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Class Information
Number: 156/345.36
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With plasma generation means remote from processing chamber > By microwave
Description: Apparatus wherein the plasma is generated by microwave excitation of a gas.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8679307 Method and apparatus for preparing specimens for microscopy Mar. 25, 2014
8622021 High lifetime consumable silicon nitride-silicon dioxide plasma processing components Jan. 7, 2014
8608901 Process chamber cleaning method in substrate processing apparatus, substrate processing apparatus, and substrate processing method Dec. 17, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8500952 Plasma confinement rings having reduced polymer deposition characteristics Aug. 6, 2013
8491720 HVPE precursor source hardware Jul. 23, 2013
8480848 Plasma processing apparatus Jul. 9, 2013
8419854 Film-forming apparatus Apr. 16, 2013
8420168 Delivery device for deposition Apr. 16, 2013
8382940 Device and method for producing chlorine trifluoride and system for etching semiconductor substrates using this device Feb. 26, 2013
8361274 Etching apparatus and etching method Jan. 29, 2013
8343308 Ceiling plate and plasma process apparatus Jan. 1, 2013
8327796 Plasma processing apparatus and plasma processing method Dec. 11, 2012
8316797 Microwave plasma reactors Nov. 27, 2012
8317971 Plasma processing apparatus and method of manufacturing magnetic recording medium Nov. 27, 2012
8308898 Tuner and microwave plasma source Nov. 13, 2012
8273210 Plasma processing apparatus and method for adjusting plasma density distribution Sep. 25, 2012
8267040 Plasma processing apparatus and plasma processing method Sep. 18, 2012
8262798 Shower head, device and method for manufacturing thin films Sep. 11, 2012
8252116 Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems Aug. 28, 2012
8236106 Shower head and substrate processing apparatus Aug. 7, 2012
8211231 Delivery device for deposition Jul. 3, 2012
8136479 Plasma treatment apparatus and plasma treatment method Mar. 20, 2012
8133348 Plasma generating apparatus and plasma treatment apparatus Mar. 13, 2012
8006640 Plasma processing apparatus and plasma processing method Aug. 30, 2011
7934468 Plasma processing apparatus and plasma processing method May. 3, 2011
7806077 Plasma nozzle array for providing uniform scalable microwave plasma generation Oct. 5, 2010
7789992 Neutral beam etching device for separating and accelerating plasma Sep. 7, 2010
7779783 Plasma processing device Aug. 24, 2010
7694651 High velocity method for deposing diamond films from a gaseous phase in SHF discharge plasma and device for carrying out said method Apr. 13, 2010
7682482 Plasma generation apparatus and work processing apparatus Mar. 23, 2010
7655111 Plasma processing apparatus and plasma processing method Feb. 2, 2010
7650853 Device for applying electromagnetic microwave radiation in a plasma cavity Jan. 26, 2010
7603963 Controlled zone microwave plasma system Oct. 20, 2009
7584714 Method and system for improving coupling between a surface wave plasma source and a plasma space Sep. 8, 2009
7581511 Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes Sep. 1, 2009
7565879 Plasma processing apparatus Jul. 28, 2009
7562638 Methods and arrangement for implementing highly efficient plasma traps Jul. 21, 2009
7527706 Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus May. 5, 2009
7524395 Plasma chamber having plasma source coil and method for etching the wafer using the same Apr. 28, 2009
7520245 Plasma processing apparatus Apr. 21, 2009
7517437 RF powered target for increasing deposition uniformity in sputtering systems Apr. 14, 2009
7485204 ECR plasma source and ECR plasma device Feb. 3, 2009
7478609 Plasma process apparatus and its processor Jan. 20, 2009
7444955 Apparatus for directing plasma flow to coat internal passageways Nov. 4, 2008
7442272 Apparatus for manufacturing semiconductor device Oct. 28, 2008
7432468 Plasma processing apparatus and plasma processing method Oct. 7, 2008
7430985 Plasma processing equipment Oct. 7, 2008
7400096 Large area plasma source Jul. 15, 2008
7381290 Microwave plasma generator Jun. 3, 2008

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