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Class Information
Number: 204/192.12
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Glow discharge sputter deposition (e.g., cathode sputtering, etc.)
Description: Processes for the deposition of target material onto a surface (or substrate) wherein material is sputtered from the target in the presence of a glow discharge, e.g., cathode sputtering, etc.

Sub-classes under this class:

Class Number Class Name Patents
204/192.14 Coating inorganic material onto polymeric material 186
204/192.13 Measuring or testing (e.g., of operating parameters, property of article, etc.) 413
204/192.15 Specified deposition material or use 1,745

Patents under this class:

Patent Number Title Of Patent Date Issued
8702918 Apparatus for enabling concentricity of plasma dark space Apr. 22, 2014
8702913 Film forming apparatus and film forming method Apr. 22, 2014
8691058 Apparatus for sputtering and a method of fabricating a metallization structure Apr. 8, 2014
8691057 Stress adjustment in reactive sputtering Apr. 8, 2014
8685213 Method and apparatus for plasma generation Apr. 1, 2014
8673121 Method of fabricating piezoelectric materials with opposite C-axis orientations Mar. 18, 2014
8663789 Thin film getter devices Mar. 4, 2014
8663431 Sputtering system for depositing thin film and method for depositing thin film Mar. 4, 2014
8663430 Magnetron sputtering apparatus and method for manufacturing thin film Mar. 4, 2014
8658001 Method and control system for depositing a layer Feb. 25, 2014
8652310 Trim magnets to adjust erosion rate of cylindrical sputter targets Feb. 18, 2014
8648315 Accelerator having a multi-channel micro-collimator Feb. 11, 2014
8636891 Coated article and method for manufacturing same Jan. 28, 2014
8636876 Deposition of LiCoO.sub.2 Jan. 28, 2014
8628645 Manufacturing method for thin film battery Jan. 14, 2014
8623184 Device for supporting a rotatable target and sputtering apparatus Jan. 7, 2014
8603627 Housing and method for making the same Dec. 10, 2013
8603364 Phosphor Dec. 10, 2013
8603304 Method for manufacturing nickel silicide nano-wires Dec. 10, 2013
8597804 Housing and method for making the same Dec. 3, 2013
8597783 Housing and method for making the same Dec. 3, 2013
8597782 Housing and method for making the same Dec. 3, 2013
8597479 Sputtering system Dec. 3, 2013
8597473 Reactive physical vapor deposition with sequential reactive gas injection Dec. 3, 2013
8591706 Sputtering system and method for depositing thin film Nov. 26, 2013
8585874 Method of preparing positive active material for lithium battery Nov. 19, 2013
8585873 Methods and apparatus for sputtering Nov. 19, 2013
8585872 Sputtering apparatus and film-forming processes Nov. 19, 2013
8574410 Method and apparatus for improved high power impulse magnetron sputtering Nov. 5, 2013
8574409 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Nov. 5, 2013
8568907 Housing and method for making the same Oct. 29, 2013
8568906 Housing and method for making the same Oct. 29, 2013
8568905 Housing and method for making the same Oct. 29, 2013
8568572 Very low pressure high power impulse triggered magnetron sputtering Oct. 29, 2013
8568571 Thin film batteries and methods for manufacturing same Oct. 29, 2013
8562798 Physical vapor deposition plasma reactor with RF source power applied to the target and having a magnetron Oct. 22, 2013
8557405 Coated member Oct. 15, 2013
8557390 Glass product Oct. 15, 2013
8545621 Method for eliminating defects from semiconductor materials Oct. 1, 2013
8540850 Target arrangement for mounting / dismounting and method of manufacturing Sep. 24, 2013
8535490 Rotatable magnetron sputtering with axially movable target electrode tube Sep. 17, 2013
8529735 Non gamma-phase cubic AlCrO Sep. 10, 2013
8524049 Method for forming metallic nitride film Sep. 3, 2013
8518220 Method for predicting and compensating erosion in a magnetron sputtering target Aug. 27, 2013
8512527 Magnet transportation system, sputtering apparatus including the same and sputtering method Aug. 20, 2013
8512526 Method of performing physical vapor deposition with RF plasma source power applied to the target using a magnetron Aug. 20, 2013
8507110 Coated cutting tool and a method of making thereof Aug. 13, 2013
8506767 Thin-film shape memory alloy device and method Aug. 13, 2013
RE44414 Hard coating film and method for forming the same Aug. 6, 2013
8500966 Nanolayered coated cutting tool and method for making the same Aug. 6, 2013

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