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Class Information
Number: 156/345.37
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With heating or cooling means for apparatus part other than workpiece support
Description: Apparatus including a means for heating or cooling a part of the apparatus other than a workpiece support to alter or maintain the temperature thereof.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8703586 Apparatus for forming deposited film and method for forming deposited film Apr. 22, 2014
8692166 Substrate heating device and substrate heating method Apr. 8, 2014
8668775 Machine CVD shower head Mar. 11, 2014
8652260 Apparatus for holding semiconductor wafers Feb. 18, 2014
8647438 Annular baffle Feb. 11, 2014
8632634 Coating apparatus and coating method Jan. 21, 2014
8608854 CVD device Dec. 17, 2013
8597462 Movable chamber liner plasma confinement screen combination for plasma processing apparatuses Dec. 3, 2013
8573154 Plasma film forming apparatus Nov. 5, 2013
8555810 Plasma dry etching apparatus having coupling ring with cooling and heating units Oct. 15, 2013
8555809 Method for constant concentration evaporation and a device using the same Oct. 15, 2013
8540843 Plasma chamber top piece assembly Sep. 24, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8529729 Plasma processing chamber component having adaptive thermal conductor Sep. 10, 2013
8506713 Film deposition apparatus and film deposition method Aug. 13, 2013
8500952 Plasma confinement rings having reduced polymer deposition characteristics Aug. 6, 2013
8491720 HVPE precursor source hardware Jul. 23, 2013
8485127 Processing apparatus Jul. 16, 2013
8486221 Focus ring heating method, plasma etching apparatus, and plasma etching method Jul. 16, 2013
8476561 Substrate heating device and substrate heating method Jul. 2, 2013
8470094 Apparatus for continuous coating Jun. 25, 2013
8444926 Processing chamber with heated chamber liner May. 21, 2013
8430960 Deposition systems and susceptor assemblies for depositing a film on a substrate Apr. 30, 2013
8430963 Cool-down system and method for a vapor deposition system Apr. 30, 2013
8419854 Film-forming apparatus Apr. 16, 2013
8419893 Shielded lid heater assembly Apr. 16, 2013
8409399 Reduced maintenance chemical oxide removal (COR) processing system Apr. 2, 2013
8398771 Substrate processing apparatus Mar. 19, 2013
8388755 Thermalization of gaseous precursors in CVD reactors Mar. 5, 2013
8382902 Single disc vapor lubrication Feb. 26, 2013
8377253 Pulsed etching cooling Feb. 19, 2013
8377252 Apparatus for spraying etchant onto printed circuit board Feb. 19, 2013
8375891 Vacuum vapor processing apparatus Feb. 19, 2013
8372203 Apparatus temperature control and pattern compensation Feb. 12, 2013
8343277 Substrate processing apparatus Jan. 1, 2013
8328981 Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated Dec. 11, 2012
8317922 Gas injection unit and thin film deposition apparatus having the same Nov. 27, 2012
8317968 Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing Nov. 27, 2012
8308865 Showerhead for chemical vapor deposition and chemical vapor deposition apparatus having the same Nov. 13, 2012
8302554 Apparatus and method for rapid cooling of large area substrates in vacuum Nov. 6, 2012
8303712 Substrate processing apparatus, method for manufacturing semiconductor device, and process tube Nov. 6, 2012
8304021 Vapor phase deposition apparatus, method for depositing thin film and method for manufacturing semiconductor device Nov. 6, 2012
8282769 Shower head and plasma processing apparatus having same Oct. 9, 2012
8137467 Temperature controlled showerhead Mar. 20, 2012
8133323 Film forming apparatus and method, gas supply device and storage medium Mar. 13, 2012
8128751 Film-forming apparatus Mar. 6, 2012
8110044 Substrate processing apparatus and temperature control device Feb. 7, 2012
8092641 System and method for removing organic residue from a charged particle beam system Jan. 10, 2012
8075692 Fluid bed reactor Dec. 13, 2011
8062471 Proximity head heating method and apparatus Nov. 22, 2011

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