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Class Information
Number: 156/345.41
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With microwave gas energizing means
Description: Apparatus including means for energizing a gas by microwave excitation to render it effective as an etchant gas.

Sub-classes under this class:

Class Number Class Name Patents
156/345.42 With magnetic field generating means for control of the etchant gas 194

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8662011 Apparatus for carrying out plasma chemical vapour deposition and method of manufacturing an optical preform Mar. 4, 2014
8641862 High dose implantation strip (HDIS) in H2 base chemistry Feb. 4, 2014
8622021 High lifetime consumable silicon nitride-silicon dioxide plasma processing components Jan. 7, 2014
8623171 Plasma processing apparatus Jan. 7, 2014
8608901 Process chamber cleaning method in substrate processing apparatus, substrate processing apparatus, and substrate processing method Dec. 17, 2013
8610353 Plasma generating apparatus, plasma processing apparatus and plasma processing method Dec. 17, 2013
8603402 Microwave-excited plasma device Dec. 10, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8578879 Apparatus for VHF impedance match tuning Nov. 12, 2013
8573151 Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window Nov. 5, 2013
8568556 Plasma processing apparatus and method for using plasma processing apparatus Oct. 29, 2013
8513137 Plasma processing apparatus and plasma processing method Aug. 20, 2013
8491752 Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism Jul. 23, 2013
8485127 Processing apparatus Jul. 16, 2013
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device Jul. 16, 2013
8480848 Plasma processing apparatus Jul. 9, 2013
8419854 Film-forming apparatus Apr. 16, 2013
8387560 Plasma processing unit Mar. 5, 2013
8382940 Device and method for producing chlorine trifluoride and system for etching semiconductor substrates using this device Feb. 26, 2013
8377254 Plasma processing apparatus Feb. 19, 2013
8360003 Plasma reactor with uniform process rate distribution by improved RF ground return path Jan. 29, 2013
8343308 Ceiling plate and plasma process apparatus Jan. 1, 2013
8327795 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus Dec. 11, 2012
8316797 Microwave plasma reactors Nov. 27, 2012
8308897 Plasma processing apparatus and plasma processing method Nov. 13, 2012
8308898 Tuner and microwave plasma source Nov. 13, 2012
8307781 Surface wave excitation plasma CVD system Nov. 13, 2012
8293067 Microwave plasma processing device and gate valve for microwave plasma processing device Oct. 23, 2012
8276540 Method and system for introducing process fluid through a chamber component Oct. 2, 2012
8273210 Plasma processing apparatus and method for adjusting plasma density distribution Sep. 25, 2012
8267040 Plasma processing apparatus and plasma processing method Sep. 18, 2012
8267042 Plasma processing apparatus and plasma processing method Sep. 18, 2012
8262844 Plasma processing apparatus, plasma processing method and storage medium Sep. 11, 2012
8241457 Plasma processing system, plasma measurement system, plasma measurement method, and plasma control system Aug. 14, 2012
8216420 Plasma processing apparatus Jul. 10, 2012
8171880 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus May. 8, 2012
8163128 Plasma processing apparatus Apr. 24, 2012
8136479 Plasma treatment apparatus and plasma treatment method Mar. 20, 2012
8133348 Plasma generating apparatus and plasma treatment apparatus Mar. 13, 2012
8128783 Plasma generator and work processing apparatus provided with the same Mar. 6, 2012
8100082 Method and system for introducing process fluid through a chamber component Jan. 24, 2012
8091506 High velocity method for depositing diamond films from a gaseous phase in SHF discharge plasma and a plasma reactor for carrying out said method Jan. 10, 2012
8092642 Plasma processing apparatus Jan. 10, 2012
8075733 Plasma processing apparatus Dec. 13, 2011
8052799 By-product collecting processes for cleaning processes Nov. 8, 2011
8039772 Microwave resonance plasma generating apparatus and plasma processing system having the same Oct. 18, 2011
8020513 Cooled device for plasma depositing a barrier layer onto a container Sep. 20, 2011
8006640 Plasma processing apparatus and plasma processing method Aug. 30, 2011
8006641 Installation for depositing, by means of a microwave plasma, an internal barrier coating in thermoplastic containers Aug. 30, 2011
7998307 Electron beam enhanced surface wave plasma source Aug. 16, 2011

1 2 3 4 5 6

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