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Class Information
Number: 204/192.25
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Glow discharge sputter deposition (e.g., cathode sputtering, etc.) > Specified deposition material or use > Semiconductor
Description: Processes wherein the material is a semiconductor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608544 |
Etching method and storage medium |
Oct. 27, 2009 |
| 7146722 |
Method of forming a bond pad structure |
Dec. 12, 2006 |
| 7037595 |
Thin hafnium oxide film and method for depositing same |
May. 2, 2006 |
| 6887353 |
Tailored barrier layer which provides improved copper interconnect electromigration resistance |
May. 3, 2005 |
| 6758947 |
Damage-free sculptured coating deposition |
Jul. 6, 2004 |
| 6756160 |
Ion-beam deposition process for manufacturing attenuated phase shift photomask blanks |
Jun. 29, 2004 |
| 6756161 |
Ion-beam deposition process for manufacture of binary photomask blanks |
Jun. 29, 2004 |
| 6746960 |
Electronic techniques for analyte detection |
Jun. 8, 2004 |
| 6726812 |
Ion beam sputtering apparatus, method for forming a transparent and electrically conductive film, and process for the production of a semiconductor device |
Apr. 27, 2004 |
| 6722942 |
Chemical mechanical polishing with electrochemical control |
Apr. 20, 2004 |
| 6652717 |
Use of variable impedance to control coil sputter distribution |
Nov. 25, 2003 |
| 6632583 |
Optical recording medium and production method of the same |
Oct. 14, 2003 |
| 6599399 |
Sputtering method to generate ionized metal plasma using electron beams and magnetic field |
Jul. 29, 2003 |
| 6579426 |
Use of variable impedance to control coil sputter distribution |
Jun. 17, 2003 |
| 6555221 |
Method for forming an ultra microparticle-structure |
Apr. 29, 2003 |
| 6537429 |
Diamond coatings on reactor wall and method of manufacturing thereof |
Mar. 25, 2003 |
| 6533907 |
Method of producing amorphous silicon for hard mask and waveguide applications |
Mar. 18, 2003 |
| 6500314 |
Plasma etch reactor and method |
Dec. 31, 2002 |
| 6451179 |
Method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
Sep. 17, 2002 |
| 6440276 |
Process for producing thin film gas sensors with dual ion beam sputtering |
Aug. 27, 2002 |
| 6398925 |
Methods and apparatus for producing silver based low emissivity coatings without the use of metal primer layers and articles produced thereby |
Jun. 4, 2002 |
| 6358378 |
Method for fabricating ZnO thin film for ultraviolet detection and emission source operated at room temperature, and apparatus therefor |
Mar. 19, 2002 |
| 6333111 |
Method of producing layered aluminum fine particles and use thereof |
Dec. 25, 2001 |
| 6323417 |
Method of making I-III-VI semiconductor materials for use in photovoltaic cells |
Nov. 27, 2001 |
| 6309515 |
Sputtering apparatus for sputtering high melting point metal and method for manufacturing semiconductor device having high melting point metal |
Oct. 30, 2001 |
| 6306267 |
Method of producing a photovoltaic device using a sputtering method |
Oct. 23, 2001 |
| 6254740 |
Sputtering method of producing and electroluminescent device with improved blue color purity |
Jul. 3, 2001 |
| 6238808 |
Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device |
May. 29, 2001 |
| 6238527 |
Thin film forming apparatus and method of forming thin film of compound by using the same |
May. 29, 2001 |
| 6228228 |
Method of making a light-emitting fiber |
May. 8, 2001 |
| 6176983 |
Methods of forming a semiconductor device |
Jan. 23, 2001 |
| 6171453 |
Alignment mark shielding ring and method of using |
Jan. 9, 2001 |
| 6165567 |
Process of forming a semiconductor device |
Dec. 26, 2000 |
| 6143142 |
Composite coatings |
Nov. 7, 2000 |
| 6136159 |
Method for depositing metal |
Oct. 24, 2000 |
| 6132564 |
In-situ pre-metallization clean and metallization of semiconductor wafers |
Oct. 17, 2000 |
| 6132568 |
Manufacturing method of samarium sulfide thin films |
Oct. 17, 2000 |
| 6092669 |
Equipment for producing thin-film solar cell |
Jul. 25, 2000 |
| 6083358 |
Multiple species sputtering for improved bottom coverage and improved sputter rate |
Jul. 4, 2000 |
| 6059940 |
Method for fabricating dual layer protective barrier copper metallization |
May. 9, 2000 |
| 6054024 |
Apparatus for forming transparent conductive film by sputtering and method therefor |
Apr. 25, 2000 |
| 6046425 |
Plasma processing apparatus having insulator disposed on inner surface of plasma generating chamber |
Apr. 4, 2000 |
| 6036821 |
Enhanced collimated sputtering apparatus and its method of use |
Mar. 14, 2000 |
| 6033916 |
Measuring device and method for making same |
Mar. 7, 2000 |
| 6033538 |
Magneto-optical recording medium production method |
Mar. 7, 2000 |
| 6033537 |
Sputtering target and method of manufacturing a semiconductor device |
Mar. 7, 2000 |
| 5994213 |
Aluminum plug process |
Nov. 30, 1999 |
| 5976614 |
Preparation of cuxinygazsen precursor films and powders by electroless deposition |
Nov. 2, 1999 |
| 5976444 |
Nanochannel glass replica membranes |
Nov. 2, 1999 |
| 5969232 |
Catalytic layer system |
Oct. 19, 1999 |
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