fiber May. 8, 2001
6176983 Methods of forming a semiconductor device Jan. 23, 2001

1 2 3 4 5 6 7

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