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Class Information
Number: 156/345.39
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With means to generate and to direct a reactive ion etchant beam at a workpiece
Description: Apparatus including a means to create an ion beam of reactive etchant species and to direct the beam to the workpiece.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8664561 System and method for selectively controlling ion composition of ion sources Mar. 4, 2014
8530006 Localized plasma processing Sep. 10, 2013
8328981 Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated Dec. 11, 2012
8211322 Method of forming a metal layer pattern having a nanogap and method of manufacturing a molecule-sized device using the same Jul. 3, 2012
8202440 Methods and apparatus for electron beam assisted etching at low temperatures Jun. 19, 2012
8142607 High density helicon plasma source for wide ribbon ion beam generation Mar. 27, 2012
8092605 Magnetic confinement of a plasma Jan. 10, 2012
8087379 Localized plasma processing Jan. 3, 2012
8075732 EUV collector debris management Dec. 13, 2011
8057600 Method and apparatus for an improved baffle plate in a plasma processing system Nov. 15, 2011
7901540 Dense fluid delivery apparatus Mar. 8, 2011
7897008 Apparatus and method for regional plasma control Mar. 1, 2011
7850864 Plasma treating apparatus and plasma treating method Dec. 14, 2010
7789992 Neutral beam etching device for separating and accelerating plasma Sep. 7, 2010
7771602 Method and apparatus for manufacturing magnetic recording media Aug. 10, 2010
7748344 Segmented resonant antenna for radio frequency inductively coupled plasmas Jul. 6, 2010
7695598 Coater having substrate cleaning device and coating deposition methods employing such coater Apr. 13, 2010
7695590 Chemical vapor deposition plasma reactor having plural ion shower grids Apr. 13, 2010
7682982 Plasma processing apparatus and control method thereof Mar. 23, 2010
7560712 Ion implanter with etch prevention member(s) Jul. 14, 2009
7507313 Film removal method and apparatus Mar. 24, 2009
7371689 Backside unlayering of MOSFET devices for electrical and physical characterization May. 13, 2008
7354500 Mask and apparatus using it to prepare sample by ion milling Apr. 8, 2008
7345288 Sample holder and ion-beam processing system Mar. 18, 2008
7323080 Apparatus for treating substrate Jan. 29, 2008
7304263 Systems and methods utilizing an aperture with a reactive atom plasma torch Dec. 4, 2007
7288173 Ion beam processing system and ion beam processing method Oct. 30, 2007
7276140 Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same Oct. 2, 2007
7264741 Coater having substrate cleaning device and coating deposition methods employing such coater Sep. 4, 2007
7241360 Method and apparatus for neutralization of ion beam using AC ion source Jul. 10, 2007
7109487 Particle beam device Sep. 19, 2006
7100532 Plasma production device and method and RF driver circuit with adjustable duty cycle Sep. 5, 2006
7094312 Focused particle beam systems and methods using a tilt column Aug. 22, 2006
7015146 Method of processing backside unlayering of MOSFET devices for electrical and physical characterization including a collimated ion plasma Mar. 21, 2006
7005032 Wafer table for local dry etching apparatus Feb. 28, 2006
6989228 Method and apparatus for processing samples Jan. 24, 2006
6983718 Electron beam physical vapor deposition apparatus Jan. 10, 2006
6949147 In situ module for particle removal from solid-state surfaces Sep. 27, 2005
6926799 Etching apparatus using neutral beam Aug. 9, 2005
6905969 Plasma etch reactor and method Jun. 14, 2005
6878898 Method for improving ash rate uniformity in photoresist ashing process equipment Apr. 12, 2005
6874443 Layer-by-layer etching apparatus using neutral beam and etching method using the same Apr. 5, 2005
6863835 Magnetic barrier for plasma in chamber exhaust Mar. 8, 2005
6861643 Neutral particle beam processing apparatus Mar. 1, 2005
6858838 Neutral particle beam processing apparatus Feb. 22, 2005
6843893 Metal dry etch using electronic field Jan. 18, 2005
6827816 In situ module for particle removal from solid-state surfaces Dec. 7, 2004
6809066 Ion texturing methods and articles Oct. 26, 2004
6780341 Apparatus and method for enhancing the uniform etching capability of an ion beam grid Aug. 24, 2004
6773544 Magnetic barrier for plasma in chamber exhaust Aug. 10, 2004

1 2 3

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