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Class Information
Number: 156/345.3
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With mechanical mask, shield or shutter for shielding workpiece
Description: Apparatus including a mask, shield, or shutter for preventing the etchant from contacting a particular portion of the workpiece.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8702999 Method and apparatus for plasma surface treatment of a moving substrate Apr. 22, 2014
8677590 Plasma confinement structures in plasma processing systems and methods thereof Mar. 25, 2014
8673111 Plasma processing chamber for bevel edge processing Mar. 18, 2014
8647466 Combinatorial evaluation of dry semiconductor processes Feb. 11, 2014
8623171 Plasma processing apparatus Jan. 7, 2014
8603292 Quartz window for a degas chamber Dec. 10, 2013
8591697 Transmission electron microscopy sample etching fixture Nov. 26, 2013
8591656 Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor Nov. 26, 2013
8591709 Sputter deposition shield assembly to reduce cathode shorting Nov. 26, 2013
8574397 Bevel edge plasma chamber with top and bottom edge electrodes Nov. 5, 2013
8568553 Method and apparatus for photomask plasma etching Oct. 29, 2013
8557044 Shadow mask, method of manufacturing the same and method of forming thin film using the same Oct. 15, 2013
8500907 Masking system for the masking of a cylinder bore Aug. 6, 2013
8486195 Atomic layer deposition apparatus and method of fabricating atomic layer using the same Jul. 16, 2013
8475624 Method and system for distributing gas for a bevel edge etcher Jul. 2, 2013
8460469 Apparatus for etching substrate and method of etching substrate using the same Jun. 11, 2013
8440051 Plasma processing chamber for bevel edge processing May. 14, 2013
8361230 Magnetic mask holder Jan. 29, 2013
8333868 Apparatus, carrier and method for the plasma treatment of molds Dec. 18, 2012
8308896 Methods to remove films on bevel edge and backside of wafer and apparatus thereof Nov. 13, 2012
8273211 Flat panel display manufacturing apparatus Sep. 25, 2012
8268116 Methods of and apparatus for protecting a region of process exclusion adjacent to a region of process performance in a process chamber Sep. 18, 2012
8252140 Plasma chamber for wafer bevel edge processing Aug. 28, 2012
8083890 Gas modulation to control edge exclusion in a bevel edge etching plasma chamber Dec. 27, 2011
8048227 Compensation plate used in a film coating device Nov. 1, 2011
8007631 System and method for imprint lithography to facilitate dual damascene integration with two imprint acts Aug. 30, 2011
7978583 Apparatus and method for forming reflective layer of optical disc Jul. 12, 2011
7951261 Plasma etching apparatus May. 31, 2011
7943005 Method and apparatus for photomask plasma etching May. 17, 2011
7938931 Edge electrodes with variable power May. 10, 2011
7938907 Device for fabricating a mask by plasma etching a semiconductor substrate May. 10, 2011
7909960 Apparatus and methods to remove films on bevel edge and backside of wafer Mar. 22, 2011
7909961 Method and apparatus for photomask plasma etching Mar. 22, 2011
7897008 Apparatus and method for regional plasma control Mar. 1, 2011
7875555 Method for plasma processing over wide pressure range Jan. 25, 2011
7867355 Adjustable height PIF probe Jan. 11, 2011
7803229 Apparatus and method for compensating uniformity of film thickness Sep. 28, 2010
7767054 Plasma processing apparatus Aug. 3, 2010
7718031 Mask frame and method of fixing mask on the mask frame May. 18, 2010
7713377 Apparatus and method for plasma treating a substrate May. 11, 2010
7708860 Plasma processing apparatus May. 4, 2010
7678226 Method and apparatus for an improved bellows shield in a plasma processing system Mar. 16, 2010
7645356 Method of processing wafers with resonant heating Jan. 12, 2010
7635418 Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate Dec. 22, 2009
7618515 Focus ring, plasma etching apparatus and plasma etching method Nov. 17, 2009
7575638 Apparatus for defining regions of process exclusion and process performance in a process chamber Aug. 18, 2009
7568489 Method of and apparatus for eluting impurities Aug. 4, 2009
7560038 Thin film forming method and system Jul. 14, 2009
7520969 Notched deposition ring Apr. 21, 2009
7517430 Method and apparatus for the controlled formation of cavitation bubbles Apr. 14, 2009

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