| |
 |
|
Class Information
Number: 156/345.41
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With microwave gas energizing means
Description: Apparatus including means for energizing a gas by microwave excitation to render it effective as an etchant gas.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7603963 |
Controlled zone microwave plasma system |
Oct. 20, 2009 |
| 7605063 |
Photoresist stripping chamber and methods of etching photoresist on substrates |
Oct. 20, 2009 |
| 7592564 |
Plasma generation and processing with multiple radiation sources |
Sep. 22, 2009 |
| 7584714 |
Method and system for improving coupling between a surface wave plasma source and a plasma space |
Sep. 8, 2009 |
| 7581511 |
Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
Sep. 1, 2009 |
| 7574974 |
Device for production of a plasma sheet |
Aug. 18, 2009 |
| 7562638 |
Methods and arrangement for implementing highly efficient plasma traps |
Jul. 21, 2009 |
| 7560657 |
Plasma-assisted processing in a manufacturing line |
Jul. 14, 2009 |
| 7544269 |
Method and apparatus for electron density measurement |
Jun. 9, 2009 |
| 7533628 |
Volume-optimized reactor for simultaneously coating eyeglasses on both sides |
May. 19, 2009 |
| 7527706 |
Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
May. 5, 2009 |
| 7520245 |
Plasma processing apparatus |
Apr. 21, 2009 |
| 7506609 |
System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber |
Mar. 24, 2009 |
| 7497922 |
Plasma-assisted gas production |
Mar. 3, 2009 |
| 7493869 |
Very large area/volume microwave ECR plasma and ion source |
Feb. 24, 2009 |
| 7485204 |
ECR plasma source and ECR plasma device |
Feb. 3, 2009 |
| 7478609 |
Plasma process apparatus and its processor |
Jan. 20, 2009 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7445690 |
Plasma processing apparatus |
Nov. 4, 2008 |
| 7446048 |
Dry etching apparatus and dry etching method |
Nov. 4, 2008 |
| 7442272 |
Apparatus for manufacturing semiconductor device |
Oct. 28, 2008 |
| 7442271 |
Miniature microwave plasma torch application and method of use thereof |
Oct. 28, 2008 |
| 7430985 |
Plasma processing equipment |
Oct. 7, 2008 |
| 7410552 |
Electron cyclotron resonance equipment with variable flare angle of horn antenna |
Aug. 12, 2008 |
| 7396431 |
Plasma processing system for treating a substrate |
Jul. 8, 2008 |
| 7395779 |
Plasma processing apparatus |
Jul. 8, 2008 |
| 7392760 |
Microwave-excited plasma processing apparatus |
Jul. 1, 2008 |
| 7381290 |
Microwave plasma generator |
Jun. 3, 2008 |
| 7338575 |
Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
Mar. 4, 2008 |
| 7325511 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus |
Feb. 5, 2008 |
| 7311796 |
Plasma processing apparatus |
Dec. 25, 2007 |
| 7305935 |
Slotted antenna waveguide plasma source |
Dec. 11, 2007 |
| 7305934 |
Plasma treatment apparatus and plasma generation method |
Dec. 11, 2007 |
| 7302910 |
Plasma apparatus and production method thereof |
Dec. 4, 2007 |
| 7296533 |
Radial antenna and plasma device using it |
Nov. 20, 2007 |
| 7288166 |
Plasma processing apparatus |
Oct. 30, 2007 |
| 7279066 |
Apparatus for forming silicon oxide film |
Oct. 9, 2007 |
| 7276135 |
Vacuum plasma processor including control in response to DC bias voltage |
Oct. 2, 2007 |
| 7243610 |
Plasma device and plasma generating method |
Jul. 17, 2007 |
| 7234413 |
Plasma processing apparatus |
Jun. 26, 2007 |
| 7226524 |
Plasma processing apparatus |
Jun. 5, 2007 |
| 7210424 |
High-density plasma processing apparatus |
May. 1, 2007 |
| 7171919 |
Diamond film depositing apparatus using microwaves and plasma |
Feb. 6, 2007 |
| 7166200 |
Method and apparatus for an improved upper electrode plate in a plasma processing system |
Jan. 23, 2007 |
| 7156046 |
Plasma CVD apparatus |
Jan. 2, 2007 |
| 7141756 |
Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method |
Nov. 28, 2006 |
| 7140321 |
Plasma processing apparatus and method |
Nov. 28, 2006 |
| 7128805 |
Multiple elliptical ball plasma apparatus |
Oct. 31, 2006 |
| 7115184 |
Plasma processing device |
Oct. 3, 2006 |
| 7097782 |
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semic |
Aug. 29, 2006 |
|
|
|
