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Class Information
Number: 156/345.32
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With means for passing discrete workpiece through plural chambers (e.g., loadlock) > With robot arm connected by doors to plural other chambers (i.e., cluster tool)
Description: Apparatus wherein the means for passing is a movable articulated arm connected by doors to a plurality of chambers.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8685203 Dry etcher including etching device and cleaning device Apr. 1, 2014
8663489 Substrate replacing method and substrate processing apparatus Mar. 4, 2014
8641824 Method and apparatus for a cleanspace fabricator Feb. 4, 2014
8623457 Vacuum processing system Jan. 7, 2014
8562275 Transfer device and semiconductor processing system Oct. 22, 2013
8562744 Coating device Oct. 22, 2013
8491751 Plasma processing apparatus Jul. 23, 2013
8475623 Substrate processing method, system and program Jul. 2, 2013
8460468 Device for doping, deposition or oxidation of semiconductor material at low pressure Jun. 11, 2013
8440048 Load lock having secondary isolation chamber May. 14, 2013
8430961 Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber Apr. 30, 2013
8430992 Protective self-aligned buffer layers for damascene interconnects Apr. 30, 2013
8419341 Linear vacuum robot with Z motion and articulated arm Apr. 16, 2013
8414703 Advanced mixing system for integrated tool having site-isolated reactors Apr. 9, 2013
8409353 Water cooled gas injector Apr. 2, 2013
8377213 Slit valve having increased flow uniformity Feb. 19, 2013
8354001 Processing thin wafers Jan. 15, 2013
8353986 Substrate processing apparatus Jan. 15, 2013
8349085 Substrate processing apparatus Jan. 8, 2013
8328940 Apparatus for transferring a substrate Dec. 11, 2012
8322299 Cluster processing apparatus for metallization processing in semiconductor manufacturing Dec. 4, 2012
8323451 System and method for self-aligned dual patterning Dec. 4, 2012
8303764 Apparatus and methods for transporting and processing substrates Nov. 6, 2012
8293066 Apparatus and methods for transporting and processing substrates Oct. 23, 2012
8236132 Substrate processing system and substrate transfer method Aug. 7, 2012
8207069 Advanced mixing method for integrated tool having site-isolated reactors Jun. 26, 2012
8206551 Processing thin wafers Jun. 26, 2012
8197635 Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus Jun. 12, 2012
8197636 Systems for plasma enhanced chemical vapor deposition and bevel edge etching Jun. 12, 2012
8172949 Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program May. 8, 2012
8147924 Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus Apr. 3, 2012
8097084 Vacuum chamber system for semiconductor processing Jan. 17, 2012
8075730 Apparatus for manufacturing a semiconductor device Dec. 13, 2011
8070926 Multi-chamber workpiece processing Dec. 6, 2011
8048259 Vacuum processing apparatus Nov. 1, 2011
8043200 Method and storage medium for replacing process instrument in processing apparatus Oct. 25, 2011
7993456 Device for carrying out a surface treatment of substrates under vacuum Aug. 9, 2011
7993458 Vacuum processing apparatus and method Aug. 9, 2011
7988812 Substrate treatment apparatus Aug. 2, 2011
7981217 Vertical heat treatment apparatus and method of transferring substrates to be processed Jul. 19, 2011
7972468 Semiconductor device fabricating system Jul. 5, 2011
7905960 Apparatus for manufacturing substrate Mar. 15, 2011
7901539 Apparatus and methods for transporting and processing substrates Mar. 8, 2011
7883582 Vacuum processing apparatus and method Feb. 8, 2011
7879181 Apparatus for manufacturing flat-panel display Feb. 1, 2011
7833351 Batch processing platform for ALD and CVD Nov. 16, 2010
7828900 Vacuum film-forming apparatus Nov. 9, 2010
7824497 Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus Nov. 2, 2010
7815739 Vertical batch processing apparatus Oct. 19, 2010
7815558 Method and storage medium for replacing process instrument in processing apparatus Oct. 19, 2010

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