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Class Information
Number: 156/345.54
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With workpiece support > With means to move the workpiece inside the etching chamber
Description: Apparatus wherein the holding means produces movement of the workpiece.










Sub-classes under this class:

Class Number Class Name Patents
156/345.55 With means to cause rotary movement of the workpiece 220


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
6637582 Board transmitting device for an upright PC board etching machine Oct. 28, 2003
6635115 Tandem process chamber Oct. 21, 2003
6610170 Method of holding substrate and substrate holding system Aug. 26, 2003
6610171 Method of holding substrate and substrate holding system Aug. 26, 2003
6589352 Self aligning non contact shadow ring process kit Jul. 8, 2003
6572708 Semiconductor wafer support lift-pin assembly Jun. 3, 2003
6558509 Dual wafer load lock May. 6, 2003
6537417 Apparatus for processing samples Mar. 25, 2003
6537422 Single-substrate-heat-processing apparatus for semiconductor process Mar. 25, 2003
6537415 Apparatus for processing samples Mar. 25, 2003
6521048 Single body injector and deposition chamber Feb. 18, 2003
6511577 Reduced impedance chamber Jan. 28, 2003
6500265 Apparatus for electrostatically maintaining subtrate flatness Dec. 31, 2002
6488820 Method and apparatus for reducing migration of conductive material on a component Dec. 3, 2002
6485605 High temperature process chamber having improved heat endurance Nov. 26, 2002
6316369 Corrosion-resistant system and method for a plasma etching apparatus Nov. 13, 2001
6306245 Plasma etching apparatus Oct. 23, 2001
6264788 Plasma treatment method and apparatus Jul. 24, 2001
6264752 Reactor for processing a microelectronic workpiece Jul. 24, 2001
6245189 High Throughput plasma treatment system Jun. 12, 2001
6238513 Wafer lift assembly May. 29, 2001
6231716 Processing chamber with rapid wafer exchange May. 15, 2001
6221781 Combined process chamber with multi-positionable pedestal Apr. 24, 2001
6187132 Substrate treatment device and substrate transporting method Feb. 13, 2001
6182602 Inductively coupled HDP-CVD reactor Feb. 6, 2001
6174370 Semiconductor wafer chucking device and method for stripping semiconductor wafer Jan. 16, 2001
6156154 Apparatus for etching discs and pallets prior to sputter deposition Dec. 5, 2000
6146504 Substrate support and lift apparatus and method Nov. 14, 2000
6139682 Processing apparatus for manufacturing semiconductors Oct. 31, 2000
6120609 Self-aligning lift mechanism Sep. 19, 2000
6080272 Method and apparatus for plasma etching a wafer Jun. 27, 2000
6051074 Thermal conditioning apparatus Apr. 18, 2000
6051098 Keyboard etching apparatus Apr. 18, 2000
6036784 Apparatus for holding substrates Mar. 14, 2000
5993595 Ozone asher Nov. 30, 1999
5972163 Plasma cleaning device for substrate Oct. 26, 1999
5958134 Process equipment with simultaneous or sequential deposition and etching capabilities Sep. 28, 1999
5904799 Method and apparatus for improving etch uniformity in remote source plasma reactors with powered wafer chucks May. 18, 1999
5900062 Lift pin for dechucking substrates May. 4, 1999
5895549 Method and apparatus for etching film layers on large substrates Apr. 20, 1999
5882468 Thickness control of semiconductor device layers in reactive ion etch processes Mar. 16, 1999
5855679 Semiconductor manufacturing apparatus Jan. 5, 1999
5855687 Substrate support shield in wafer processing reactors Jan. 5, 1999
5820685 Wafer support device Oct. 13, 1998
5810935 Apparatus for transferring a wafer Sep. 22, 1998
5772833 Plasma etching apparatus Jun. 30, 1998
5766404 Methods and apparatus for plasma treatment of workpieces Jun. 16, 1998
5677824 Electrostatic chuck with mechanism for lifting up the peripheral of a substrate Oct. 14, 1997
5669977 Shape memory alloy lift pins for semiconductor processing equipment Sep. 23, 1997
5665167 Plasma treatment apparatus having a workpiece-side electrode grounding circuit Sep. 9, 1997

1 2 3 4 5










 
 
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