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Class Information
Number: 156/345.42
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With microwave gas energizing means > With magnetic field generating means for control of the etchant gas
Description: Apparatus including means for creating a magnetic field for control of the etchant gas.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8635972 Device for forming a film by deposition from a plasma Jan. 28, 2014
8622021 High lifetime consumable silicon nitride-silicon dioxide plasma processing components Jan. 7, 2014
8578879 Apparatus for VHF impedance match tuning Nov. 12, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8513137 Plasma processing apparatus and plasma processing method Aug. 20, 2013
8486242 Deposition apparatus and methods to reduce deposition asymmetry Jul. 16, 2013
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device Jul. 16, 2013
8440051 Plasma processing chamber for bevel edge processing May. 14, 2013
8343308 Ceiling plate and plasma process apparatus Jan. 1, 2013
8298372 Quartz window having gas feed and processing equipment incorporating same Oct. 30, 2012
8273210 Plasma processing apparatus and method for adjusting plasma density distribution Sep. 25, 2012
8267040 Plasma processing apparatus and plasma processing method Sep. 18, 2012
8262844 Plasma processing apparatus, plasma processing method and storage medium Sep. 11, 2012
8246798 Substrate processing apparatus and apparatus and method of manufacturing magnetic device Aug. 21, 2012
8092605 Magnetic confinement of a plasma Jan. 10, 2012
8075732 EUV collector debris management Dec. 13, 2011
8075733 Plasma processing apparatus Dec. 13, 2011
8021514 Remote plasma source for pre-treatment of substrates prior to deposition Sep. 20, 2011
7922865 Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator Apr. 12, 2011
7828927 Plasma processing device Nov. 9, 2010
7789992 Neutral beam etching device for separating and accelerating plasma Sep. 7, 2010
7779783 Plasma processing device Aug. 24, 2010
7585385 Plasma processing apparatus, control method thereof and program for performing same Sep. 8, 2009
7582569 Distributor and distributing method, plasma processing system and method, and process for fabricating LCD Sep. 1, 2009
7527713 Variable quadruple electromagnet array in plasma processing May. 5, 2009
7506609 System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber Mar. 24, 2009
7493869 Very large area/volume microwave ECR plasma and ion source Feb. 24, 2009
7485204 ECR plasma source and ECR plasma device Feb. 3, 2009
7478609 Plasma process apparatus and its processor Jan. 20, 2009
7458335 Uniform magnetically enhanced reactive ion etching using nested electromagnetic coils Dec. 2, 2008
7444955 Apparatus for directing plasma flow to coat internal passageways Nov. 4, 2008
7430985 Plasma processing equipment Oct. 7, 2008
7392760 Microwave-excited plasma processing apparatus Jul. 1, 2008
7338575 Hydrocarbon dielectric heat transfer fluids for microwave plasma generators Mar. 4, 2008
7323080 Apparatus for treating substrate Jan. 29, 2008
7320331 In-situ plasma cleaning device for cylindrical surfaces Jan. 22, 2008
7320941 Plasma stabilization method and plasma apparatus Jan. 22, 2008
7316199 Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber Jan. 8, 2008
7305935 Slotted antenna waveguide plasma source Dec. 11, 2007
7296533 Radial antenna and plasma device using it Nov. 20, 2007
7288485 Device and method for anisotropic plasma etching of a substrate, particularly a silicon element Oct. 30, 2007
7243610 Plasma device and plasma generating method Jul. 17, 2007
7234413 Plasma processing apparatus Jun. 26, 2007
7226524 Plasma processing apparatus Jun. 5, 2007
7214903 Melting and vaporizing apparatus and method May. 8, 2007
7210424 High-density plasma processing apparatus May. 1, 2007
7171919 Diamond film depositing apparatus using microwaves and plasma Feb. 6, 2007
7161110 Melting and vaporizing apparatus and method Jan. 9, 2007
7156046 Plasma CVD apparatus Jan. 2, 2007
7067034 Method and apparatus for plasma forming inner magnetic bucket to control a volume of a plasma Jun. 27, 2006

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