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Class Information
Number: 204/192.23
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Glow discharge sputter deposition (e.g., cathode sputtering, etc.) > Specified deposition material or use > Insulator or dielectric > Silicon containing
Description: Processes wherein the material comprises silicon.

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8673404 Barrier film and laminated material, container for wrapping and image display medium using the same, and manufacturing method for barrier film Mar. 18, 2014
8652306 Method for manufacturing mask blank, method for manufacturing transfer mask, sputtering target for manufacturing mask blank Feb. 18, 2014
8603304 Method for manufacturing nickel silicide nano-wires Dec. 10, 2013
8597474 Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal Dec. 3, 2013
8568890 Watch cover glass Oct. 29, 2013
8460803 Hard coating layer and method for forming the same Jun. 11, 2013
8425738 Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system Apr. 23, 2013
8414747 High-throughput HDP-CVD processes for advanced gapfill applications Apr. 9, 2013
8388815 Coated article and method of making the same Mar. 5, 2013
8377265 Method of forming inorganic insulating layer and method of fabricating array substrate for display device using the same Feb. 19, 2013
8367453 Method of manufacturing solar battery Feb. 5, 2013
8357267 Film producing method using atmospheric pressure hydrogen plasma, and method and apparatus for producing refined film Jan. 22, 2013
8349146 Method for manufacturing nickel silicide nano-wires Jan. 8, 2013
8330556 Passivation layers in acoustic resonators Dec. 11, 2012
8173474 Method of manufacturing solar battery May. 8, 2012
8152972 Method for forming fine particles, method for forming concavities and convexities, and device for forming fine particles Apr. 10, 2012
8105466 Biased pulse DC reactive sputtering of oxide films Jan. 31, 2012
8066853 Method of forming inorganic alignment film, inorganic alignment film, substrate for electronic device, liquid crystal panel and electronic apparatus Nov. 29, 2011
8043488 Rotatable sputter target Oct. 25, 2011
7998324 Sputtering target and process for producing si oxide film therewith Aug. 16, 2011
7988835 Silicon dot forming method and silicon dot forming apparatus Aug. 2, 2011
7977255 Method and system for depositing a thin-film transistor Jul. 12, 2011
7887677 Silicon object forming method and apparatus Feb. 15, 2011
7842168 Method for producing silicon oxide film and method for producing optical multilayer film Nov. 30, 2010
7837838 Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus Nov. 23, 2010
7820018 Process and apparatus for applying optical coatings Oct. 26, 2010
7820017 Dielectric-layer-coated substrate and installation for production thereof Oct. 26, 2010
7790060 SiO.sub.x:Si composite material compositions and methods of making same Sep. 7, 2010
7781327 Resputtering process for eliminating dielectric damage Aug. 24, 2010
7749406 SiO.sub.x:Si sputtering targets and method of making and using such targets Jul. 6, 2010
7674446 Hafnium silicide target for forming gate oxide film, and method for preparation thereof Mar. 9, 2010
7658822 SiO.sub.x:Si composite articles and methods of making same Feb. 9, 2010
7641773 Process for producing layers and layer systems, and coated substrate Jan. 5, 2010
7601246 Methods of sputtering a protective coating on a semiconductor substrate Oct. 13, 2009
7585396 Coated article with ion treated overcoat layer and corresponding method Sep. 8, 2009
7550067 Coated article with ion treated underlayer and corresponding method Jun. 23, 2009
7517515 Hafnium silicide target for forming gate oxide film and method for preparation thereof Apr. 14, 2009
7316867 Method for manufacturing a multi-layered thin film for use as an anode in a lithium secondary battery Jan. 8, 2008
7282121 Manufacturing method and apparatus of phase shift mask blank Oct. 16, 2007
7273534 Optical device substrate film-formation apparatus, optical disk substrate film-formation method, substrate holder manufacture method, substrate holder, optical disk and a phase-change recordin Sep. 25, 2007
7235160 Hollow cathode sputtering apparatus and related method Jun. 26, 2007
7135097 Box-shaped facing-targets sputtering apparatus and method for producing compound thin film Nov. 14, 2006
7118656 Thin film stent Oct. 10, 2006
7052552 Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD May. 30, 2006
7037595 Thin hafnium oxide film and method for depositing same May. 2, 2006
7008519 Sputtering target for forming high-resistance transparent conductive film, and method for producing the film Mar. 7, 2006
6986834 Hafnium silicide target and manufacturing method for preparation thereof Jan. 17, 2006
6958112 Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation Oct. 25, 2005
6939446 Soil-resistant coating for glass surfaces Sep. 6, 2005
6921465 Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film Jul. 26, 2005

1 2 3 4 5 6 7

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