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Class Information
Number: 156/345.34
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With gas inlet structure (e.g., inlet nozzle, gas distributor) > Showerhead-type
Description: Apparatus wherein the gas inlet includes a substantially flat plate with a plurality of gas-passing through-holes therein.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8702866 Showerhead electrode assembly with gas flow modification for extended electrode life Apr. 22, 2014
8702867 Gas distribution plate and substrate treating apparatus including the same Apr. 22, 2014
8679252 Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof Mar. 25, 2014
8679254 Vapor phase epitaxy apparatus of group III nitride semiconductor Mar. 25, 2014
8679255 Gas supply device, substrate processing apparatus and substrate processing method Mar. 25, 2014
8679288 Showerhead electrode assemblies for plasma processing apparatuses Mar. 25, 2014
8673080 Temperature controlled showerhead Mar. 18, 2014
8668775 Machine CVD shower head Mar. 11, 2014
8663424 Plasma processing apparatus and gas supply member support device Mar. 4, 2014
8652296 Side gas injector for plasma reaction chamber Feb. 18, 2014
8642481 Dry-etch for silicon-and-nitrogen-containing films Feb. 4, 2014
8636847 Chemical vapor deposition flow inlet elements and methods Jan. 28, 2014
8632634 Coating apparatus and coating method Jan. 21, 2014
8631762 Plasma CVD apparatus, method for manufacturing semiconductor film, method for manufacturing thin-film solar cell, and method for cleaning plasma CVD apparatus Jan. 21, 2014
8623172 Gas flow path structure and substrate processing apparatus Jan. 7, 2014
8617347 Vacuum processing chambers incorporating a moveable flow equalizer Dec. 31, 2013
8617349 Showerhead assembly for plasma processing chamber Dec. 31, 2013
8617350 Linear plasma system Dec. 31, 2013
8608852 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies Dec. 17, 2013
8603292 Quartz window for a degas chamber Dec. 10, 2013
8604697 Apparatus for generating plasma Dec. 10, 2013
8597462 Movable chamber liner plasma confinement screen combination for plasma processing apparatuses Dec. 3, 2013
8591655 Apparatus for the preparation of film Nov. 26, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8574445 Method for generating hollow cathode plasma and method for treating large area substrate using hollow cathode plasma Nov. 5, 2013
8568555 Method and apparatus for reducing substrate temperature variability Oct. 29, 2013
8562742 Apparatus for radial delivery of gas to a chamber and methods of use thereof Oct. 22, 2013
8562785 Gas distribution showerhead for inductively coupled plasma etch reactor Oct. 22, 2013
8551890 Showerhead for CVD depositions Oct. 8, 2013
8551288 Apparatus and method for removing a photoresist structure from a substrate Oct. 8, 2013
8551248 Showerhead for CVD depositions Oct. 8, 2013
8539908 Film forming apparatus, film forming method and storage medium Sep. 24, 2013
8536071 Gasket with positioning feature for clamped monolithic showerhead electrode Sep. 17, 2013
8528498 Integrated steerability array arrangement for minimizing non-uniformity Sep. 10, 2013
8529730 Plasma processing apparatus Sep. 10, 2013
8512510 Plasma processing method and apparatus Aug. 20, 2013
8512509 Plasma reactor gas distribution plate with radially distributed path splitting manifold Aug. 20, 2013
8512472 Method and apparatus to enhance process gas temperature in a CVD reactor Aug. 20, 2013
8506713 Film deposition apparatus and film deposition method Aug. 13, 2013
8506754 Cross flow CVD reactor Aug. 13, 2013
8496780 Apparatus for the deposition of high dielectric constant films Jul. 30, 2013
8496781 Plasma processing apparatus Jul. 30, 2013
8491720 HVPE precursor source hardware Jul. 23, 2013
8484846 Method of joining components for a composite showerhead electrode assembly for a plasma processing apparatus Jul. 16, 2013
8480849 Substrate processing apparatus and electrode structure Jul. 9, 2013
8449715 Internal member of a plasma processing vessel May. 28, 2013
8440019 Lower liner with integrated flow equalizer and improved conductance May. 14, 2013
8440049 Apparatus for etching high aspect ratio features May. 14, 2013
8430960 Deposition systems and susceptor assemblies for depositing a film on a substrate Apr. 30, 2013
8430962 Gas supply device, substrate processing apparatus and substrate processing method Apr. 30, 2013

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