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Class Information
Number: 156/345.24
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > With measuring, sensing, detection or process control means
Description: Apparatus including means to measure, sense, or detect a process condition, or to automatically control the operation of the apparatus.

Sub-classes under this class:

Class Number Class Name Patents
156/345.28 For detection or control of electrical parameter (e.g., current, voltage, resistance, power, etc.) 236
156/345.26 For detection or control of pressure or flow of etchant gas 184
156/345.25 For endpoint detection 204
156/345.27 For temperature detection or control 185

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8692166 Substrate heating device and substrate heating method Apr. 8, 2014
8683943 Plasma process apparatus and plasma process method Apr. 1, 2014
8685265 Manufacturing method of semiconductor device and semiconductor manufacturing apparatus Apr. 1, 2014
8685759 E-chuck with automated clamped force adjustment and calibration Apr. 1, 2014
8686711 High-frequency measuring device and high-frequency measuring device calibration method Apr. 1, 2014
8679255 Gas supply device, substrate processing apparatus and substrate processing method Mar. 25, 2014
8671878 Profile and CD uniformity control by plasma oxidation treatment Mar. 18, 2014
8671879 Systems and methods for plasma processing of microfeature workpieces Mar. 18, 2014
8673080 Temperature controlled showerhead Mar. 18, 2014
8627783 Combined wafer area pressure control and plasma confinement assembly Jan. 14, 2014
8608900 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Dec. 17, 2013
8601976 Gas supply system for semiconductor manufacturing facilities Dec. 10, 2013
8590484 Semiconductor device manufacturing method and substrate processing apparatus Nov. 26, 2013
8585862 Plasma processing device and plasma discharge state monitoring device Nov. 19, 2013
8580077 Plasma processing apparatus for performing accurate end point detection Nov. 12, 2013
8580693 Temperature enhanced electrostatic chucking in plasma processing apparatus Nov. 12, 2013
8574445 Method for generating hollow cathode plasma and method for treating large area substrate using hollow cathode plasma Nov. 5, 2013
8555809 Method for constant concentration evaporation and a device using the same Oct. 15, 2013
8545669 Sensor array for measuring plasma characteristics in plasma processing environments Oct. 1, 2013
8545711 Processing method Oct. 1, 2013
8547085 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber Oct. 1, 2013
8539908 Film forming apparatus, film forming method and storage medium Sep. 24, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8529728 System and method for critical dimension reduction and pitch reduction Sep. 10, 2013
8518209 Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system Aug. 27, 2013
8505478 Apparatus for high-efficiency synthesis of carbon nanostructure Aug. 13, 2013
8500950 Exposure condition setting method, substrate processing apparatus, and computer program Aug. 6, 2013
8491750 Adjustable confinement ring assembly Jul. 23, 2013
8475625 Apparatus for etching high aspect ratio features Jul. 2, 2013
8476561 Substrate heating device and substrate heating method Jul. 2, 2013
8475673 Method and apparatus for high aspect ratio dielectric etch Jul. 2, 2013
8475623 Substrate processing method, system and program Jul. 2, 2013
8470126 Wiggling control for pseudo-hardmask Jun. 25, 2013
8467895 Processing system and method for operating the same Jun. 18, 2013
8465593 Substrate processing apparatus and gas supply method Jun. 18, 2013
8460508 Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device Jun. 11, 2013
8461062 Substrate processing apparatus and method for manufacturing semiconductor device Jun. 11, 2013
8440551 Plasma doping method and manufacturing method of semiconductor device May. 14, 2013
8430962 Gas supply device, substrate processing apparatus and substrate processing method Apr. 30, 2013
8426317 Plasma processing apparatus and plasma processing method Apr. 23, 2013
8419892 Plasma process detecting sensor Apr. 16, 2013
8397667 Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters Mar. 19, 2013
8397668 Plasma processing apparatus Mar. 19, 2013
8394230 Plasma processing apparatus Mar. 12, 2013
8394229 Susceptor ring Mar. 12, 2013
8387559 Semiconductor manufacturing plant Mar. 5, 2013
8383496 Plasma doping method and manufacturing method of semiconductor device Feb. 26, 2013
8366828 Shower head and substrate processing apparatus Feb. 5, 2013
8366833 Plasma processing apparatus and plasma processing method Feb. 5, 2013
8366868 Substrate processing apparatus Feb. 5, 2013

1 2 3 4 5 6 7 8 9 10

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