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Class Information
Number: 156/345.32
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With means for passing discrete workpiece through plural chambers (e.g., loadlock) > With robot arm connected by doors to plural other chambers (i.e., cluster tool)
Description: Apparatus wherein the means for passing is a movable articulated arm connected by doors to a plurality of chambers.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7670754 |
Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers |
Mar. 2, 2010 |
| 7628824 |
Substrate processing apparatus for processing plurality of substrates in succession |
Dec. 8, 2009 |
| 7622008 |
Gate valve and vacuum container for semiconductor processing system |
Nov. 24, 2009 |
| 7622006 |
Processed body carrying device, and processing system with carrying device |
Nov. 24, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7611585 |
Plasma reaction chamber with a built-in magnetic core |
Nov. 3, 2009 |
| 7592261 |
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system |
Sep. 22, 2009 |
| 7585141 |
Load lock system for ion beam processing |
Sep. 8, 2009 |
| 7585370 |
Gas-purged vacuum valve |
Sep. 8, 2009 |
| 7585383 |
Vacuum processing apparatus |
Sep. 8, 2009 |
| 7537673 |
Plasma processing apparatus |
May. 26, 2009 |
| 7497912 |
Substrate processing apparatus |
Mar. 3, 2009 |
| 7455747 |
Substrate processing apparatus, control method for the apparatus, and program for implementing the method |
Nov. 25, 2008 |
| 7445689 |
Substrate processing method and substrate processing system |
Nov. 4, 2008 |
| 7431795 |
Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor |
Oct. 7, 2008 |
| 7422653 |
Single-sided inflatable vertical slit valve |
Sep. 9, 2008 |
| 7371306 |
Integrated tool with interchangeable wet processing components for processing microfeature workpieces |
May. 13, 2008 |
| 7361600 |
Semiconductor manufacturing apparatus having a built-in inspection apparatus and a device manufacturing method using said manufacturing apparatus |
Apr. 22, 2008 |
| 7357846 |
Substrate processing apparatus and substrate processing method |
Apr. 15, 2008 |
| 7351292 |
Assembly for processing substrates |
Apr. 1, 2008 |
| 7351291 |
Semiconductor processing system |
Apr. 1, 2008 |
| 7335277 |
Vacuum processing apparatus |
Feb. 26, 2008 |
| 7331751 |
Vacuum processing method |
Feb. 19, 2008 |
| 7285916 |
Multi chamber plasma process system |
Oct. 23, 2007 |
| 7282097 |
Slit valve door seal |
Oct. 16, 2007 |
| 7279067 |
Port structure in semiconductor processing system |
Oct. 9, 2007 |
| 7276097 |
Load-lock system, exposure processing system, and device manufacturing method |
Oct. 2, 2007 |
| 7276124 |
Reactor having a movable shutter |
Oct. 2, 2007 |
| 7247207 |
Vacuum processing apparatus |
Jul. 24, 2007 |
| 7244335 |
Substrate processing system and substrate processing method |
Jul. 17, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7223702 |
Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices |
May. 29, 2007 |
| 7214274 |
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
May. 8, 2007 |
| 7208047 |
Apparatus and method for thermally isolating a heat chamber |
Apr. 24, 2007 |
| 7208066 |
Substrate processing apparatus and substrate processing method |
Apr. 24, 2007 |
| 7201823 |
High throughput plasma treatment system |
Apr. 10, 2007 |
| 7192487 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure |
Mar. 20, 2007 |
| 7179397 |
Plasma processing methods and apparatus |
Feb. 20, 2007 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7128803 |
Integration of sensor based metrology into semiconductor processing tools |
Oct. 31, 2006 |
| 7105061 |
Method and apparatus for sealing substrate load port in a high pressure reactor |
Sep. 12, 2006 |
| 7090741 |
Semiconductor processing system |
Aug. 15, 2006 |
| 7077929 |
Apparatus for manufacturing a semiconductor device |
Jul. 18, 2006 |
| 7060422 |
Method of supercritical processing of a workpiece |
Jun. 13, 2006 |
| 7018517 |
Transfer chamber for vacuum processing system |
Mar. 28, 2006 |
| 7018504 |
Loadlock with integrated pre-clean chamber |
Mar. 28, 2006 |
| 6972055 |
Continuous flow deposition system |
Dec. 6, 2005 |
| 6962644 |
Tandem etch chamber plasma processing system |
Nov. 8, 2005 |
| 6949144 |
Low pressure plasma processing apparatus and method |
Sep. 27, 2005 |
| 6936134 |
Substrate processing apparatus and substrate processing method |
Aug. 30, 2005 |
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