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Class Information
Number: 156/345.45
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > Having glow discharge electrode gas energizing means > Including more than two electrodes (e.g., triode reactors)
Description: Apparatus including three or more glow discharge electrodes.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8702902 Device for generating a plasma discharge for patterning the surface of a substrate Apr. 22, 2014
8652298 Triode reactor design with multiple radiofrequency powers Feb. 18, 2014
8652342 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Feb. 18, 2014
8629370 Assembly for delivering RF power and DC voltage to a plasma processing chamber Jan. 14, 2014
8622021 High lifetime consumable silicon nitride-silicon dioxide plasma processing components Jan. 7, 2014
8617352 Electrode assembly for the removal of surface oxides by electron attachment Dec. 31, 2013
8613827 Plasma treatment system Dec. 24, 2013
8580079 Electrode carrier assemblies Nov. 12, 2013
8573152 Showerhead electrode Nov. 5, 2013
8547085 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber Oct. 1, 2013
8536071 Gasket with positioning feature for clamped monolithic showerhead electrode Sep. 17, 2013
8528498 Integrated steerability array arrangement for minimizing non-uniformity Sep. 10, 2013
8500952 Plasma confinement rings having reduced polymer deposition characteristics Aug. 6, 2013
8496781 Plasma processing apparatus Jul. 30, 2013
8491750 Adjustable confinement ring assembly Jul. 23, 2013
8480850 Plasma treatment system Jul. 9, 2013
8470126 Wiggling control for pseudo-hardmask Jun. 25, 2013
8453600 Substrate processing apparatus Jun. 4, 2013
8449715 Internal member of a plasma processing vessel May. 28, 2013
8443756 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses May. 21, 2013
8418649 Composite showerhead electrode assembly for a plasma processing apparatus Apr. 16, 2013
8419960 Plasma processing apparatus and method Apr. 16, 2013
8402918 Showerhead electrode with centering feature Mar. 26, 2013
8397668 Plasma processing apparatus Mar. 19, 2013
8382939 Plasma processing chamber with enhanced gas delivery Feb. 26, 2013
8372238 Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes Feb. 12, 2013
8349126 Apparatus for etching edge of wafer Jan. 8, 2013
8343307 Showerhead assembly Jan. 1, 2013
8308969 Plasma system for improved process capability Nov. 13, 2012
8272346 Gasket with positioning feature for clamped monolithic showerhead electrode Sep. 25, 2012
8267041 Plasma treating apparatus Sep. 18, 2012
8261692 Substrate processing apparatus and reaction container Sep. 11, 2012
8251012 Substrate processing apparatus and semiconductor device producing method Aug. 28, 2012
8197637 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Jun. 12, 2012
8186300 Plasma processing apparatus May. 29, 2012
8176871 Substrate processing apparatus May. 15, 2012
8137501 Bevel clean device Mar. 20, 2012
8114245 Plasma etching device Feb. 14, 2012
8092640 Plasma processing apparatus and semiconductor device manufactured by the same apparatus Jan. 10, 2012
8069817 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses Dec. 6, 2011
8047158 Substrate processing apparatus and reaction container Nov. 1, 2011
8033245 Substrate support bushing Oct. 11, 2011
8028654 Planar controlled zone microwave plasma system Oct. 4, 2011
7992518 Silicon carbide gas distribution plate and RF electrode for plasma etch chamber Aug. 9, 2011
7988816 Plasma processing apparatus and method Aug. 2, 2011
7951261 Plasma etching apparatus May. 31, 2011
7942112 Method and apparatus for preventing the formation of a plasma-inhibiting substance May. 17, 2011
7922880 Method and apparatus for increasing local plasma density in magnetically confined plasma Apr. 12, 2011
7901540 Dense fluid delivery apparatus Mar. 8, 2011
7886687 Plasma processing apparatus Feb. 15, 2011

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