Differential etching apparatus having a horizontal tube reactor > Patents

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Class Information
Number: 156/913
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential etching apparatus having a horizontal tube reactor
Description: Art collection involving differential etching apparatus constructed as vertical tube reactors having a means for holding a plurality of horizontally stacked workpieces.

Patents under this class:

Patent Number	Title Of Patent	Date Issued
6120611	Apparatus and method for hermetically sealing a chamber	Sep. 19, 2000
5913978	Apparatus and method for regulating pressure in two chambers	Jun. 22, 1999
5225375	Plasma enhanced chemical vapor processing of semiconductor substrates	Jul. 6, 1993
5199994	Impurity doping apparatus	Apr. 6, 1993
5175021	Transmission line for providing power to an electrode boat in a plasma enhanced chemical vapor deposition system	Dec. 29, 1992
5133986	Plasma enhanced chemical vapor processing system using hollow cathode effect	Jul. 28, 1992
4920920	Apparatus for producing semiconductor devices	May. 1, 1990
4657616	In-situ CVD chamber cleaner	Apr. 14, 1987
4569719	Glow discharge method and apparatus and photoreceptor devices made therewith	Feb. 11, 1986