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Class Information
Number: 156/913
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential etching apparatus having a horizontal tube reactor
Description: Art collection involving differential etching apparatus constructed as vertical tube reactors having a means for holding a plurality of horizontally stacked workpieces.

Patents under this class:

Patent Number Title Of Patent Date Issued
6120611 Apparatus and method for hermetically sealing a chamber Sep. 19, 2000
5913978 Apparatus and method for regulating pressure in two chambers Jun. 22, 1999
5225375 Plasma enhanced chemical vapor processing of semiconductor substrates Jul. 6, 1993
5199994 Impurity doping apparatus Apr. 6, 1993
5175021 Transmission line for providing power to an electrode boat in a plasma enhanced chemical vapor deposition system Dec. 29, 1992
5133986 Plasma enhanced chemical vapor processing system using hollow cathode effect Jul. 28, 1992
4920920 Apparatus for producing semiconductor devices May. 1, 1990
4657616 In-situ CVD chamber cleaner Apr. 14, 1987
4569719 Glow discharge method and apparatus and photoreceptor devices made therewith Feb. 11, 1986

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