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Class Information
Number: 156/345.35
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With plasma generation means remote from processing chamber
Description: Apparatus including means, external to the processing (etching) chamber, for generating a plasma.

Sub-classes under this class:

Class Number Class Name Patents
156/345.36 By microwave 138

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8671879 Systems and methods for plasma processing of microfeature workpieces Mar. 18, 2014
8652297 Symmetric VHF plasma power coupler with active uniformity steering Feb. 18, 2014
8653405 Method for operating a vacuum plasma process system Feb. 18, 2014
8641862 High dose implantation strip (HDIS) in H2 base chemistry Feb. 4, 2014
8623142 Coating apparatus Jan. 7, 2014
8622021 High lifetime consumable silicon nitride-silicon dioxide plasma processing components Jan. 7, 2014
8591699 Method and system for supplying a cleaning gas into a process chamber Nov. 26, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8573154 Plasma film forming apparatus Nov. 5, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8480848 Plasma processing apparatus Jul. 9, 2013
8475622 Method of reusing a consumable part for use in a plasma processing apparatus Jul. 2, 2013
8420168 Delivery device for deposition Apr. 16, 2013
8419854 Film-forming apparatus Apr. 16, 2013
8382940 Device and method for producing chlorine trifluoride and system for etching semiconductor substrates using this device Feb. 26, 2013
8361274 Etching apparatus and etching method Jan. 29, 2013
8349128 Method and apparatus for stable plasma processing Jan. 8, 2013
8343308 Ceiling plate and plasma process apparatus Jan. 1, 2013
8343307 Showerhead assembly Jan. 1, 2013
8336490 Plasma processing apparatus Dec. 25, 2012
8316797 Microwave plasma reactors Nov. 27, 2012
8317971 Plasma processing apparatus and method of manufacturing magnetic recording medium Nov. 27, 2012
8291857 Apparatuses and methods for atomic layer deposition Oct. 23, 2012
8281741 Plasma deposition apparatus and deposition method utilizing same Oct. 9, 2012
8262798 Shower head, device and method for manufacturing thin films Sep. 11, 2012
8252118 Substrate support device and plasma processing apparatus Aug. 28, 2012
8252116 Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems Aug. 28, 2012
8236106 Shower head and substrate processing apparatus Aug. 7, 2012
8221579 Method of reusing a consumable part for use in a plasma processing apparatus Jul. 17, 2012
8211231 Delivery device for deposition Jul. 3, 2012
8206604 Methods and arrangements for managing plasma confinement Jun. 26, 2012
8142607 High density helicon plasma source for wide ribbon ion beam generation Mar. 27, 2012
8133347 Vacuum plasma generator Mar. 13, 2012
8100081 Edge removal of films using externally generated plasma species Jan. 24, 2012
8075732 EUV collector debris management Dec. 13, 2011
8070879 Apparatus and method for hybrid chemical processing Dec. 6, 2011
8057633 Post-etch treatment system for removing residue on a substrate Nov. 15, 2011
8038836 Plasma processing apparatus Oct. 18, 2011
7942112 Method and apparatus for preventing the formation of a plasma-inhibiting substance May. 17, 2011
7909961 Method and apparatus for photomask plasma etching Mar. 22, 2011
7908104 Plasma processing apparatus and method for detecting status of said apparatus Mar. 15, 2011
7883601 Apparatus and method for controlling relative particle speeds in a plasma Feb. 8, 2011
7862683 Chamber dry cleaning Jan. 4, 2011
7850864 Plasma treating apparatus and plasma treating method Dec. 14, 2010
7822494 Method for generating and using a plasma processing control program Oct. 26, 2010
7811409 Bare aluminum baffles for resist stripping chambers Oct. 12, 2010
7799138 In-situ method to reduce particle contamination in a vacuum plasma processing tool Sep. 21, 2010
7799134 Shower plate having projections and plasma CVD apparatus using same Sep. 21, 2010
7772030 Multipurpose decapsulation holder and method for a ball grid array package Aug. 10, 2010
7748344 Segmented resonant antenna for radio frequency inductively coupled plasmas Jul. 6, 2010

1 2 3 4

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