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Browse by Category: Main > Chemistry
Class Information
Number: 204/192.11
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering > Ion beam sputter deposition
Description: Processes for the deposition of target material onto a surface (or substrate), to coat or form, wherein a beam of ions generated by an ions source remote from the target is employed to sputter material from the target.










Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8709267 Double patterning method using tilt-angle deposition Apr. 29, 2014
8658004 Vapor-barrier vacuum isolation system Feb. 25, 2014
8653474 Charged particle extraction device and method of design there for Feb. 18, 2014
8602289 Room temperature bonding using sputtering Dec. 10, 2013
8586169 Thermal barrier coating member, method for producing the same, thermal barrier coating material, gas turbine, and sintered body Nov. 19, 2013
8562794 Process for producing reflective mask blank for EUV lithography and process for producing substrate with functional film for the mask blank Oct. 22, 2013
8524051 Coated article with oxidation graded layer proximate IR reflecting layer(s) and corresponding method Sep. 3, 2013
8476587 Ion source with surface coating Jul. 2, 2013
8405043 Charged particle extraction device and method of design there for Mar. 26, 2013
8399110 Adhesive, hermetic oxide films for metal fluoride optics and method of making same Mar. 19, 2013
8394243 Sputtered cobalt oxide for perpendicular magnetic recording medium with low media noise Mar. 12, 2013
8365393 Manufacturing methods for write heads with floating side shields Feb. 5, 2013
8349445 Microbicidal substrate Jan. 8, 2013
8316791 Multi-environment coating device Nov. 27, 2012
8182862 Ion beam-assisted high-temperature superconductor (HTS) deposition for thick film tape May. 22, 2012
8173248 PVD coated substrate May. 8, 2012
8133365 Method of arc ion plating and target for use therein Mar. 13, 2012
8133367 Sputtering system and method using a loose granular sputtering target Mar. 13, 2012
8101049 Method for producing low cost media Jan. 24, 2012
8088232 Molybdenum tubular sputtering targets with uniform grain size and texture Jan. 3, 2012
8039096 Friction- and wear-reducing coating Oct. 18, 2011
8034406 Integrated substrate processing in a vacuum processing tool Oct. 11, 2011
8020216 Tapered probe structures and fabrication Sep. 13, 2011
8009387 Forming an aluminum alloy oxynitride underlayer and a diamond-like carbon overcoat to protect a magnetic recording head and/or media Aug. 30, 2011
7918014 Method of manufacturing a CPP structure with enhanced GMR ratio Apr. 5, 2011
7879201 Method and apparatus for surface processing of a substrate Feb. 1, 2011
7838457 Process for production of conductive catalyst particles, process for production of catalyst electrode capable of gas diffusion, apparatus for production of conductive catalyst particles, and v Nov. 23, 2010
7803254 Processes for forming electronic devices and electronic devices formed by such processes Sep. 28, 2010
7722966 Nano-composite materials May. 25, 2010
7709062 Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device May. 4, 2010
7691434 Method for fabricating magnetoresistive read head having a bias structure with at least one dusting layer Apr. 6, 2010
7676904 Method of manufacturing high sensitivity spin valve designs with ion beam treatment Mar. 16, 2010
7641998 Conductive mono atomic layer coatings for fuel cell bipolar plates Jan. 5, 2010
7550174 Low contact resistance bonding method for bipolar plates in a PEM fuel cell Jun. 23, 2009
7537846 Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk May. 26, 2009
7517437 RF powered target for increasing deposition uniformity in sputtering systems Apr. 14, 2009
7510608 Hard coating film Mar. 31, 2009
7495245 Apparatus and method for controlled particle beam manufacturing Feb. 24, 2009
7495244 Apparatus and method for controlled particle beam manufacturing Feb. 24, 2009
7495242 Apparatus and method for controlled particle beam manufacturing Feb. 24, 2009
7485372 Multi-layer coating having excellent adhesion and sliding properties and production method thereof Feb. 3, 2009
7467447 Method of manufacturing a SAW device Dec. 23, 2008
7421973 System and method for performing SIMOX implants using an ion shower Sep. 9, 2008
7374642 Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith May. 20, 2008
7370416 Method of manufacturing an injector plate May. 13, 2008
7341648 Method for coating piston rings for internal combustion engine Mar. 11, 2008
H2209 Large area metallization pretreatment and surface activation system Feb. 5, 2008
7314688 Method of producing a reflection mask blank, method of producing a reflection mask, and method of producing a semiconductor device Jan. 1, 2008
7309405 Method of forming ITO film Dec. 18, 2007
7300556 Method for depositing a thin film adhesion layer Nov. 27, 2007

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