Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Tools & Hardware
Class Information
Number: 156/345.54
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With workpiece support > With means to move the workpiece inside the etching chamber
Description: Apparatus wherein the holding means produces movement of the workpiece.










Sub-classes under this class:

Class Number Class Name Patents
156/345.55 With means to cause rotary movement of the workpiece 220


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
7993457 Deposition sub-chamber with variable flow Aug. 9, 2011
7988816 Plasma processing apparatus and method Aug. 2, 2011
7988817 Lift pin driving device and a flat panel display manufacturing apparatus having same Aug. 2, 2011
7981219 System for plasma treating a plastic component Jul. 19, 2011
7935393 Method and system for improving sidewall coverage in a deposition system May. 3, 2011
7931776 Plasma processing apparatus Apr. 26, 2011
7927425 Power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same Apr. 19, 2011
7927473 Substrate holder, deposition method using substrate holder, hard disk manufacturing method, deposition apparatus, and program Apr. 19, 2011
7879151 Mask etch processing apparatus Feb. 1, 2011
7845310 Wide area radio frequency plasma apparatus for processing multiple substrates Dec. 7, 2010
7846255 Processing equipment for object to be processed Dec. 7, 2010
7837799 Arrangement for transporting a flat substrate in a vacuum chamber Nov. 23, 2010
7837798 Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support Nov. 23, 2010
7806985 Vacuum device where power supply mechanism is mounted and power supply method Oct. 5, 2010
7803246 Etching system Sep. 28, 2010
7789961 Delivery device comprising gas diffuser for thin film deposition Sep. 7, 2010
7789963 Chuck pedestal shield Sep. 7, 2010
7771536 Substrate processing apparatus Aug. 10, 2010
7749326 Chemical vapor deposition apparatus Jul. 6, 2010
7740768 Simultaneous front side ash and backside clean Jun. 22, 2010
7730898 Semiconductor wafer lifter Jun. 8, 2010
7699932 Reactors, systems and methods for depositing thin films onto microfeature workpieces Apr. 20, 2010
7674353 Apparatus to confine plasma and to enhance flow conductance Mar. 9, 2010
7670436 Support ring assembly Mar. 2, 2010
7670437 Mask and substrate alignment for solder bump process Mar. 2, 2010
7651583 Processing system and method for treating a substrate Jan. 26, 2010
7648579 Substrate support system for reduced autodoping and backside deposition Jan. 19, 2010
7645357 Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency Jan. 12, 2010
7618516 Method and apparatus to confine plasma and to enhance flow conductance Nov. 17, 2009
7601224 Method of supporting a substrate in a gas cushion susceptor system Oct. 13, 2009
7597531 Method of controlling mover device Oct. 6, 2009
7594479 Plasma CVD device and discharge electrode Sep. 29, 2009
7582167 Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support Sep. 1, 2009
7556712 Laser cleaning of backside of wafer for photolithographic processing Jul. 7, 2009
7537673 Plasma processing apparatus May. 26, 2009
7520969 Notched deposition ring Apr. 21, 2009
7513954 Plasma processing apparatus and substrate mounting table employed therein Apr. 7, 2009
7503980 Substrate supporting apparatus Mar. 17, 2009
7449071 Wafer holder with peripheral lift ring Nov. 11, 2008
7422655 Apparatus for performing semiconductor processing on target substrate Sep. 9, 2008
7422637 Processing chamber configured for uniform gas flow Sep. 9, 2008
7419551 Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another Sep. 2, 2008
7416632 Substrate processing apparatus and substrate processing method Aug. 26, 2008
7413612 In situ substrate holder leveling method and apparatus Aug. 19, 2008
7396432 Composite shadow ring assembled with dowel pins and method of using Jul. 8, 2008
7393433 Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof Jul. 1, 2008
7381276 Susceptor pocket with beveled projection sidewall Jun. 3, 2008
7371287 Substrate handling system May. 13, 2008
7347900 Chemical vapor deposition apparatus and method Mar. 25, 2008
7276123 Semiconductor-processing apparatus provided with susceptor and placing block Oct. 2, 2007

1 2 3 4 5










 
 
  Recently Added Patents
Dye-sensitized solar cell, dye-sensitized solar cell module, and coating liquid for forming electrolyte layer
Reduced sorbent utilization for circulating dry scrubbers
Tread portion of an automobile tire
Toy ball
Multi-carrier operation for wireless systems
Projection-type video-image display apparatus
Flash drive
  Randomly Featured Patents
Process gas supply unit
Compositions and methods for storing holographic data
Formation of flexible laminates by bonding a backing to a pre-coated substrate
Interchangeable lens barrel structure
Medicinal compositions containing aspirin
Dynamic RDF system for transferring initial data between source and destination volume wherein data maybe restored to either volume at same time other data is written
Nonvolatile semiconductor memory device
Leak detector
Ceiling fan blade
Apparatus for improving the degree of graphitization of carbon black, and its use