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Class Information
Number: 156/912
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential etching apparatus having a vertical tube reactor
Description: Art collection involving differential etching apparatus constructed as a vertical tube reactor having a means for holding a plurality of vertically stacked workpieces.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6887315 |
Vacuum plate having a symmetrical air-load block |
May. 3, 2005 |
| 6660646 |
Method for plasma hardening photoresist in etching of semiconductor and superconductor films |
Dec. 9, 2003 |
| 6251189 |
Substrate processing apparatus and substrate processing method |
Jun. 26, 2001 |
| 6228174 |
Heat treatment system using ring-shaped radiation heater elements |
May. 8, 2001 |
| 6015758 |
Method of stripping a wafer of its film with gas injected into a CVD apparatus in which the wafer is disposed |
Jan. 18, 2000 |
| 5811022 |
Inductive plasma reactor |
Sep. 22, 1998 |
| 5383984 |
Plasma processing apparatus etching tunnel-type |
Jan. 24, 1995 |
| 5364488 |
Coaxial plasma processing apparatus |
Nov. 15, 1994 |
| 5318632 |
Wafer process tube apparatus and method for vertical furnaces |
Jun. 7, 1994 |
| 5284547 |
Plasma-process system with batch scheme |
Feb. 8, 1994 |
| 5234528 |
Vertical heat-treating apparatus |
Aug. 10, 1993 |
| 5224999 |
Heat treatment apparatus |
Jul. 6, 1993 |
| 5217560 |
Vertical type processing apparatus |
Jun. 8, 1993 |
| 5169478 |
Apparatus for manufacturing semiconductor devices |
Dec. 8, 1992 |
| 5146869 |
Tube and injector for preheating gases in a chemical vapor deposition reactor |
Sep. 15, 1992 |
| 5016567 |
Apparatus for treatment using gas |
May. 21, 1991 |
| 4989540 |
Apparatus for reaction treatment |
Feb. 5, 1991 |
| 4550242 |
Automatic plasma processing device and heat treatment device for batch treatment of workpieces |
Oct. 29, 1985 |
| 4550239 |
Automatic plasma processing device and heat treatment device |
Oct. 29, 1985 |
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