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Class Information
Number: 156/345.54
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With workpiece support > With means to move the workpiece inside the etching chamber
Description: Apparatus wherein the holding means produces movement of the workpiece.










Sub-classes under this class:

Class Number Class Name Patents
156/345.55 With means to cause rotary movement of the workpiece 220


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8702903 Thermally conductive sheet and substrate mounting device including same Apr. 22, 2014
8652260 Apparatus for holding semiconductor wafers Feb. 18, 2014
8641825 Substrate temperature regulation fixed apparatus Feb. 4, 2014
8623142 Coating apparatus Jan. 7, 2014
8617347 Vacuum processing chambers incorporating a moveable flow equalizer Dec. 31, 2013
8603249 Lift pin driving device and manufacturing apparatus having same Dec. 10, 2013
8591655 Apparatus for the preparation of film Nov. 26, 2013
8591754 Plasma processing apparatus and plasma processing method Nov. 26, 2013
8580037 Method of depositing materials on a non-planar surface Nov. 12, 2013
8562744 Coating device Oct. 22, 2013
8541309 Processing assembly for semiconductor workpiece and methods of processing same Sep. 24, 2013
8506713 Film deposition apparatus and film deposition method Aug. 13, 2013
8454750 Multi-station sequential curing of dielectric films Jun. 4, 2013
8445309 Anti-reflective photovoltaic module May. 21, 2013
8409355 Low profile process kit Apr. 2, 2013
8398775 Electrode and arrangement with movable shield Mar. 19, 2013
8398777 System and method for pedestal adjustment Mar. 19, 2013
8394233 Electrode orientation and parallelism adjustment mechanism for plasma processing systems Mar. 12, 2013
8388853 Non-contact substrate processing Mar. 5, 2013
8373086 Plasma processing apparatus and method for plasma processing Feb. 12, 2013
8349084 Apparatus and systems for intermixing cadmium sulfide layers and cadmium telluride layers for thin film photovoltaic devices Jan. 8, 2013
8349085 Substrate processing apparatus Jan. 8, 2013
8349128 Method and apparatus for stable plasma processing Jan. 8, 2013
8337622 Manufacturing apparatus and method for semiconductor device Dec. 25, 2012
8323413 Susceptor and semiconductor manufacturing apparatus including the same Dec. 4, 2012
RE43837 Substrate supporting apparatus Dec. 4, 2012
8313612 Method and apparatus for reduction of voltage potential spike during dechucking Nov. 20, 2012
8282767 Plasma processing apparatus Oct. 9, 2012
8257499 Vapor phase deposition apparatus and vapor phase deposition method Sep. 4, 2012
8257500 Transport apparatus for elongate substrates Sep. 4, 2012
8257547 Surface activation device Sep. 4, 2012
8257548 Electrode orientation and parallelism adjustment mechanism for plasma processing systems Sep. 4, 2012
8226770 Susceptor with backside area of constant emissivity Jul. 24, 2012
8222119 Apparatus and method of temperature control during cleaving processes of thick materials Jul. 17, 2012
8216422 Substrate support bushing Jul. 10, 2012
8216376 Method and apparatus for variable conductance Jul. 10, 2012
8211230 Reaction system for growing a thin film Jul. 3, 2012
8152924 CVD reactor comprising a gas inlet member Apr. 10, 2012
8137465 Single-chamber sequential curing of semiconductor wafers Mar. 20, 2012
8124907 Load lock chamber with decoupled slit valve door seal compartment Feb. 28, 2012
8110045 Processing equipment for object to be processed Feb. 7, 2012
8088225 Substrate support system for reduced autodoping and backside deposition Jan. 3, 2012
8052887 Substrate processing apparatus Nov. 8, 2011
8048228 Masking apparatus and method of fabricating electronic component Nov. 1, 2011
8021487 Wafer carrier with hub Sep. 20, 2011
8021513 Substrate carrying apparatus and substrate carrying method Sep. 20, 2011
8016974 Plasma treatment apparatus Sep. 13, 2011
8016975 Etching system Sep. 13, 2011
7997227 Vacuum coater device and mechanism for supporting and manipulating workpieces in same Aug. 16, 2011
7993456 Device for carrying out a surface treatment of substrates under vacuum Aug. 9, 2011

1 2 3 4 5










 
 
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