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Class Information
Number: 156/345.52
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With workpiece support > With means to heat the workpiece support
Description: Apparatus wherein the holding means includes a heating device to heat the holding means.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7147719 |
Double slit-valve doors for plasma processing |
Dec. 12, 2006 |
| 7108753 |
Staggered ribs on process chamber to reduce thermal effects |
Sep. 19, 2006 |
| 7087119 |
Atomic layer deposition with point of use generated reactive gas species |
Aug. 8, 2006 |
| 7077913 |
Apparatus for fabricating a semiconductor device |
Jul. 18, 2006 |
| 7077912 |
Semiconductor manufacturing system |
Jul. 18, 2006 |
| 7070661 |
Uniform gas cushion wafer support |
Jul. 4, 2006 |
| 7070660 |
Wafer holder with stiffening rib |
Jul. 4, 2006 |
| 7067012 |
CVD coating device |
Jun. 27, 2006 |
| 7067178 |
Substrate table, production method therefor and plasma treating device |
Jun. 27, 2006 |
| 7048802 |
CVD reactor with graphite-foam insulated, tubular susceptor |
May. 23, 2006 |
| 7033445 |
Gridded susceptor |
Apr. 25, 2006 |
| 7033444 |
Plasma processing apparatus, and electrode structure and table structure of processing apparatus |
Apr. 25, 2006 |
| 7033443 |
Gas-cooled clamp for RTP |
Apr. 25, 2006 |
| 7025858 |
Apparatus for supporting wafer in semiconductor process |
Apr. 11, 2006 |
| 7017658 |
Heat processing device |
Mar. 28, 2006 |
| 7011712 |
Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof |
Mar. 14, 2006 |
| 6997993 |
Susceptor supporting construction |
Feb. 14, 2006 |
| 6991701 |
Plasma treatment method and apparatus |
Jan. 31, 2006 |
| 6979369 |
Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof |
Dec. 27, 2005 |
| 6960263 |
Shadow frame with cross beam for semiconductor equipment |
Nov. 1, 2005 |
| 6958098 |
Semiconductor wafer support lift-pin assembly |
Oct. 25, 2005 |
| 6955741 |
Semiconductor-processing reaction chamber |
Oct. 18, 2005 |
| 6951587 |
Ceramic heater system and substrate processing apparatus having the same installed therein |
Oct. 4, 2005 |
| 6936134 |
Substrate processing apparatus and substrate processing method |
Aug. 30, 2005 |
| 6932873 |
Managing work-piece deflection |
Aug. 23, 2005 |
| 6926803 |
Confinement ring support assembly |
Aug. 9, 2005 |
| 6921724 |
Variable temperature processes for tunable electrostatic chuck |
Jul. 26, 2005 |
| 6920915 |
Apparatus and method for cooling a semiconductor substrate |
Jul. 26, 2005 |
| 6907924 |
Thermally conductive chuck for vacuum processor |
Jun. 21, 2005 |
| 6902622 |
Systems and methods for epitaxially depositing films on a semiconductor substrate |
Jun. 7, 2005 |
| 6902623 |
Reactor having a movable shutter |
Jun. 7, 2005 |
| 6899789 |
Method of holding substrate and substrate holding system |
May. 31, 2005 |
| 6896764 |
Vacuum processing apparatus and control method thereof |
May. 24, 2005 |
| 6896738 |
Induction heating devices and methods for controllably heating an article |
May. 24, 2005 |
| 6893507 |
Self-centering wafer support system |
May. 17, 2005 |
| 6887317 |
Reduced friction lift pin |
May. 3, 2005 |
| 6887315 |
Vacuum plate having a symmetrical air-load block |
May. 3, 2005 |
| 6887316 |
Ceramic heater |
May. 3, 2005 |
| 6884319 |
Susceptor of apparatus for manufacturing semiconductor device |
Apr. 26, 2005 |
| 6878211 |
Supporting structure for a ceramic susceptor |
Apr. 12, 2005 |
| 6878210 |
Surface-treating holder having tubular structure and method using the same |
Apr. 12, 2005 |
| 6869500 |
Method for processing a wafer and apparatus for performing the same |
Mar. 22, 2005 |
| 6866094 |
Temperature-controlled chuck with recovery of circulating temperature control fluid |
Mar. 15, 2005 |
| 6863734 |
Substrate processing apparatus and method for manufacturing semiconductor device |
Mar. 8, 2005 |
| 6860965 |
High throughput architecture for semiconductor processing |
Mar. 1, 2005 |
| 6846364 |
Heater block having catalyst spray means |
Jan. 25, 2005 |
| 6830622 |
Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof |
Dec. 14, 2004 |
| 6828243 |
Apparatus and method for plasma treatment |
Dec. 7, 2004 |
| 6811614 |
CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream |
Nov. 2, 2004 |
| 6805749 |
Method and apparatus for supporting a semiconductor wafer during processing |
Oct. 19, 2004 |
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