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Class Information
Number: 156/345.55
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With workpiece support > With means to move the workpiece inside the etching chamber > With means to cause rotary movement of the workpiece
Description: Apparatus wherein the holding means is capable of producing circular motion of the workpiece.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8641825 Substrate temperature regulation fixed apparatus Feb. 4, 2014
8623142 Coating apparatus Jan. 7, 2014
8580037 Method of depositing materials on a non-planar surface Nov. 12, 2013
8567421 Method and system for uniformly applying a multi-phase cleaning solution to a substrate Oct. 29, 2013
8562744 Coating device Oct. 22, 2013
8562746 Sectional wafer carrier Oct. 22, 2013
8551290 Apparatus for substrate processing with fluid Oct. 8, 2013
8545668 Substrate processing apparatus and substrate processing method Oct. 1, 2013
8518210 Purging of porogen from UV cure chamber Aug. 27, 2013
8499715 Coating appratus having two coating devices for successively coating same surface of substrate Aug. 6, 2013
8500916 Method for aligning wafers within wafer processing equipment Aug. 6, 2013
8435380 Substrate chucking member, substrate processing apparatus having the member, and method of processing substrate using the member May. 7, 2013
8409355 Low profile process kit Apr. 2, 2013
8398817 Chemical-liquid processing apparatus and chemical-liquid processing method Mar. 19, 2013
8394228 Apparatus for removing material from one or more substrates Mar. 12, 2013
8394234 Spin head and method of chucking substrate using the same Mar. 12, 2013
8388853 Non-contact substrate processing Mar. 5, 2013
8372203 Apparatus temperature control and pattern compensation Feb. 12, 2013
8361234 Substrate treatment apparatus Jan. 29, 2013
8349128 Method and apparatus for stable plasma processing Jan. 8, 2013
8336488 Multi-station plasma reactor with multiple plasma regions Dec. 25, 2012
8337622 Manufacturing apparatus and method for semiconductor device Dec. 25, 2012
8337659 Substrate processing method and substrate processing apparatus Dec. 25, 2012
8323413 Susceptor and semiconductor manufacturing apparatus including the same Dec. 4, 2012
8313609 Substrate processing apparatus and substrate processing method Nov. 20, 2012
8293071 Spin head Oct. 23, 2012
8282771 Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the same Oct. 9, 2012
8282768 Purging of porogen from UV cure chamber Oct. 9, 2012
8282767 Plasma processing apparatus Oct. 9, 2012
8262799 Substrate processing apparatus and substrate transferring method Sep. 11, 2012
8257549 Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head Sep. 4, 2012
8257499 Vapor phase deposition apparatus and vapor phase deposition method Sep. 4, 2012
8257500 Transport apparatus for elongate substrates Sep. 4, 2012
8257547 Surface activation device Sep. 4, 2012
8246798 Substrate processing apparatus and apparatus and method of manufacturing magnetic device Aug. 21, 2012
8226770 Susceptor with backside area of constant emissivity Jul. 24, 2012
8222119 Apparatus and method of temperature control during cleaving processes of thick materials Jul. 17, 2012
8216376 Method and apparatus for variable conductance Jul. 10, 2012
8211269 Wafer spin chuck and an etcher using the same Jul. 3, 2012
8152924 CVD reactor comprising a gas inlet member Apr. 10, 2012
8133322 Apparatus for inverted multi-wafer MOCVD fabrication Mar. 13, 2012
8110045 Processing equipment for object to be processed Feb. 7, 2012
8052834 Substrate treating system, substrate treating device, program, and recording medium Nov. 8, 2011
8047158 Substrate processing apparatus and reaction container Nov. 1, 2011
8048228 Masking apparatus and method of fabricating electronic component Nov. 1, 2011
8043467 Liquid processing apparatus and liquid processing method Oct. 25, 2011
8038838 Spin head, method of operating the spin head and apparatus for treating substrates with the spin head Oct. 18, 2011
8029641 Device and method for liquid treatment of wafer-shaped articles Oct. 4, 2011
8021513 Substrate carrying apparatus and substrate carrying method Sep. 20, 2011
8021487 Wafer carrier with hub Sep. 20, 2011

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