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Class Information
Number: 156/912
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential etching apparatus having a vertical tube reactor
Description: Art collection involving differential etching apparatus constructed as a vertical tube reactor having a means for holding a plurality of vertically stacked workpieces.

Patents under this class:

Patent Number Title Of Patent Date Issued
6887315 Vacuum plate having a symmetrical air-load block May. 3, 2005
6660646 Method for plasma hardening photoresist in etching of semiconductor and superconductor films Dec. 9, 2003
6251189 Substrate processing apparatus and substrate processing method Jun. 26, 2001
6228174 Heat treatment system using ring-shaped radiation heater elements May. 8, 2001
6015758 Method of stripping a wafer of its film with gas injected into a CVD apparatus in which the wafer is disposed Jan. 18, 2000
5811022 Inductive plasma reactor Sep. 22, 1998
5383984 Plasma processing apparatus etching tunnel-type Jan. 24, 1995
5364488 Coaxial plasma processing apparatus Nov. 15, 1994
5318632 Wafer process tube apparatus and method for vertical furnaces Jun. 7, 1994
5284547 Plasma-process system with batch scheme Feb. 8, 1994
5234528 Vertical heat-treating apparatus Aug. 10, 1993
5224999 Heat treatment apparatus Jul. 6, 1993
5217560 Vertical type processing apparatus Jun. 8, 1993
5169478 Apparatus for manufacturing semiconductor devices Dec. 8, 1992
5146869 Tube and injector for preheating gases in a chemical vapor deposition reactor Sep. 15, 1992
5016567 Apparatus for treatment using gas May. 21, 1991
4989540 Apparatus for reaction treatment Feb. 5, 1991
4550242 Automatic plasma processing device and heat treatment device for batch treatment of workpieces Oct. 29, 1985
4550239 Automatic plasma processing device and heat treatment device Oct. 29, 1985

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