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Class Information
Number: 156/345.36
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With plasma generation means remote from processing chamber > By microwave
Description: Apparatus wherein the plasma is generated by microwave excitation of a gas.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7603963 |
Controlled zone microwave plasma system |
Oct. 20, 2009 |
| 7584714 |
Method and system for improving coupling between a surface wave plasma source and a plasma space |
Sep. 8, 2009 |
| 7581511 |
Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
Sep. 1, 2009 |
| 7565879 |
Plasma processing apparatus |
Jul. 28, 2009 |
| 7562638 |
Methods and arrangement for implementing highly efficient plasma traps |
Jul. 21, 2009 |
| 7527706 |
Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
May. 5, 2009 |
| 7524395 |
Plasma chamber having plasma source coil and method for etching the wafer using the same |
Apr. 28, 2009 |
| 7520245 |
Plasma processing apparatus |
Apr. 21, 2009 |
| 7517437 |
RF powered target for increasing deposition uniformity in sputtering systems |
Apr. 14, 2009 |
| 7485204 |
ECR plasma source and ECR plasma device |
Feb. 3, 2009 |
| 7478609 |
Plasma process apparatus and its processor |
Jan. 20, 2009 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7442272 |
Apparatus for manufacturing semiconductor device |
Oct. 28, 2008 |
| 7432468 |
Plasma processing apparatus and plasma processing method |
Oct. 7, 2008 |
| 7430985 |
Plasma processing equipment |
Oct. 7, 2008 |
| 7400096 |
Large area plasma source |
Jul. 15, 2008 |
| 7381290 |
Microwave plasma generator |
Jun. 3, 2008 |
| 7338575 |
Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
Mar. 4, 2008 |
| 7325511 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus |
Feb. 5, 2008 |
| 7311796 |
Plasma processing apparatus |
Dec. 25, 2007 |
| 7305934 |
Plasma treatment apparatus and plasma generation method |
Dec. 11, 2007 |
| 7296533 |
Radial antenna and plasma device using it |
Nov. 20, 2007 |
| 7243610 |
Plasma device and plasma generating method |
Jul. 17, 2007 |
| 7234413 |
Plasma processing apparatus |
Jun. 26, 2007 |
| 7226524 |
Plasma processing apparatus |
Jun. 5, 2007 |
| 7210424 |
High-density plasma processing apparatus |
May. 1, 2007 |
| 7171919 |
Diamond film depositing apparatus using microwaves and plasma |
Feb. 6, 2007 |
| 7159536 |
Device and method for generating a local by micro-structure electrode dis-charges with microwaves |
Jan. 9, 2007 |
| 7140321 |
Plasma processing apparatus and method |
Nov. 28, 2006 |
| 7115184 |
Plasma processing device |
Oct. 3, 2006 |
| 7037376 |
Backflush chamber clean |
May. 2, 2006 |
| 7017514 |
Method and apparatus for plasma optimization in water processing |
Mar. 28, 2006 |
| 7015413 |
Plasma generation system having a refractor |
Mar. 21, 2006 |
| 6994769 |
In-situ cleaning of a polymer coated plasma processing chamber |
Feb. 7, 2006 |
| 6921437 |
Gas distribution system |
Jul. 26, 2005 |
| 6916400 |
Device for the plasma treatment of gases |
Jul. 12, 2005 |
| 6910441 |
Pressure regulating system of plasma processing equipment |
Jun. 28, 2005 |
| 6891123 |
Plasma ignition method and apparatus |
May. 10, 2005 |
| 6863021 |
Method and apparatus for providing and integrating a general metal delivery source (GMDS) with atomic layer deposition (ALD) |
Mar. 8, 2005 |
| 6764572 |
Apparatus and method for semiconductor wafer etching |
Jul. 20, 2004 |
| 6696662 |
Methods and apparatus for plasma processing |
Feb. 24, 2004 |
| 6683272 |
Plasma source for spectrometry |
Jan. 27, 2004 |
| 6663715 |
Plasma CVD apparatus for large area CVD film |
Dec. 16, 2003 |
| 6660647 |
Method for processing surface of sample |
Dec. 9, 2003 |
| 6641698 |
Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow |
Nov. 4, 2003 |
| 6620290 |
Plasma process apparatus |
Sep. 16, 2003 |
| 6607633 |
Plasma generating device and plasma processing apparatus comprising such a device |
Aug. 19, 2003 |
| 6502529 |
Chamber having improved gas energizer and method |
Jan. 7, 2003 |
| 6450117 |
Directing a flow of gas in a substrate processing chamber |
Sep. 17, 2002 |
| 6450116 |
Apparatus for exposing a substrate to plasma radicals |
Sep. 17, 2002 |
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