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Class Information
Number: 156/345.32
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With means for passing discrete workpiece through plural chambers (e.g., loadlock) > With robot arm connected by doors to plural other chambers (i.e., cluster tool)
Description: Apparatus wherein the means for passing is a movable articulated arm connected by doors to a plurality of chambers.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
7762208 Loading and unloading apparatus for a coating device Jul. 27, 2010
7763115 Vacuum film-forming apparatus Jul. 27, 2010
7756599 Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program Jul. 13, 2010
7754014 Gas-purged vacuum valve Jul. 13, 2010
7738987 Device and method for controlling substrate processing apparatus Jun. 15, 2010
7707965 Processing apparatus and lid opening/closing mechanism May. 4, 2010
7682454 Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems Mar. 23, 2010
7682455 Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components Mar. 23, 2010
7670754 Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers Mar. 2, 2010
7628824 Substrate processing apparatus for processing plurality of substrates in succession Dec. 8, 2009
7622006 Processed body carrying device, and processing system with carrying device Nov. 24, 2009
7622008 Gate valve and vacuum container for semiconductor processing system Nov. 24, 2009
7611322 Processing thin wafers Nov. 3, 2009
7611585 Plasma reaction chamber with a built-in magnetic core Nov. 3, 2009
7592261 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system Sep. 22, 2009
7585370 Gas-purged vacuum valve Sep. 8, 2009
7585141 Load lock system for ion beam processing Sep. 8, 2009
7585383 Vacuum processing apparatus Sep. 8, 2009
7537673 Plasma processing apparatus May. 26, 2009
7497912 Substrate processing apparatus Mar. 3, 2009
7455747 Substrate processing apparatus, control method for the apparatus, and program for implementing the method Nov. 25, 2008
7445689 Substrate processing method and substrate processing system Nov. 4, 2008
7431795 Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor Oct. 7, 2008
7422653 Single-sided inflatable vertical slit valve Sep. 9, 2008
7371306 Integrated tool with interchangeable wet processing components for processing microfeature workpieces May. 13, 2008
7361600 Semiconductor manufacturing apparatus having a built-in inspection apparatus and a device manufacturing method using said manufacturing apparatus Apr. 22, 2008
7357846 Substrate processing apparatus and substrate processing method Apr. 15, 2008
7351291 Semiconductor processing system Apr. 1, 2008
7351292 Assembly for processing substrates Apr. 1, 2008
7335277 Vacuum processing apparatus Feb. 26, 2008
7331751 Vacuum processing method Feb. 19, 2008
7285916 Multi chamber plasma process system Oct. 23, 2007
7282097 Slit valve door seal Oct. 16, 2007
7279067 Port structure in semiconductor processing system Oct. 9, 2007
7276124 Reactor having a movable shutter Oct. 2, 2007
7276097 Load-lock system, exposure processing system, and device manufacturing method Oct. 2, 2007
7247207 Vacuum processing apparatus Jul. 24, 2007
7244335 Substrate processing system and substrate processing method Jul. 17, 2007
7232286 Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber Jun. 19, 2007
7223702 Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices May. 29, 2007
7214274 Method and apparatus for thermally insulating adjacent temperature controlled processing chambers May. 8, 2007
7208047 Apparatus and method for thermally isolating a heat chamber Apr. 24, 2007
7208066 Substrate processing apparatus and substrate processing method Apr. 24, 2007
7201823 High throughput plasma treatment system Apr. 10, 2007
7192487 Semiconductor substrate processing chamber and accessory attachment interfacial structure Mar. 20, 2007
7179397 Plasma processing methods and apparatus Feb. 20, 2007
7153367 Drive mechanism for a vacuum treatment apparatus Dec. 26, 2006
7128803 Integration of sensor based metrology into semiconductor processing tools Oct. 31, 2006
7105061 Method and apparatus for sealing substrate load port in a high pressure reactor Sep. 12, 2006
7090741 Semiconductor processing system Aug. 15, 2006

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