Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Tools & Hardware
Class Information
Number: 156/345.46
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > Having glow discharge electrode gas energizing means > With magnetic field generating means for control of the etchant gas
Description: Apparatus including means for creating a magnetic field for control of the etchant gas.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8652342 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Feb. 18, 2014
8622021 High lifetime consumable silicon nitride-silicon dioxide plasma processing components Jan. 7, 2014
8617351 Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction Dec. 31, 2013
8617352 Electrode assembly for the removal of surface oxides by electron attachment Dec. 31, 2013
8573152 Showerhead electrode Nov. 5, 2013
8547085 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber Oct. 1, 2013
8496781 Plasma processing apparatus Jul. 30, 2013
8486242 Deposition apparatus and methods to reduce deposition asymmetry Jul. 16, 2013
8470126 Wiggling control for pseudo-hardmask Jun. 25, 2013
8449715 Internal member of a plasma processing vessel May. 28, 2013
8418649 Composite showerhead electrode assembly for a plasma processing apparatus Apr. 16, 2013
8402918 Showerhead electrode with centering feature Mar. 26, 2013
8382939 Plasma processing chamber with enhanced gas delivery Feb. 26, 2013
8298381 Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering Oct. 30, 2012
8272346 Gasket with positioning feature for clamped monolithic showerhead electrode Sep. 25, 2012
8267041 Plasma treating apparatus Sep. 18, 2012
8262848 Plasma processing apparatus and method Sep. 11, 2012
8251012 Substrate processing apparatus and semiconductor device producing method Aug. 28, 2012
8246798 Substrate processing apparatus and apparatus and method of manufacturing magnetic device Aug. 21, 2012
8197637 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Jun. 12, 2012
8186300 Plasma processing apparatus May. 29, 2012
8114245 Plasma etching device Feb. 14, 2012
8092640 Plasma processing apparatus and semiconductor device manufactured by the same apparatus Jan. 10, 2012
8092605 Magnetic confinement of a plasma Jan. 10, 2012
8048328 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor Nov. 1, 2011
8034212 Magnetron plasma processing apparatus Oct. 11, 2011
8028654 Planar controlled zone microwave plasma system Oct. 4, 2011
8007633 Surface processing apparatus Aug. 30, 2011
7988816 Plasma processing apparatus and method Aug. 2, 2011
7972469 Plasma processing apparatus Jul. 5, 2011
7955986 Capacitively coupled plasma reactor with magnetic plasma control Jun. 7, 2011
7951261 Plasma etching apparatus May. 31, 2011
7942112 Method and apparatus for preventing the formation of a plasma-inhibiting substance May. 17, 2011
7922865 Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator Apr. 12, 2011
7883601 Apparatus and method for controlling relative particle speeds in a plasma Feb. 8, 2011
7883633 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor Feb. 8, 2011
7879186 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor Feb. 1, 2011
7846293 Plasma processing apparatus and method Dec. 7, 2010
7828927 Plasma processing device Nov. 9, 2010
7824520 Plasma treatment apparatus Nov. 2, 2010
7806985 Vacuum device where power supply mechanism is mounted and power supply method Oct. 5, 2010
7789992 Neutral beam etching device for separating and accelerating plasma Sep. 7, 2010
7780814 Wafer pre-clean reactor cable termination for selective suppression/reflection of source and bias frequency cross products Aug. 24, 2010
7779783 Plasma processing device Aug. 24, 2010
7757633 Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma Jul. 20, 2010
7686918 Magnetron plasma processing apparatus Mar. 30, 2010
7601241 Plasma processing apparatus and plasma processing method Oct. 13, 2009
7585385 Plasma processing apparatus, control method thereof and program for performing same Sep. 8, 2009
7582185 Plasma-processing apparatus Sep. 1, 2009
7575638 Apparatus for defining regions of process exclusion and process performance in a process chamber Aug. 18, 2009

1 2 3 4 5










 
 
  Recently Added Patents
Method and system for shared high speed cache in SAS switches
Horizontal cable manager
Jacket liner
Semiconductor device and method of manufacturing the same
Multi-mode 3-dimensional image display apparatus
Method for producing carrier on which microorganisms capable of conducting multiple parallel mineralization are immobilized, column reactor and solid medium for cultivating plants
Method of motion correction in optical coherence tomography imaging
  Randomly Featured Patents
Imidazolothiadiazoles for use as protein kinase inhibitors
Pharmaceutical compositions of drugs and neutralized acidic polymers
Thermal transformation of metal chlorides to oxides in a fluidized bed
Method for transferring cigarette pieces
Locking device for a casing containing pyrotechnic materials
Method and system for improving performance of broadcast/multicast transmissions
Method and apparatus for performing spatial-division multiple access
Injection molding nozzle seal
Potato .alpha.-amylase
Receptor holding device