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Class Information
Number: 204/192.1
Name: Chemistry: electrical and wave energy > Processes and products > Coating, forming or etching by sputtering
Description: Processes for coating, forming or etching within a vacuum environment involving bombarding a solid or liquid target material with atomic particles (e.g., ions) to cause some target material to be ejected (i.e., sputtered) by momentum transfer.










Sub-classes under this class:

Class Number Class Name Patents
204/192.12 Glow discharge sputter deposition (e.g., cathode sputtering, etc.) 1,582
204/192.11 Ion beam sputter deposition 386
204/192.32 Sputter etching 851


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8702912 Coating process, workpiece or tool and its use Apr. 22, 2014
8702918 Apparatus for enabling concentricity of plasma dark space Apr. 22, 2014
8663431 Sputtering system for depositing thin film and method for depositing thin film Mar. 4, 2014
8647795 Sputtering target material, silicon-containing film forming method, and photomask blank Feb. 11, 2014
8623184 Device for supporting a rotatable target and sputtering apparatus Jan. 7, 2014
8623121 Stable catalyst layers for hydrogen permeable composite membranes Jan. 7, 2014
8603648 Reflective film laminate Dec. 10, 2013
8603627 Housing and method for making the same Dec. 10, 2013
8597782 Housing and method for making the same Dec. 3, 2013
8597783 Housing and method for making the same Dec. 3, 2013
8574409 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Nov. 5, 2013
8574718 Coated glass surfaces and method for coating a glass substrate Nov. 5, 2013
8568904 Housing and method for making the same Oct. 29, 2013
8568890 Watch cover glass Oct. 29, 2013
8567215 Method for producing polarizing element Oct. 29, 2013
8557390 Glass product Oct. 15, 2013
8558324 Composite dielectric thin film, capacitor and field effect transistor using the same, and each fabrication method thereof Oct. 15, 2013
8549880 Method for producing polarizing element Oct. 8, 2013
8540817 Method of manufacturing a Si.sub.(1-v-w-x)C.sub.wAl.sub.xN.sub.v substrate, method of manufacturing an epitaxial wafer, Si.sub.(1-v-w-x)C.sub.wAl.sub.xN.sub.v substrate, and epitaxial wafer Sep. 24, 2013
8540786 Method for producing PVD coatings Sep. 24, 2013
8529999 Thermal barrier coating application processes Sep. 10, 2013
8529797 Perovskite semiconductor thin film and method of making thereof Sep. 10, 2013
8512586 Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials Aug. 20, 2013
8512859 Housing and method for making the same Aug. 20, 2013
8512860 Housing and method for making the same Aug. 20, 2013
8512883 Double silver low-emissivity and solar control coatings Aug. 20, 2013
8507110 Coated cutting tool and a method of making thereof Aug. 13, 2013
8507085 Anti-corrosion treatment process for aluminum or aluminum alloy and aluminum or aluminum alloy article thereof Aug. 13, 2013
8500964 Method of fabricating bubble-type micro-pump Aug. 6, 2013
RE44414 Hard coating film and method for forming the same Aug. 6, 2013
8491989 Coating system, coated workpiece and method for manufacturing the same Jul. 23, 2013
8491996 Coated tool Jul. 23, 2013
8475633 Production method for a nanopatterned epoxy substrate Jul. 2, 2013
8470158 Porous metal article and about method for manufacturing same Jun. 25, 2013
8460803 Hard coating layer and method for forming the same Jun. 11, 2013
8449730 Buffer layers for L10 thin film perpendicular media May. 28, 2013
8445111 Gadolinium oxide-doped zirconium oxide overcoat and/or method of making the same May. 21, 2013
8440301 Coating apparatus and method May. 14, 2013
8440327 Method of producing a layer by arc-evaporation from ceramic cathodes May. 14, 2013
8435638 Coated glass and method for making the same May. 7, 2013
8420207 Substrate comprising a stack having thermal properties Apr. 16, 2013
8419905 Method for forming a diamond-like carbon layer on air bearing surface of a slider Apr. 16, 2013
8415885 Plasma processing apparatus and plasma processing method Apr. 9, 2013
8398833 Use of DC magnetron sputtering systems Mar. 19, 2013
8398872 Method for preparing ultraflat, atomically perfect areas on large regions of a crystal surface by heteroepitaxy deposition Mar. 19, 2013
8399110 Adhesive, hermetic oxide films for metal fluoride optics and method of making same Mar. 19, 2013
8394243 Sputtered cobalt oxide for perpendicular magnetic recording medium with low media noise Mar. 12, 2013
8387220 Method of manufacturing a piezoelectric element Mar. 5, 2013
8383001 Plasma etching method, plasma etching apparatus and storage medium Feb. 26, 2013
8377506 Method of manufacturing a substrate structure Feb. 19, 2013

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