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Class Information
Number: 156/345.5
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With means for photochemical energization of a gas using ultraviolet, visible, or x-ray radiation
Description: Apparatus including means to energize a gas through absorption of ultraviolet, visible, or x-ray radiation to render it effective as an etchant gas.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7435983 |
Device for injecting electromagnetic radiation into a reactor |
Oct. 14, 2008 |
| 7332731 |
Radiation system and lithographic apparatus |
Feb. 19, 2008 |
| 7323060 |
Substrate treating apparatus |
Jan. 29, 2008 |
| 7297895 |
Apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition |
Nov. 20, 2007 |
| 7270724 |
Scanning plasma reactor |
Sep. 18, 2007 |
| 7230258 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source |
Jun. 12, 2007 |
| 7182819 |
Methods for cleaning a chamber of semiconductor device manufacturing equipment |
Feb. 27, 2007 |
| 7166186 |
Laser decapsulation apparatus and method |
Jan. 23, 2007 |
| 7087119 |
Atomic layer deposition with point of use generated reactive gas species |
Aug. 8, 2006 |
| 7025831 |
Apparatus for surface conditioning |
Apr. 11, 2006 |
| 7001481 |
Method and system providing high flux of point of use activated reactive species for semiconductor processing |
Feb. 21, 2006 |
| 6968850 |
In-situ cleaning of light source collector optics |
Nov. 29, 2005 |
| 6949147 |
In situ module for particle removal from solid-state surfaces |
Sep. 27, 2005 |
| 6926801 |
Laser machining method and apparatus |
Aug. 9, 2005 |
| 6890387 |
Method and device for correcting pattern film on a semiconductor substrate |
May. 10, 2005 |
| 6878303 |
Substrate processing apparatus and substrate processing method |
Apr. 12, 2005 |
| 6866721 |
Apparatus and method for photo-induced process |
Mar. 15, 2005 |
| 6858695 |
Curable hot melt adhesive for casemaking |
Feb. 22, 2005 |
| 6833047 |
Alarm apparatus for exchanging lamps of wafer etching equipment |
Dec. 21, 2004 |
| 6821906 |
Method and apparatus for treating surface of substrate plate |
Nov. 23, 2004 |
| 6805751 |
Method and apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition |
Oct. 19, 2004 |
| 6752900 |
Vacuum loadlock ultraviolet bake for plasma etch |
Jun. 22, 2004 |
| 6726805 |
Pedestal with integral shield |
Apr. 27, 2004 |
| 6648973 |
Process for the treatment of a fiber |
Nov. 18, 2003 |
| 6610169 |
Semiconductor processing system and method |
Aug. 26, 2003 |
| 6537422 |
Single-substrate-heat-processing apparatus for semiconductor process |
Mar. 25, 2003 |
| 6467491 |
Processing apparatus and processing method |
Oct. 22, 2002 |
| 6464793 |
Semiconductor crystal growth apparatus |
Oct. 15, 2002 |
| 6461437 |
Apparatus used for fabricating liquid crystal device and method of fabricating the same |
Oct. 8, 2002 |
| 6450116 |
Apparatus for exposing a substrate to plasma radicals |
Sep. 17, 2002 |
| 6348125 |
Removal of copper oxides from integrated interconnects |
Feb. 19, 2002 |
| 6287413 |
Apparatus for processing both sides of a microelectronic device precursor |
Sep. 11, 2001 |
| 6190458 |
Apparatus for eliminating impurities by ozone generated in space above substrate surface and film forming method and system therewith |
Feb. 20, 2001 |
| 6187133 |
Gas manifold for uniform gas distribution and photochemistry |
Feb. 13, 2001 |
| 6165273 |
Equipment for UV wafer heating and photochemistry |
Dec. 26, 2000 |
| 6123803 |
Laser processing chamber with cassette cell |
Sep. 26, 2000 |
| 6098637 |
In situ cleaning of the surface inside a vacuum processing chamber |
Aug. 8, 2000 |
| 6095085 |
Photo-assisted remote plasma apparatus and method |
Aug. 1, 2000 |
| 6015759 |
Surface modification of semiconductors using electromagnetic radiation |
Jan. 18, 2000 |
| 6015503 |
Method and apparatus for surface conditioning |
Jan. 18, 2000 |
| 5753886 |
Plasma treatment apparatus and method |
May. 19, 1998 |
| 5647946 |
Structure and method including dry etching techniques for forming an array of thermal sensitive elements |
Jul. 15, 1997 |
| 5580421 |
Apparatus for surface conditioning |
Dec. 3, 1996 |
| 5563416 |
Processing apparatus using fast atom beam |
Oct. 8, 1996 |
| 5547642 |
Light ozone asher, light ashing method, and manufacturing method of semiconductor device |
Aug. 20, 1996 |
| 5531857 |
Removal of surface contaminants by irradiation from a high energy source |
Jul. 2, 1996 |
| 5478401 |
Apparatus and method for surface treatment |
Dec. 26, 1995 |
| 5443676 |
Method and apparatus for etching round templates |
Aug. 22, 1995 |
| 5419798 |
Suppression of graphite formation during laser etching of diamond |
May. 30, 1995 |
| 5413664 |
Apparatus for preparing a semiconductor device, photo treatment apparatus, pattern forming apparatus and fabrication apparatus |
May. 9, 1995 |
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