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Class Information
Number: 156/345.31
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With means for passing discrete workpiece through plural chambers (e.g., loadlock)
Description: Apparatus including means to pass a single workpiece through a plurality of separate treatment or vacuum chambers.










Sub-classes under this class:

Class Number Class Name Patents
156/345.32 With robot arm connected by doors to plural other chambers (i.e., cluster tool) 235


Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8679307 Method and apparatus for preparing specimens for microscopy Mar. 25, 2014
8663489 Substrate replacing method and substrate processing apparatus Mar. 4, 2014
8632854 Substrate centering device and organic material deposition system Jan. 21, 2014
8623142 Coating apparatus Jan. 7, 2014
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus Jan. 7, 2014
8617348 Modulating etch selectivity and etch rate of silicon nitride thin films Dec. 31, 2013
8617347 Vacuum processing chambers incorporating a moveable flow equalizer Dec. 31, 2013
8608422 Particle sticking prevention apparatus and plasma processing apparatus Dec. 17, 2013
8573154 Plasma film forming apparatus Nov. 5, 2013
8562275 Transfer device and semiconductor processing system Oct. 22, 2013
8562744 Coating device Oct. 22, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8525139 Method and apparatus of halogen removal Sep. 3, 2013
8512473 Substrate centering device and organic material deposition system Aug. 20, 2013
8491751 Plasma processing apparatus Jul. 23, 2013
8475623 Substrate processing method, system and program Jul. 2, 2013
8467895 Processing system and method for operating the same Jun. 18, 2013
8460468 Device for doping, deposition or oxidation of semiconductor material at low pressure Jun. 11, 2013
8454750 Multi-station sequential curing of dielectric films Jun. 4, 2013
8440048 Load lock having secondary isolation chamber May. 14, 2013
8430992 Protective self-aligned buffer layers for damascene interconnects Apr. 30, 2013
8430961 Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber Apr. 30, 2013
8419341 Linear vacuum robot with Z motion and articulated arm Apr. 16, 2013
8414702 Plasma processing apparatus Apr. 9, 2013
8414703 Advanced mixing system for integrated tool having site-isolated reactors Apr. 9, 2013
8409399 Reduced maintenance chemical oxide removal (COR) processing system Apr. 2, 2013
8409353 Water cooled gas injector Apr. 2, 2013
8398813 Processing apparatus and processing method Mar. 19, 2013
8388397 Liquid crystal cell manufacturing device and method thereof Mar. 5, 2013
8382938 Gate valve cleaning method and substrate processing system Feb. 26, 2013
8375891 Vacuum vapor processing apparatus Feb. 19, 2013
8377213 Slit valve having increased flow uniformity Feb. 19, 2013
8371792 Substrate processing apparatus Feb. 12, 2013
8366829 Multi-station decoupled reactive ion etch chamber Feb. 5, 2013
8354001 Processing thin wafers Jan. 15, 2013
8353986 Substrate processing apparatus Jan. 15, 2013
8349085 Substrate processing apparatus Jan. 8, 2013
8322299 Cluster processing apparatus for metallization processing in semiconductor manufacturing Dec. 4, 2012
8303764 Apparatus and methods for transporting and processing substrates Nov. 6, 2012
8293066 Apparatus and methods for transporting and processing substrates Oct. 23, 2012
8267041 Plasma treating apparatus Sep. 18, 2012
8257601 Substrate processing method, system and program Sep. 4, 2012
8232538 Method and apparatus of halogen removal using optimal ozone and UV exposure Jul. 31, 2012
8216376 Method and apparatus for variable conductance Jul. 10, 2012
8216422 Substrate support bushing Jul. 10, 2012
8207069 Advanced mixing method for integrated tool having site-isolated reactors Jun. 26, 2012
8206551 Processing thin wafers Jun. 26, 2012
8197635 Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus Jun. 12, 2012
8197636 Systems for plasma enhanced chemical vapor deposition and bevel edge etching Jun. 12, 2012
8178444 Substrate processing method and substrate processing apparatus May. 15, 2012

1 2 3 4 5 6 7 8










 
 
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